AU2002304649A1 - Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates - Google Patents

Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates

Info

Publication number
AU2002304649A1
AU2002304649A1 AU2002304649A AU2002304649A AU2002304649A1 AU 2002304649 A1 AU2002304649 A1 AU 2002304649A1 AU 2002304649 A AU2002304649 A AU 2002304649A AU 2002304649 A AU2002304649 A AU 2002304649A AU 2002304649 A1 AU2002304649 A1 AU 2002304649A1
Authority
AU
Australia
Prior art keywords
vacuum deposition
deposition apparatus
optical films
thin optical
high curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002304649A
Inventor
Luigi Rossi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Satisloh Italy SpA
Original Assignee
Satis Vacuum Industries Vertriebs AG
Satis Vacuum Industries SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Satis Vacuum Industries Vertriebs AG, Satis Vacuum Industries SpA filed Critical Satis Vacuum Industries Vertriebs AG
Publication of AU2002304649A1 publication Critical patent/AU2002304649A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
AU2002304649A 2002-03-28 2002-03-28 Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates Abandoned AU2002304649A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2002/005693 WO2003083162A1 (en) 2002-03-28 2002-03-28 Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates

Publications (1)

Publication Number Publication Date
AU2002304649A1 true AU2002304649A1 (en) 2003-10-13

Family

ID=28459438

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002304649A Abandoned AU2002304649A1 (en) 2002-03-28 2002-03-28 Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates

Country Status (2)

Country Link
AU (1) AU2002304649A1 (en)
WO (1) WO2003083162A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005035904B4 (en) * 2005-07-28 2012-01-12 Leybold Optics Gmbh Apparatus for treating substrates
KR20120096788A (en) * 2011-02-23 2012-08-31 삼성전자주식회사 Surface coating method and surface coating device for exterior part product
CN103132041A (en) * 2011-11-23 2013-06-05 鸿富锦精密工业（深圳）有限公司 Supporting device and vacuum coating machine using same
CN104561899B (en) * 2014-12-25 2017-08-11 江西昌佳鑫科技有限公司 Vacuum coating shooting epicranial plate and preparation method thereof
DE102018219881A1 (en) * 2018-11-20 2020-05-20 Carl Zeiss Smt Gmbh Process and coating system for the production of coated optical components
CN114000119B (en) * 2021-10-31 2023-08-25 东莞市齐品光学有限公司 Coating device and coating process capable of gradually changing color left and right
EP4269648A1 (en) 2022-04-30 2023-11-01 Satisloh AG Substrate holder arrangement for holding curved substrates during a vacuum coating process and vacuum coating apparatus having such substrate holder arrangement
CN116083873B (en) * 2023-04-07 2023-06-30 宁波招宝磁业有限公司 Neodymium iron boron cast sheet sputtering device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2532971A (en) * 1947-04-12 1950-12-05 Pacific Universal Products Cor Method and apparatus for producing optical coatings
US3442572A (en) * 1964-08-25 1969-05-06 Optical Coating Laboratory Inc Circular variable filter
US3598083A (en) * 1969-10-27 1971-08-10 Varian Associates Complex motion mechanism for thin film coating apparatuses
NL7205670A (en) * 1972-03-16 1973-09-18
CH599982A5 (en) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag
JPS58131129A (en) * 1982-01-29 1983-08-04 Ulvac Corp Apparatus for correcting film thickness in planetary type film forming apparatus
EP0215261A3 (en) * 1985-09-10 1989-07-05 Balzers Aktiengesellschaft Lens-mounting support, e.g. a moiunting support for ophthalmic lenses which have to be cleaned for a following coating process
IT1224870B (en) * 1988-08-03 1990-10-24 Enea MIRRORS FOR LASER WITH REFLECTANCE VAPROCEDIMENTO FOR THE PRODUCTION OF READABLE ALONG THE RADIUS
DE9408748U1 (en) * 1994-04-13 1994-07-28 Leybold Ag, 63450 Hanau Substrate pick-up
DE69838634T2 (en) * 1997-05-16 2008-08-28 Hoya K.K. MECHANISM TO MAKE TWO SIDES WATER-RESISTANT AT THE SAME TIME
FR2775298B1 (en) * 1998-02-24 2000-05-05 Essilor Int DISTRIBUTION COVER FOR DEPOSIT CONTROL BY EVAPORATION OF ANY COATING ON ANY SUBSTRATE, TREATMENT ENCLOSURE IMPLEMENTING SUCH A DISTRIBUTION COVER, AND CORRESPONDING METHOD
US6090444A (en) * 1999-02-08 2000-07-18 Saunders & Associates, Inc. Base plater or vacuum deposition apparatus with individually and selectively controlled work holders and capacitively coupled crystal monitor

Also Published As

Publication number Publication date
WO2003083162A1 (en) 2003-10-09

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase