AU2001296581A1 - Micromachined component and method of manufacture - Google Patents

Micromachined component and method of manufacture

Info

Publication number
AU2001296581A1
AU2001296581A1 AU2001296581A AU9658101A AU2001296581A1 AU 2001296581 A1 AU2001296581 A1 AU 2001296581A1 AU 2001296581 A AU2001296581 A AU 2001296581A AU 9658101 A AU9658101 A AU 9658101A AU 2001296581 A1 AU2001296581 A1 AU 2001296581A1
Authority
AU
Australia
Prior art keywords
manufacture
micromachined component
micromachined
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001296581A
Other languages
English (en)
Inventor
Jonathan F. Gorrell
Gordana S. Nielsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001296581A1 publication Critical patent/AU2001296581A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
    • B81C1/00928—Eliminating or avoiding remaining moisture after the wet etch release of the movable structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2001296581A 2000-10-06 2001-10-04 Micromachined component and method of manufacture Abandoned AU2001296581A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/680,777 US6811714B1 (en) 2000-10-06 2000-10-06 Micromachined component and method of manufacture
US09/680,777 2000-10-06
PCT/US2001/031067 WO2002030809A2 (en) 2000-10-06 2001-10-04 Micromachined component and method of manufacture

Publications (1)

Publication Number Publication Date
AU2001296581A1 true AU2001296581A1 (en) 2002-04-22

Family

ID=24732470

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001296581A Abandoned AU2001296581A1 (en) 2000-10-06 2001-10-04 Micromachined component and method of manufacture

Country Status (5)

Country Link
US (1) US6811714B1 (de)
EP (1) EP1363851A2 (de)
CN (1) CN1254432C (de)
AU (1) AU2001296581A1 (de)
WO (1) WO2002030809A2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7045459B2 (en) * 2002-02-19 2006-05-16 Northrop Grumman Corporation Thin film encapsulation of MEMS devices
JP2005150332A (ja) * 2003-11-14 2005-06-09 Sony Corp エッチング方法
WO2006071806A2 (en) 2004-12-27 2006-07-06 Quantum Paper, Inc. Addressable and printable emissive display
CN101405215B (zh) * 2006-05-18 2013-01-09 株式会社半导体能源研究所 微结构、微机械、以及微结构和微机械的制造方法
US8877101B2 (en) 2007-05-31 2014-11-04 Nthdegree Technologies Worldwide Inc Method of manufacturing a light emitting, power generating or other electronic apparatus
US8415879B2 (en) 2007-05-31 2013-04-09 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US9534772B2 (en) 2007-05-31 2017-01-03 Nthdegree Technologies Worldwide Inc Apparatus with light emitting diodes
US8852467B2 (en) 2007-05-31 2014-10-07 Nthdegree Technologies Worldwide Inc Method of manufacturing a printable composition of a liquid or gel suspension of diodes
US8889216B2 (en) 2007-05-31 2014-11-18 Nthdegree Technologies Worldwide Inc Method of manufacturing addressable and static electronic displays
US9018833B2 (en) 2007-05-31 2015-04-28 Nthdegree Technologies Worldwide Inc Apparatus with light emitting or absorbing diodes
US8384630B2 (en) 2007-05-31 2013-02-26 Nthdegree Technologies Worldwide Inc Light emitting, photovoltaic or other electronic apparatus and system
US8674593B2 (en) 2007-05-31 2014-03-18 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US9425357B2 (en) 2007-05-31 2016-08-23 Nthdegree Technologies Worldwide Inc. Diode for a printable composition
US8846457B2 (en) 2007-05-31 2014-09-30 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US9419179B2 (en) 2007-05-31 2016-08-16 Nthdegree Technologies Worldwide Inc Diode for a printable composition
US9343593B2 (en) 2007-05-31 2016-05-17 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US8133768B2 (en) * 2007-05-31 2012-03-13 Nthdegree Technologies Worldwide Inc Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
US8809126B2 (en) 2007-05-31 2014-08-19 Nthdegree Technologies Worldwide Inc Printable composition of a liquid or gel suspension of diodes
US20090032491A1 (en) * 2007-08-03 2009-02-05 International Business Machines Corporation Conductive element forming using sacrificial layer patterned to form dielectric layer
US8127477B2 (en) 2008-05-13 2012-03-06 Nthdegree Technologies Worldwide Inc Illuminating display systems
US7992332B2 (en) 2008-05-13 2011-08-09 Nthdegree Technologies Worldwide Inc. Apparatuses for providing power for illumination of a display object

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2118219T3 (es) * 1991-12-20 1998-09-16 Allied Signal Inc Materiales de baja densidad que tienen alta superficie especifica, y articulos formados a partir de ellos para uso en la recuperacion de metales.
US5403665A (en) * 1993-06-18 1995-04-04 Regents Of The University Of California Method of applying a monolayer lubricant to micromachines
US5545291A (en) * 1993-12-17 1996-08-13 The Regents Of The University Of California Method for fabricating self-assembling microstructures
US5548159A (en) * 1994-05-27 1996-08-20 Texas Instruments Incorporated Porous insulator for line-to-line capacitance reduction
DE19506404C1 (de) 1995-02-23 1996-03-14 Siemens Ag Verfahren zum Freiätzen (Separieren) und Trocknen mikromechanischer Komponenten
US6096149A (en) * 1997-04-21 2000-08-01 Ford Global Technologies, Inc. Method for fabricating adhesion-resistant micromachined devices
US6358673B1 (en) * 1998-09-09 2002-03-19 Nippon Telegraph And Telephone Corporation Pattern formation method and apparatus
US6168694B1 (en) * 1999-02-04 2001-01-02 Chemat Technology, Inc. Methods for and products of processing nanostructure nitride, carbonitride and oxycarbonitride electrode power materials by utilizing sol gel technology for supercapacitor applications
US6555945B1 (en) * 1999-02-25 2003-04-29 Alliedsignal Inc. Actuators using double-layer charging of high surface area materials
JP3940546B2 (ja) * 1999-06-07 2007-07-04 株式会社東芝 パターン形成方法およびパターン形成材料
JP2001144086A (ja) * 1999-08-31 2001-05-25 Sony Corp 埋め込み配線の形成方法、及び、基体処理装置

Also Published As

Publication number Publication date
WO2002030809A3 (en) 2003-09-25
CN1478054A (zh) 2004-02-25
EP1363851A2 (de) 2003-11-26
WO2002030809A2 (en) 2002-04-18
US6811714B1 (en) 2004-11-02
CN1254432C (zh) 2006-05-03

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