GB0205651D0 - Method of ION implantation and an implanter for performing the method - Google Patents

Method of ION implantation and an implanter for performing the method

Info

Publication number
GB0205651D0
GB0205651D0 GB0205651A GB0205651A GB0205651D0 GB 0205651 D0 GB0205651 D0 GB 0205651D0 GB 0205651 A GB0205651 A GB 0205651A GB 0205651 A GB0205651 A GB 0205651A GB 0205651 D0 GB0205651 D0 GB 0205651D0
Authority
GB
United Kingdom
Prior art keywords
implanter
ion implantation
implantation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0205651A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of GB0205651D0 publication Critical patent/GB0205651D0/en
Priority to PCT/GB2002/004886 priority Critical patent/WO2003044837A2/en
Priority to AU2002335988A priority patent/AU2002335988A1/en
Ceased legal-status Critical Current

Links

GB0205651A 2001-11-19 2002-03-11 Method of ION implantation and an implanter for performing the method Ceased GB0205651D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/GB2002/004886 WO2003044837A2 (en) 2001-11-19 2002-10-30 Ion imlantation method and apparatus
AU2002335988A AU2002335988A1 (en) 2001-11-19 2002-10-30 Ion imlantation method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0127692A GB0127692D0 (en) 2001-11-19 2001-11-19 Method of ion implantation and an implanter for performing the method

Publications (1)

Publication Number Publication Date
GB0205651D0 true GB0205651D0 (en) 2002-04-24

Family

ID=9926025

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0127692A Ceased GB0127692D0 (en) 2001-11-19 2001-11-19 Method of ion implantation and an implanter for performing the method
GB0205651A Ceased GB0205651D0 (en) 2001-11-19 2002-03-11 Method of ION implantation and an implanter for performing the method

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0127692A Ceased GB0127692D0 (en) 2001-11-19 2001-11-19 Method of ion implantation and an implanter for performing the method

Country Status (1)

Country Link
GB (2) GB0127692D0 (en)

Also Published As

Publication number Publication date
GB0127692D0 (en) 2002-01-09

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)