AU2002216011A1 - Method of purifying trichlorosilane - Google Patents

Method of purifying trichlorosilane

Info

Publication number
AU2002216011A1
AU2002216011A1 AU2002216011A AU1601102A AU2002216011A1 AU 2002216011 A1 AU2002216011 A1 AU 2002216011A1 AU 2002216011 A AU2002216011 A AU 2002216011A AU 1601102 A AU1601102 A AU 1601102A AU 2002216011 A1 AU2002216011 A1 AU 2002216011A1
Authority
AU
Australia
Prior art keywords
trichlorosilane
purifying trichlorosilane
purifying
relates
hydrohalogens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002216011A
Other languages
English (en)
Inventor
Dr. Hans-Dieter Block
Werner Dick
Stephan Klein
Hans-Joachim Leimkuhler
Johannes-Peter Schafer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SolarWorld AG
Original Assignee
SolarWorld AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SolarWorld AG filed Critical SolarWorld AG
Publication of AU2002216011A1 publication Critical patent/AU2002216011A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AU2002216011A 2000-11-20 2001-11-06 Method of purifying trichlorosilane Abandoned AU2002216011A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10057482A DE10057482A1 (de) 2000-11-20 2000-11-20 Verfahren zur Reinigung von Trichlorsilan
DE10057482 2000-11-20
PCT/EP2001/012805 WO2002040401A1 (de) 2000-11-20 2001-11-06 Verfahren zur reinigung von trichlorsilan

Publications (1)

Publication Number Publication Date
AU2002216011A1 true AU2002216011A1 (en) 2002-05-27

Family

ID=7663944

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002216011A Abandoned AU2002216011A1 (en) 2000-11-20 2001-11-06 Method of purifying trichlorosilane

Country Status (6)

Country Link
US (1) US6843972B2 (de)
EP (1) EP1339640B1 (de)
AT (1) ATE267771T1 (de)
AU (1) AU2002216011A1 (de)
DE (2) DE10057482A1 (de)
WO (1) WO2002040401A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7790129B2 (en) * 2005-07-29 2010-09-07 Lord Ltd., Lp Set of processes for removing impurities from a silcon production facility
DE102007014107A1 (de) * 2007-03-21 2008-09-25 Evonik Degussa Gmbh Aufarbeitung borhaltiger Chlorsilanströme
US20090060819A1 (en) * 2007-08-29 2009-03-05 Bill Jr Jon M Process for producing trichlorosilane
DE112008002299T5 (de) 2007-08-29 2010-07-22 Dynamic Engineering, Inc., Sturgis Verfahren zur Herstellung von Trichlorsilan
DE102007050199A1 (de) * 2007-10-20 2009-04-23 Evonik Degussa Gmbh Entfernung von Fremdmetallen aus anorganischen Silanen
DE102008002537A1 (de) * 2008-06-19 2009-12-24 Evonik Degussa Gmbh Verfahren zur Entfernung von Bor enthaltenden Verunreinigungen aus Halogensilanen sowie Anlage zur Durchführung des Verfahrens
DE102008054537A1 (de) * 2008-12-11 2010-06-17 Evonik Degussa Gmbh Entfernung von Fremdmetallen aus Siliciumverbindungen durch Adsorption und/oder Filtration
DE102009027729A1 (de) * 2009-07-15 2011-01-27 Evonik Degussa Gmbh Entfernung von Fremdmetallen aus anorganischen Silanen
DE102009027730A1 (de) * 2009-07-15 2011-01-27 Evonik Degussa Gmbh Verahren und Verwendung von aminofunktionellen Harzen zur Dismutierung von Halogensilanen und zur Entfernung von Fremdmetallen
US8298490B2 (en) * 2009-11-06 2012-10-30 Gtat Corporation Systems and methods of producing trichlorosilane
KR101292545B1 (ko) 2009-12-28 2013-08-12 주식회사 엘지화학 트리클로로실란의 정제 방법 및 정제 장치
US8715597B2 (en) 2010-12-20 2014-05-06 Memc Electronic Materials, Inc. Production of polycrystalline silicon in substantially closed-loop systems that involve disproportionation operations
US9352971B2 (en) 2013-06-14 2016-05-31 Rec Silicon Inc Method and apparatus for production of silane and hydrohalosilanes
CN105061657A (zh) * 2014-04-15 2015-11-18 绍兴文理学院 新型纳米孔有机骨架固体碱材料、制备方法及其应用
DE102014013250B4 (de) * 2014-09-08 2021-11-25 Christian Bauch Verfahren zur Aufreinigung halogenierter Oligosilane
CN108017060B (zh) * 2018-02-09 2019-06-28 浙江博瑞电子科技有限公司 一种六氯乙硅烷的纯化方法
WO2022096098A1 (de) * 2020-11-05 2022-05-12 Wacker Chemie Ag Verfahren zur entfernung einer verunreinigung aus einem chlorsilangemisch
CN113716570B (zh) * 2021-09-30 2023-08-01 四川永祥多晶硅有限公司 一种提高三氯氢硅品质的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877097A (en) * 1958-05-06 1959-03-10 Guenter A Wolff Method of purification of silicon compounds
DE1134973B (de) 1958-07-15 1962-08-23 Wacker Chemie Gmbh Verfahren zur Herstellung von hochreinen Siliciumhalogeniden
GB994076A (en) 1960-08-11 1965-06-02 Haldor Frederik Axel Topsoe Method for purifying silicon halides
US3414603A (en) * 1965-03-16 1968-12-03 Tyco Laboratories Inc Method of purifying organochlorosilanes
BE784818A (fr) * 1971-06-14 1972-12-13 Westinghouse Electric Corp Etalonnage du profil de deplacement de la position d'un entrainement par moteur
US3968199A (en) 1974-02-25 1976-07-06 Union Carbide Corporation Process for making silane
IT1088820B (it) * 1977-12-05 1985-06-10 Smiel Spa Processo di purificazione di clorosilani impiegabili nella preparazione di silicio per elettronica
CA1207127A (en) 1982-09-29 1986-07-08 Dow Corning Corporation Purification of chlorosilanes
US4701430A (en) * 1984-05-17 1987-10-20 Korea Advance Institute Of Science & Technology Hydrogenation catalyst and methods for its preparation and use to convert silicon tetrachloride to chlorosilane and silane
DE3711444A1 (de) 1987-04-04 1988-10-13 Huels Troisdorf Verfahren und vorrichtung zur herstellung von dichlorsilan

Also Published As

Publication number Publication date
ATE267771T1 (de) 2004-06-15
WO2002040401A1 (de) 2002-05-23
EP1339640A1 (de) 2003-09-03
DE10057482A1 (de) 2002-05-23
US20040028594A1 (en) 2004-02-12
DE50102441D1 (de) 2004-07-01
EP1339640B1 (de) 2004-05-26
US6843972B2 (en) 2005-01-18

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