AU2002319934A1 - Reactor for thin film deposition and method for depositing thin film on wafer using the reactor - Google Patents

Reactor for thin film deposition and method for depositing thin film on wafer using the reactor

Info

Publication number
AU2002319934A1
AU2002319934A1 AU2002319934A AU2002319934A AU2002319934A1 AU 2002319934 A1 AU2002319934 A1 AU 2002319934A1 AU 2002319934 A AU2002319934 A AU 2002319934A AU 2002319934 A AU2002319934 A AU 2002319934A AU 2002319934 A1 AU2002319934 A1 AU 2002319934A1
Authority
AU
Australia
Prior art keywords
reactor
thin film
wafer
depositing
film deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319934A
Inventor
Jang-Ho Bae
Hyun-Soo Kyung
Ik-Haeng Lee
Sang-Jin Lee
Sang-Kyu Lee
Hong-Joo Lim
Young-Hoon Park
Keun-Jae Yoo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IPS Ltd
Original Assignee
IPS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IPS Ltd filed Critical IPS Ltd
Publication of AU2002319934A1 publication Critical patent/AU2002319934A1/en
Abandoned legal-status Critical Current

Links

AU2002319934A 2001-07-19 2002-07-16 Reactor for thin film deposition and method for depositing thin film on wafer using the reactor Abandoned AU2002319934A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2001/43496 2001-07-19

Publications (1)

Publication Number Publication Date
AU2002319934A1 true AU2002319934A1 (en) 2003-03-03

Family

ID=

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