AU2002241526A1 - Method and device utilizing plasma source for real-time gas sampling - Google Patents

Method and device utilizing plasma source for real-time gas sampling

Info

Publication number
AU2002241526A1
AU2002241526A1 AU2002241526A AU4152602A AU2002241526A1 AU 2002241526 A1 AU2002241526 A1 AU 2002241526A1 AU 2002241526 A AU2002241526 A AU 2002241526A AU 4152602 A AU4152602 A AU 4152602A AU 2002241526 A1 AU2002241526 A1 AU 2002241526A1
Authority
AU
Australia
Prior art keywords
real
plasma source
gas sampling
device utilizing
time gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002241526A
Inventor
Richard L. Hazard
Gary Powell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lightwind Corp
Original Assignee
Lightwind Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/726,195 external-priority patent/US6538734B2/en
Application filed by Lightwind Corp filed Critical Lightwind Corp
Publication of AU2002241526A1 publication Critical patent/AU2002241526A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2226—Sampling from a closed space, e.g. food package, head space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
AU2002241526A 2000-11-29 2001-11-29 Method and device utilizing plasma source for real-time gas sampling Abandoned AU2002241526A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/726,195 2000-11-29
US09/726,195 US6538734B2 (en) 2000-11-29 2000-11-29 Method and device utilizing real-time gas sampling
US10/038,090 US6791692B2 (en) 2000-11-29 2001-10-29 Method and device utilizing plasma source for real-time gas sampling
US10/038,090 2001-10-29
PCT/US2001/044585 WO2002044687A2 (en) 2000-11-29 2001-11-29 Method and device utilizing plasma source for real-time gas sampling

Publications (1)

Publication Number Publication Date
AU2002241526A1 true AU2002241526A1 (en) 2002-06-11

Family

ID=26714845

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002241526A Abandoned AU2002241526A1 (en) 2000-11-29 2001-11-29 Method and device utilizing plasma source for real-time gas sampling

Country Status (6)

Country Link
US (3) US6791692B2 (en)
JP (1) JP2004515066A (en)
CN (1) CN1296685C (en)
AU (1) AU2002241526A1 (en)
TW (1) TW530156B (en)
WO (1) WO2002044687A2 (en)

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CN105209192B (en) * 2013-04-26 2018-06-01 联合工艺公司 Local pollution detection in increasing material manufacturing
US9627186B2 (en) * 2014-08-29 2017-04-18 Lam Research Corporation System, method and apparatus for using optical data to monitor RF generator operations
JP6524753B2 (en) * 2015-03-30 2019-06-05 東京エレクトロン株式会社 PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE MEDIUM
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Also Published As

Publication number Publication date
WO2002044687A2 (en) 2002-06-06
US6791692B2 (en) 2004-09-14
CN1296685C (en) 2007-01-24
TW530156B (en) 2003-05-01
CN1489685A (en) 2004-04-14
US20060203239A1 (en) 2006-09-14
US20050030531A1 (en) 2005-02-10
US7019829B2 (en) 2006-03-28
US7202946B2 (en) 2007-04-10
WO2002044687A3 (en) 2003-02-27
JP2004515066A (en) 2004-05-20
US20020135761A1 (en) 2002-09-26

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