AU2002303238A1 - Surface cleaning and particle counting - Google Patents

Surface cleaning and particle counting

Info

Publication number
AU2002303238A1
AU2002303238A1 AU2002303238A AU2002303238A AU2002303238A1 AU 2002303238 A1 AU2002303238 A1 AU 2002303238A1 AU 2002303238 A AU2002303238 A AU 2002303238A AU 2002303238 A AU2002303238 A AU 2002303238A AU 2002303238 A1 AU2002303238 A1 AU 2002303238A1
Authority
AU
Australia
Prior art keywords
surface cleaning
particle counting
counting
particle
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002303238A
Inventor
John Samuel Batchelder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convey Technology Inc
Original Assignee
Convey Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Convey Technology Inc filed Critical Convey Technology Inc
Priority claimed from PCT/US2002/010564 external-priority patent/WO2003085383A1/en
Publication of AU2002303238A1 publication Critical patent/AU2002303238A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AU2002303238A 2002-04-01 2002-04-01 Surface cleaning and particle counting Abandoned AU2002303238A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/010564 WO2003085383A1 (en) 1999-05-12 2002-04-01 Surface cleaning and particle counting

Publications (1)

Publication Number Publication Date
AU2002303238A1 true AU2002303238A1 (en) 2003-10-20

Family

ID=33449002

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002303238A Abandoned AU2002303238A1 (en) 2002-04-01 2002-04-01 Surface cleaning and particle counting

Country Status (4)

Country Link
EP (1) EP1495304A4 (en)
JP (1) JP4099454B2 (en)
KR (1) KR100730013B1 (en)
AU (1) AU2002303238A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104204954B (en) 2012-04-02 2016-05-11 Asml荷兰有限公司 Fume measuring method and device
KR102350274B1 (en) 2020-05-15 2022-01-11 강원대학교산학협력단 Sampling system and sampling method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4009047A (en) 1973-12-03 1977-02-22 Minnesota Mining And Manufacturing Company Method and device for cleaning sheets
JPS6225244A (en) * 1985-07-26 1987-02-03 Hitachi Ltd Method and instrument for measuring sticking dust
US4727616A (en) * 1986-09-15 1988-03-01 Ronald Kucera Pick up roller
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
US5343290A (en) 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer
US6023597A (en) 1995-05-30 2000-02-08 Canon Kabushiki Kaisha Cellular conductive roller with conductive powder filling open cells in the surface
US5699584A (en) * 1995-07-24 1997-12-23 Xerox Corporation Web system
US6175984B1 (en) * 1997-09-02 2001-01-23 International Business Machines Corporation Apparatus for cleaning precision components
US6207406B1 (en) 1999-10-15 2001-03-27 Judd R. Wilkins Microbial sampling apparatus and process

Also Published As

Publication number Publication date
KR20050009289A (en) 2005-01-24
JP2005521886A (en) 2005-07-21
JP4099454B2 (en) 2008-06-11
EP1495304A4 (en) 2009-11-18
KR100730013B1 (en) 2007-06-20
EP1495304A1 (en) 2005-01-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase