SE0003102L - Position sensitive detector - Google Patents

Position sensitive detector

Info

Publication number
SE0003102L
SE0003102L SE0003102A SE0003102A SE0003102L SE 0003102 L SE0003102 L SE 0003102L SE 0003102 A SE0003102 A SE 0003102A SE 0003102 A SE0003102 A SE 0003102A SE 0003102 L SE0003102 L SE 0003102L
Authority
SE
Sweden
Prior art keywords
position sensitive
sensitive detector
photosensitive surface
detector
wavelength
Prior art date
Application number
SE0003102A
Other languages
Swedish (sv)
Other versions
SE0003102D0 (en
Inventor
Jan Wipenmyr
Original Assignee
Imego Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imego Ab filed Critical Imego Ab
Priority to SE0003102A priority Critical patent/SE0003102L/en
Publication of SE0003102D0 publication Critical patent/SE0003102D0/en
Priority to PCT/SE2001/001877 priority patent/WO2002019438A1/en
Priority to AU2001282831A priority patent/AU2001282831A1/en
Publication of SE0003102L publication Critical patent/SE0003102L/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic System
    • H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic System characterised by the doping material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02016—Circuit arrangements of general character for the devices
    • H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02024—Position sensitive and lateral effect photodetectors; Quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Abstract

The present invention relates to a position sensitive detector (20) comprising a substrate (21) having an area provided with a photosensitive surface (23) and electrical contacts (24, 26). The detector (20) comprises an optical filter coating (28) made of a nonorganic material, constituting a wavelength selective filter for a special wavelength, directly applied on said photosensitive surface (23).
SE0003102A 2000-09-01 2000-09-01 Position sensitive detector SE0003102L (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE0003102A SE0003102L (en) 2000-09-01 2000-09-01 Position sensitive detector
PCT/SE2001/001877 WO2002019438A1 (en) 2000-09-01 2001-09-03 A position sensitive detector with optical filter-coating and method of manufacturing
AU2001282831A AU2001282831A1 (en) 2000-09-01 2001-09-03 A position sensitive detector with optical filter-coating and method of manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0003102A SE0003102L (en) 2000-09-01 2000-09-01 Position sensitive detector

Publications (2)

Publication Number Publication Date
SE0003102D0 SE0003102D0 (en) 2000-09-01
SE0003102L true SE0003102L (en) 2002-03-02

Family

ID=20280869

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0003102A SE0003102L (en) 2000-09-01 2000-09-01 Position sensitive detector

Country Status (3)

Country Link
AU (1) AU2001282831A1 (en)
SE (1) SE0003102L (en)
WO (1) WO2002019438A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9140604B2 (en) * 2011-06-17 2015-09-22 Kla-Tencor Corporation Wafer level spectrometer
US9360302B2 (en) 2011-12-15 2016-06-07 Kla-Tencor Corporation Film thickness monitor
CN103956403B (en) * 2014-04-03 2017-02-15 苏州北鹏光电科技有限公司 Photoelectric detector manufacturing method and manufactured wide-angle photoelectric detector
CN107230743B (en) * 2017-06-06 2019-06-14 南京云耕信息科技有限公司 A kind of optoelectronic position sensitive sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2484708A1 (en) * 1980-06-13 1981-12-18 Telecommunications Sa HIGH SENSITIVE SURFACE FAST PHOTODETECTOR IN THE RANGE 0.8 - 1.1 MM
DE3527505A1 (en) * 1984-07-31 1986-02-06 Canon K.K., Tokio/Tokyo COLOR PHOTOSENSOR
JPH05183141A (en) * 1991-07-12 1993-07-23 Fuji Xerox Co Ltd Color image sensor
US5536964A (en) * 1994-09-30 1996-07-16 Green; Evan D. H. Combined thin film pinhole and semiconductor photodetectors
JP2001015797A (en) * 1999-06-29 2001-01-19 Hitachi Denshi Ltd Semiconductor device for detecting light incidence position and manufacture thereof

Also Published As

Publication number Publication date
SE0003102D0 (en) 2000-09-01
WO2002019438A1 (en) 2002-03-07
AU2001282831A1 (en) 2002-03-13

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Legal Events

Date Code Title Description
NAV Patent application has lapsed