AU2002235020A1 - A chemical vapor deposition process and apparatus thereof - Google Patents

A chemical vapor deposition process and apparatus thereof

Info

Publication number
AU2002235020A1
AU2002235020A1 AU2002235020A AU2002235020A AU2002235020A1 AU 2002235020 A1 AU2002235020 A1 AU 2002235020A1 AU 2002235020 A AU2002235020 A AU 2002235020A AU 2002235020 A AU2002235020 A AU 2002235020A AU 2002235020 A1 AU2002235020 A1 AU 2002235020A1
Authority
AU
Australia
Prior art keywords
vapor deposition
chemical vapor
deposition process
chemical
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002235020A
Inventor
Ki-Woong Chae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Precision Diamond Technologies Co Ltd
Original Assignee
Precision Diamond Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Precision Diamond Technologies Co Ltd filed Critical Precision Diamond Technologies Co Ltd
Publication of AU2002235020A1 publication Critical patent/AU2002235020A1/en
Abandoned legal-status Critical Current

Links

AU2002235020A 2001-02-26 2002-02-26 A chemical vapor deposition process and apparatus thereof Abandoned AU2002235020A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2001/9598 2001-02-26

Publications (1)

Publication Number Publication Date
AU2002235020A1 true AU2002235020A1 (en) 2002-09-12

Family

ID=

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