AU2002320196A1 - Substrate handling end effector - Google Patents

Substrate handling end effector

Info

Publication number
AU2002320196A1
AU2002320196A1 AU2002320196A AU2002320196A AU2002320196A1 AU 2002320196 A1 AU2002320196 A1 AU 2002320196A1 AU 2002320196 A AU2002320196 A AU 2002320196A AU 2002320196 A AU2002320196 A AU 2002320196A AU 2002320196 A1 AU2002320196 A1 AU 2002320196A1
Authority
AU
Australia
Prior art keywords
end effector
substrate handling
handling end
substrate
effector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002320196A
Inventor
Hakan Elmali
Tuan T. Ha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of AU2002320196A1 publication Critical patent/AU2002320196A1/en
Abandoned legal-status Critical Current

Links

AU2002320196A 2001-07-03 2002-06-26 Substrate handling end effector Abandoned AU2002320196A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/898,693 2001-07-03

Publications (1)

Publication Number Publication Date
AU2002320196A1 true AU2002320196A1 (en) 2003-01-21

Family

ID=

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