AU2002314900A1 - Method and structure for buried circuits and devices - Google Patents

Method and structure for buried circuits and devices

Info

Publication number
AU2002314900A1
AU2002314900A1 AU2002314900A AU2002314900A AU2002314900A1 AU 2002314900 A1 AU2002314900 A1 AU 2002314900A1 AU 2002314900 A AU2002314900 A AU 2002314900A AU 2002314900 A AU2002314900 A AU 2002314900A AU 2002314900 A1 AU2002314900 A1 AU 2002314900A1
Authority
AU
Australia
Prior art keywords
devices
buried circuits
buried
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002314900A
Inventor
John E. Campbell
William T. Devine
Kris. V. Srikrishan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU2002314900A1 publication Critical patent/AU2002314900A1/en
Abandoned legal-status Critical Current

Links

AU2002314900A 2001-06-12 2002-06-04 Method and structure for buried circuits and devices Abandoned AU2002314900A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/879,530 2001-06-12

Publications (1)

Publication Number Publication Date
AU2002314900A1 true AU2002314900A1 (en) 2002-12-23

Family

ID=

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