AU2002308496A1 - Method for controlling a process in a multi-zonal apparatus - Google Patents

Method for controlling a process in a multi-zonal apparatus

Info

Publication number
AU2002308496A1
AU2002308496A1 AU2002308496A AU2002308496A AU2002308496A1 AU 2002308496 A1 AU2002308496 A1 AU 2002308496A1 AU 2002308496 A AU2002308496 A AU 2002308496A AU 2002308496 A AU2002308496 A AU 2002308496A AU 2002308496 A1 AU2002308496 A1 AU 2002308496A1
Authority
AU
Australia
Prior art keywords
zonal
controlling
zonal apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002308496A
Inventor
Nikolay N. Korovin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam IPEC Corp
Original Assignee
Speedfam IPEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam IPEC Corp filed Critical Speedfam IPEC Corp
Publication of AU2002308496A1 publication Critical patent/AU2002308496A1/en
Abandoned legal-status Critical Current

Links

AU2002308496A 2001-05-01 2002-04-26 Method for controlling a process in a multi-zonal apparatus Abandoned AU2002308496A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/846,965 2001-05-01

Publications (1)

Publication Number Publication Date
AU2002308496A1 true AU2002308496A1 (en) 2002-11-11

Family

ID=

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