AU2002224059A1 - Method and apparatus for measuring aberration of projection optical system, and method and apparatus for exposure - Google Patents
Method and apparatus for measuring aberration of projection optical system, and method and apparatus for exposureInfo
- Publication number
- AU2002224059A1 AU2002224059A1 AU2002224059A AU2405902A AU2002224059A1 AU 2002224059 A1 AU2002224059 A1 AU 2002224059A1 AU 2002224059 A AU2002224059 A AU 2002224059A AU 2405902 A AU2405902 A AU 2405902A AU 2002224059 A1 AU2002224059 A1 AU 2002224059A1
- Authority
- AU
- Australia
- Prior art keywords
- exposure
- optical system
- projection optical
- measuring aberration
- aberration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
- G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-359388 | 2000-11-27 | ||
JP2000359388 | 2000-11-27 | ||
PCT/JP2001/010154 WO2002042728A1 (en) | 2000-11-27 | 2001-11-21 | Method and apparatus for measuring aberration of projection optical system, and method and apparatus for exposure |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002224059A1 true AU2002224059A1 (en) | 2002-06-03 |
Family
ID=18831157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002224059A Abandoned AU2002224059A1 (en) | 2000-11-27 | 2001-11-21 | Method and apparatus for measuring aberration of projection optical system, and method and apparatus for exposure |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2002042728A1 (en) |
AU (1) | AU2002224059A1 (en) |
WO (1) | WO2002042728A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW550377B (en) | 2000-02-23 | 2003-09-01 | Zeiss Stiftung | Apparatus for wave-front detection |
JP2004061515A (en) | 2002-07-29 | 2004-02-26 | Cark Zeiss Smt Ag | Method and device for determining influence onto polarization state by optical system, and analyzer |
US7268891B2 (en) | 2003-01-15 | 2007-09-11 | Asml Holding N.V. | Transmission shear grating in checkerboard configuration for EUV wavefront sensor |
US6867846B2 (en) | 2003-01-15 | 2005-03-15 | Asml Holding Nv | Tailored reflecting diffractor for EUV lithographic system aberration measurement |
US7027164B2 (en) | 2003-01-15 | 2006-04-11 | Asml Holding N.V. | Speckle reduction method and system for EUV interferometry |
US7289223B2 (en) | 2003-01-31 | 2007-10-30 | Carl Zeiss Smt Ag | Method and apparatus for spatially resolved polarimetry |
AU2003304304A1 (en) | 2003-07-05 | 2005-01-21 | Carl Zeiss Smt Ag | Device for the polarization-specific examination of an optical system |
JP4387359B2 (en) | 2003-09-26 | 2009-12-16 | カール・ツァイス・エスエムティー・アーゲー | Optical characteristic measurement method and projection exposure system provided with wavefront detection system |
JP4590181B2 (en) * | 2003-11-28 | 2010-12-01 | キヤノン株式会社 | Measuring method and apparatus, exposure apparatus, and device manufacturing method |
KR101257960B1 (en) | 2004-06-04 | 2013-04-24 | 칼 짜이스 에스엠테 게엠베하 | System for measuring the image quality of an optical imaging system |
JP4769448B2 (en) * | 2004-10-08 | 2011-09-07 | キヤノン株式会社 | Exposure apparatus having interferometer and device manufacturing method |
JP5503193B2 (en) * | 2009-06-08 | 2014-05-28 | キヤノン株式会社 | Wavefront aberration measuring apparatus, exposure apparatus, and device manufacturing method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764139A (en) * | 1980-10-08 | 1982-04-19 | Nippon Kogaku Kk <Nikon> | Interferometer |
JP4117585B2 (en) * | 1997-08-26 | 2008-07-16 | 株式会社ニコン | Optical apparatus inspection method and apparatus, exposure apparatus, and exposure apparatus manufacturing method |
-
2001
- 2001-11-21 JP JP2002544620A patent/JPWO2002042728A1/en not_active Withdrawn
- 2001-11-21 WO PCT/JP2001/010154 patent/WO2002042728A1/en active Application Filing
- 2001-11-21 AU AU2002224059A patent/AU2002224059A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JPWO2002042728A1 (en) | 2004-04-02 |
WO2002042728A1 (en) | 2002-05-30 |
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