Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319934A
Inventor
Jang-Ho Bae
Hyun-Soo Kyung
Ik-Haeng Lee
Sang-Jin Lee
Sang-Kyu Lee
Hong-Joo Lim
Young-Hoon Park
Keun-Jae Yoo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IPS Ltd
Original Assignee
IPS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IPS LtdfiledCriticalIPS Ltd
Publication of AU2002319934A1publicationCriticalpatent/AU2002319934A1/en
AU2002319934A2001-07-192002-07-16Reactor for thin film deposition and method for depositing thin film on wafer using the reactor
AbandonedAU2002319934A1
(en)