AU2002228400A1 - Resist composition - Google Patents

Resist composition

Info

Publication number
AU2002228400A1
AU2002228400A1 AU2002228400A AU2002228400A AU2002228400A1 AU 2002228400 A1 AU2002228400 A1 AU 2002228400A1 AU 2002228400 A AU2002228400 A AU 2002228400A AU 2002228400 A AU2002228400 A AU 2002228400A AU 2002228400 A1 AU2002228400 A1 AU 2002228400A1
Authority
AU
Australia
Prior art keywords
resist composition
resist
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002228400A
Inventor
Isamu Kaneko
Yasuhide Kawaguchi
Shun-Ichi Kodama
Shinji Okada
Yoko Takebe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of AU2002228400A1 publication Critical patent/AU2002228400A1/en
Abandoned legal-status Critical Current

Links

AU2002228400A 2001-02-09 2002-01-31 Resist composition Abandoned AU2002228400A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-34023 2001-02-09
JP2001-219570 2001-07-19

Publications (1)

Publication Number Publication Date
AU2002228400A1 true AU2002228400A1 (en) 2002-08-28

Family

ID=

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