AU2002214365A1 - Apparatus of chemical vapor deposition - Google Patents

Apparatus of chemical vapor deposition

Info

Publication number
AU2002214365A1
AU2002214365A1 AU2002214365A AU2002214365A AU2002214365A1 AU 2002214365 A1 AU2002214365 A1 AU 2002214365A1 AU 2002214365 A AU2002214365 A AU 2002214365A AU 2002214365 A AU2002214365 A AU 2002214365A AU 2002214365 A1 AU2002214365 A1 AU 2002214365A1
Authority
AU
Australia
Prior art keywords
vapor deposition
chemical vapor
chemical
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002214365A
Inventor
Pyung Yong Um
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eugene Technology Co Ltd
Original Assignee
Eugene Technology Co Ltd
Filing date
Publication date
Application filed by Eugene Technology Co Ltd filed Critical Eugene Technology Co Ltd
Publication of AU2002214365A1 publication Critical patent/AU2002214365A1/en
Abandoned legal-status Critical Current

Links

AU2002214365A 2001-11-05 Apparatus of chemical vapor deposition Abandoned AU2002214365A1 (en)

Publications (1)

Publication Number Publication Date
AU2002214365A1 true AU2002214365A1 (en) 2003-05-19

Family

ID=

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