AU2002227183A1 - Methods and apparatus for recycling cryogenic liquid or gas from test chamber - Google Patents

Methods and apparatus for recycling cryogenic liquid or gas from test chamber

Info

Publication number
AU2002227183A1
AU2002227183A1 AU2002227183A AU2718302A AU2002227183A1 AU 2002227183 A1 AU2002227183 A1 AU 2002227183A1 AU 2002227183 A AU2002227183 A AU 2002227183A AU 2718302 A AU2718302 A AU 2718302A AU 2002227183 A1 AU2002227183 A1 AU 2002227183A1
Authority
AU
Australia
Prior art keywords
gas
methods
test chamber
cryogenic liquid
recycling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002227183A
Other languages
English (en)
Inventor
Philippe Blostein
Martin Theriault
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide America Corp
Original Assignee
Air Liquide America Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide America Corp filed Critical Air Liquide America Corp
Priority claimed from PCT/US2001/046167 external-priority patent/WO2002035169A2/en
Publication of AU2002227183A1 publication Critical patent/AU2002227183A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2849—Environmental or reliability testing, e.g. burn-in or validation tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
AU2002227183A 2000-10-24 2001-10-22 Methods and apparatus for recycling cryogenic liquid or gas from test chamber Abandoned AU2002227183A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US24294700P 2000-10-24 2000-10-24
US60/242,947 2000-10-24
US10/004,597 2001-10-22
PCT/US2001/046167 WO2002035169A2 (en) 2000-10-24 2001-10-22 Methods and apparatus for recycling cryogenic liquid or gas from test chamber

Publications (1)

Publication Number Publication Date
AU2002227183A1 true AU2002227183A1 (en) 2002-05-06

Family

ID=22916745

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002227183A Abandoned AU2002227183A1 (en) 2000-10-24 2001-10-22 Methods and apparatus for recycling cryogenic liquid or gas from test chamber

Country Status (2)

Country Link
CN (1) CN1311240C (zh)
AU (1) AU2002227183A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5938932B2 (ja) * 2012-02-14 2016-06-22 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
JP5942459B2 (ja) * 2012-02-14 2016-06-29 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
CN103792485B (zh) * 2014-02-17 2016-12-07 大唐微电子技术有限公司 自动化测试设备和测试方法
CN107271734B (zh) * 2017-07-06 2019-11-12 安徽禄讯电子科技有限公司 一种射频器件测试装置
CN108550475B (zh) * 2018-06-27 2020-07-03 安徽盛美金属科技有限公司 一种薄膜电容器生产用散热装置的循环制冷装置
CN110954806B (zh) * 2020-02-24 2020-05-26 武汉精鸿电子技术有限公司 一种支持高温老化测试的气路结构及其操作方法
CN112415230B (zh) * 2020-10-20 2021-07-06 杭州长川科技股份有限公司 控温测试台及控温测试装置

Also Published As

Publication number Publication date
CN1535383A (zh) 2004-10-06
CN1311240C (zh) 2007-04-18

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