AU2002225435A1 - Plasma device and plasma generating method - Google Patents

Plasma device and plasma generating method

Info

Publication number
AU2002225435A1
AU2002225435A1 AU2002225435A AU2002225435A AU2002225435A1 AU 2002225435 A1 AU2002225435 A1 AU 2002225435A1 AU 2002225435 A AU2002225435 A AU 2002225435A AU 2002225435 A AU2002225435 A AU 2002225435A AU 2002225435 A1 AU2002225435 A1 AU 2002225435A1
Authority
AU
Australia
Prior art keywords
plasma
generating method
plasma generating
plasma device
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002225435A
Inventor
Makoto Ando
Nobuo Ishii
Masaharu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002225435A1 publication Critical patent/AU2002225435A1/en
Abandoned legal-status Critical Current

Links

AU2002225435A 2001-01-18 2002-01-18 Plasma device and plasma generating method Abandoned AU2002225435A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-10291 2001-01-18
JP2001-247853 2001-08-17

Publications (1)

Publication Number Publication Date
AU2002225435A1 true AU2002225435A1 (en) 2002-07-30

Family

ID=

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