AU2001282831A1 - A position sensitive detector with optical filter-coating and method of manufacturing - Google Patents

A position sensitive detector with optical filter-coating and method of manufacturing

Info

Publication number
AU2001282831A1
AU2001282831A1 AU2001282831A AU8283101A AU2001282831A1 AU 2001282831 A1 AU2001282831 A1 AU 2001282831A1 AU 2001282831 A AU2001282831 A AU 2001282831A AU 8283101 A AU8283101 A AU 8283101A AU 2001282831 A1 AU2001282831 A1 AU 2001282831A1
Authority
AU
Australia
Prior art keywords
coating
manufacturing
optical filter
sensitive detector
position sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282831A
Inventor
Jan Wipenmyr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imego AB
Original Assignee
Imego AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imego AB filed Critical Imego AB
Publication of AU2001282831A1 publication Critical patent/AU2001282831A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
    • H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02016—Circuit arrangements of general character for the devices
    • H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02024—Position sensitive and lateral effect photodetectors; Quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Transform (AREA)
  • Light Receiving Elements (AREA)
AU2001282831A 2000-09-01 2001-09-03 A position sensitive detector with optical filter-coating and method of manufacturing Abandoned AU2001282831A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0003102A SE0003102L (en) 2000-09-01 2000-09-01 Position sensitive detector
SE0003102 2000-09-01
PCT/SE2001/001877 WO2002019438A1 (en) 2000-09-01 2001-09-03 A position sensitive detector with optical filter-coating and method of manufacturing

Publications (1)

Publication Number Publication Date
AU2001282831A1 true AU2001282831A1 (en) 2002-03-13

Family

ID=20280869

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282831A Abandoned AU2001282831A1 (en) 2000-09-01 2001-09-03 A position sensitive detector with optical filter-coating and method of manufacturing

Country Status (3)

Country Link
AU (1) AU2001282831A1 (en)
SE (1) SE0003102L (en)
WO (1) WO2002019438A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9140604B2 (en) 2011-06-17 2015-09-22 Kla-Tencor Corporation Wafer level spectrometer
US9360302B2 (en) 2011-12-15 2016-06-07 Kla-Tencor Corporation Film thickness monitor
CN103956403B (en) * 2014-04-03 2017-02-15 苏州北鹏光电科技有限公司 Photoelectric detector manufacturing method and manufactured wide-angle photoelectric detector
CN107230743B (en) * 2017-06-06 2019-06-14 南京云耕信息科技有限公司 A kind of optoelectronic position sensitive sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2484708A1 (en) * 1980-06-13 1981-12-18 Telecommunications Sa HIGH SENSITIVE SURFACE FAST PHOTODETECTOR IN THE RANGE 0.8 - 1.1 MM
DE3527505A1 (en) * 1984-07-31 1986-02-06 Canon K.K., Tokio/Tokyo COLOR PHOTOSENSOR
JPH05183141A (en) * 1991-07-12 1993-07-23 Fuji Xerox Co Ltd Color image sensor
US5536964A (en) * 1994-09-30 1996-07-16 Green; Evan D. H. Combined thin film pinhole and semiconductor photodetectors
JP2001015797A (en) * 1999-06-29 2001-01-19 Hitachi Denshi Ltd Semiconductor device for detecting light incidence position and manufacture thereof

Also Published As

Publication number Publication date
WO2002019438A1 (en) 2002-03-07
SE0003102D0 (en) 2000-09-01
SE0003102L (en) 2002-03-02

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