AU2002335988A8 - Ion imlantation method and apparatus - Google Patents
Ion imlantation method and apparatusInfo
- Publication number
- AU2002335988A8 AU2002335988A8 AU2002335988A AU2002335988A AU2002335988A8 AU 2002335988 A8 AU2002335988 A8 AU 2002335988A8 AU 2002335988 A AU2002335988 A AU 2002335988A AU 2002335988 A AU2002335988 A AU 2002335988A AU 2002335988 A8 AU2002335988 A8 AU 2002335988A8
- Authority
- AU
- Australia
- Prior art keywords
- imlantation
- ion
- ion imlantation
- imlantation method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2658—Bombardment with radiation with high-energy radiation producing ion implantation of a molecular ion, e.g. decaborane
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0127692.2 | 2001-11-19 | ||
GB0127692A GB0127692D0 (en) | 2001-11-19 | 2001-11-19 | Method of ion implantation and an implanter for performing the method |
GB0205651A GB0205651D0 (en) | 2001-11-19 | 2002-03-11 | Method of ION implantation and an implanter for performing the method |
GB0205651.3 | 2002-03-11 | ||
PCT/GB2002/004886 WO2003044837A2 (en) | 2001-11-19 | 2002-10-30 | Ion imlantation method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2002335988A8 true AU2002335988A8 (en) | 2003-06-10 |
AU2002335988A1 AU2002335988A1 (en) | 2003-06-10 |
Family
ID=26246784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002335988A Abandoned AU2002335988A1 (en) | 2001-11-19 | 2002-10-30 | Ion imlantation method and apparatus |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2002335988A1 (en) |
WO (1) | WO2003044837A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI375660B (en) | 2004-01-22 | 2012-11-01 | Semequip Inc | Isotopically-enriched boranes and methods of preparing them |
TWI372725B (en) | 2004-01-30 | 2012-09-21 | Semequip Inc | Methods of synthesis of isotopically enriched borohydride and methods of synthesis of isotopically enriched boranes |
WO2005074586A2 (en) | 2004-02-02 | 2005-08-18 | Semequip Inc. | Method of production of b10h102- ammonium salts and methods of production of b18h22 |
JP6250677B2 (en) | 2012-08-28 | 2017-12-20 | プラクスエア・テクノロジー・インコーポレイテッド | Silicon-containing dopant composition, system and method using the same composition to improve ion beam current and performance during silicon ion implantation |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60183768A (en) * | 1984-03-02 | 1985-09-19 | Hitachi Ltd | Radiation-resisting reinforced semiconductor element |
JPH02114665A (en) * | 1988-10-25 | 1990-04-26 | Nec Corp | Radiation resistant semiconductor device |
US5395783A (en) * | 1993-02-16 | 1995-03-07 | Texas Instruments Incorporated | Electronic device and process achieving a reduction in alpha particle emissions from boron-based compounds essentially free of boron-10 |
US6107634A (en) * | 1998-04-30 | 2000-08-22 | Eaton Corporation | Decaborane vaporizer |
-
2002
- 2002-10-30 WO PCT/GB2002/004886 patent/WO2003044837A2/en not_active Application Discontinuation
- 2002-10-30 AU AU2002335988A patent/AU2002335988A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2003044837A2 (en) | 2003-05-30 |
WO2003044837A3 (en) | 2003-10-16 |
AU2002335988A1 (en) | 2003-06-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |