AU2002211635A1 - Reference bolometer and associated fabrication methods - Google Patents

Reference bolometer and associated fabrication methods

Info

Publication number
AU2002211635A1
AU2002211635A1 AU2002211635A AU1163502A AU2002211635A1 AU 2002211635 A1 AU2002211635 A1 AU 2002211635A1 AU 2002211635 A AU2002211635 A AU 2002211635A AU 1163502 A AU1163502 A AU 1163502A AU 2002211635 A1 AU2002211635 A1 AU 2002211635A1
Authority
AU
Australia
Prior art keywords
fabrication methods
associated fabrication
reference bolometer
bolometer
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002211635A
Inventor
Ronald Lemuel Brood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of AU2002211635A1 publication Critical patent/AU2002211635A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
AU2002211635A 2000-11-15 2001-10-10 Reference bolometer and associated fabrication methods Abandoned AU2002211635A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09713043 2000-11-15
US09/713,043 US6507021B1 (en) 2000-11-15 2000-11-15 Reference bolometer and associated fabrication methods
PCT/US2001/031787 WO2002040954A1 (en) 2000-11-15 2001-10-10 Reference bolometer and associated fabrication methods

Publications (1)

Publication Number Publication Date
AU2002211635A1 true AU2002211635A1 (en) 2002-05-27

Family

ID=24864515

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002211635A Abandoned AU2002211635A1 (en) 2000-11-15 2001-10-10 Reference bolometer and associated fabrication methods

Country Status (3)

Country Link
US (1) US6507021B1 (en)
AU (1) AU2002211635A1 (en)
WO (1) WO2002040954A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001264441A (en) * 2000-01-14 2001-09-26 Seiko Instruments Inc Calorimeter and manufacturing method therefor
IES20010552A2 (en) * 2001-06-11 2002-05-15 Nat Microelectronic Res Ct Microelectronic device and method of its manufacture
US7622717B2 (en) * 2007-08-22 2009-11-24 Drs Sensors & Targeting Systems, Inc. Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption
KR100925214B1 (en) * 2007-11-29 2009-11-06 한국전자통신연구원 Bolometer and manufacturing method thereof
FR2934044B1 (en) * 2008-07-17 2014-08-15 Commissariat Energie Atomique BOLOMETRIC DETECTOR OF ELECTROMAGNETIC WAVES.
FR2936052B1 (en) * 2008-09-16 2014-09-05 Ulis DEVICE FOR THE DETECTION OF INFRARED RADIATION COMPRISING A RESISTIVE IMAGING BOLOMETER, SYSTEM COMPRISING A MATRIX OF SUCH A BOLOMETER, AND METHOD FOR READING AN IMAGING BOLOMETER INTEGRATED IN SUCH A SYSTEM
CN102692276B (en) * 2011-03-21 2014-05-21 浙江大立科技股份有限公司 Non-refrigeration infrared detector
FR3002631B1 (en) * 2013-02-22 2018-11-02 Ulis BOLOMETRIC DETECTOR WITH ADAPTIVE POLARIZATION IN TEMPERATURE
FR3017456B1 (en) * 2014-02-12 2017-06-23 Commissariat Energie Atomique BOLOMETRIC DETECTOR WITH MIM STRUCTURE INCLUDING A THERMOMETER ELEMENT
FR3033043B1 (en) * 2015-02-20 2020-02-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives RADIATION DETECTION DEVICE COMPRISING AN ENCAPSULATION STRUCTURE WITH IMPROVED MECHANICAL HOLD
CN106276781B (en) * 2016-09-06 2017-10-17 烟台睿创微纳技术股份有限公司 A kind of micro-metering bolometer refers to the preparation method and structure of pixel
US11276718B2 (en) 2017-06-29 2022-03-15 Shanghai Ic R&D Center Co., Ltd Image sensor structure and manufacturing method thereof
US11333558B2 (en) 2018-11-06 2022-05-17 Globalfoundries U.S. Inc. Boolean temperature sensing using phase transition material
CN113720477B (en) * 2021-03-26 2023-01-10 北京北方高业科技有限公司 Infrared detector mirror image element based on CMOS (complementary metal oxide semiconductor) process and infrared detector

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450053A (en) 1985-09-30 1995-09-12 Honeywell Inc. Use of vanadium oxide in microbolometer sensors
US5300915A (en) 1986-07-16 1994-04-05 Honeywell Inc. Thermal sensor
US5286976A (en) 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US5288649A (en) 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5554849A (en) 1995-01-17 1996-09-10 Flir Systems, Inc. Micro-bolometric infrared staring array
JP2856180B2 (en) * 1996-11-27 1999-02-10 日本電気株式会社 Thermal type infrared detecting element and manufacturing method thereof
JP3149919B2 (en) 1997-12-03 2001-03-26 日本電気株式会社 Solid-state imaging device and readout circuit using the same
US6252229B1 (en) * 1998-07-10 2001-06-26 Boeing North American, Inc. Sealed-cavity microstructure and microbolometer and associated fabrication methods
JP4257989B2 (en) * 1998-10-19 2009-04-30 三菱電機株式会社 Infrared detector and infrared detector array using the same
US6307194B1 (en) * 1999-06-07 2001-10-23 The Boeing Company Pixel structure having a bolometer with spaced apart absorber and transducer layers and an associated fabrication method

Also Published As

Publication number Publication date
WO2002040954A1 (en) 2002-05-23
US6507021B1 (en) 2003-01-14

Similar Documents

Publication Publication Date Title
AU4848299A (en) Sealed-cavity microstructure and microbolometer and associated fabrication methods
AU2001247770A1 (en) Biased rotatable combdrive devices and methods
AU2001259700A1 (en) Thin-wall expandable well screen assembly and associated fabrication methods
AU2001213236A1 (en) Mini-cyclone biocollector and concentrator
AU2002235128A1 (en) Expression miniarrays and uses thereof
AU2002257128A1 (en) Simplifying and manipulating k-partite graphs
AU2001280599A1 (en) Compounds and methods
AU2001253418A1 (en) Compounds and methods
AU2001240637A1 (en) Novel imidazotriazinones and the use thereof
AU2002211717A1 (en) Stresscopins and their uses
AU2002211635A1 (en) Reference bolometer and associated fabrication methods
AU2001243394A1 (en) Compounds and methods
AU2001292936A1 (en) Octahydro-indolizines and quinolizines and hexahydro-pyrrolizines
AU2001232930A1 (en) Find and dial
AU2002213429A1 (en) Antiviral methods and compounds
AU2001295185A1 (en) Multiplexing-interleaving and demultiplexing-deinterleaving
AU4427201A (en) Noise-abatement structure and its constituting elements
AUPQ872300A0 (en) Compounds and methods
AU2002224876A1 (en) Isolated luciferases and the use thereof
AU1083501A (en) Antibiotic-metal complex and methods
AU2001290641A1 (en) Substituted fused pyrroleimines and pyrazoleimines
AU2001278951A1 (en) Compounds and methods
AU2002221353A1 (en) Suitcase structure and suitcase incorporating same
AU2001290350A1 (en) Assemblable, foldable and self-expandable pinata
AU2002256556A1 (en) Sea-trosy and related methods