AU2001283570A1 - Systems and methods for forming processing streams - Google Patents

Systems and methods for forming processing streams

Info

Publication number
AU2001283570A1
AU2001283570A1 AU2001283570A AU8357001A AU2001283570A1 AU 2001283570 A1 AU2001283570 A1 AU 2001283570A1 AU 2001283570 A AU2001283570 A AU 2001283570A AU 8357001 A AU8357001 A AU 8357001A AU 2001283570 A1 AU2001283570 A1 AU 2001283570A1
Authority
AU
Australia
Prior art keywords
systems
methods
forming processing
processing streams
streams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001283570A
Inventor
Steven T. Bay
Roger Kaiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mattson Technology Inc
Original Assignee
Mattson Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mattson Technology Inc filed Critical Mattson Technology Inc
Priority claimed from PCT/US2001/041729 external-priority patent/WO2002015241A1/en
Publication of AU2001283570A1 publication Critical patent/AU2001283570A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
AU2001283570A 2000-08-17 2001-08-15 Systems and methods for forming processing streams Abandoned AU2001283570A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US22587500P 2000-08-17 2000-08-17
US60/225,875 2000-08-17
US09/930,009 2001-08-15
PCT/US2001/041729 WO2002015241A1 (en) 2000-08-17 2001-08-15 Systems and methods for forming processing streams

Publications (1)

Publication Number Publication Date
AU2001283570A1 true AU2001283570A1 (en) 2002-02-25

Family

ID=22846612

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001283570A Abandoned AU2001283570A1 (en) 2000-08-17 2001-08-15 Systems and methods for forming processing streams

Country Status (2)

Country Link
AU (1) AU2001283570A1 (en)
TW (1) TW508637B (en)

Also Published As

Publication number Publication date
TW508637B (en) 2002-11-01

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