AU2001280659A1 - Sensor usable in ultra pure and highly corrosive environments - Google Patents

Sensor usable in ultra pure and highly corrosive environments

Info

Publication number
AU2001280659A1
AU2001280659A1 AU2001280659A AU8065901A AU2001280659A1 AU 2001280659 A1 AU2001280659 A1 AU 2001280659A1 AU 2001280659 A AU2001280659 A AU 2001280659A AU 8065901 A AU8065901 A AU 8065901A AU 2001280659 A1 AU2001280659 A1 AU 2001280659A1
Authority
AU
Australia
Prior art keywords
highly corrosive
ultra pure
corrosive environments
sensor usable
usable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001280659A
Other languages
English (en)
Inventor
Gerald R. Cucci
Jorge Andres Diaz Diaz
Tom Peterson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of AU2001280659A1 publication Critical patent/AU2001280659A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
AU2001280659A 2000-07-20 2001-07-19 Sensor usable in ultra pure and highly corrosive environments Abandoned AU2001280659A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/620,007 US6612175B1 (en) 2000-07-20 2000-07-20 Sensor usable in ultra pure and highly corrosive environments
US09620007 2000-07-20
PCT/US2001/022919 WO2002008713A1 (en) 2000-07-20 2001-07-19 Sensor usable in ultra pure and highly corrosive environments

Publications (1)

Publication Number Publication Date
AU2001280659A1 true AU2001280659A1 (en) 2002-02-05

Family

ID=24484201

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001280659A Abandoned AU2001280659A1 (en) 2000-07-20 2001-07-19 Sensor usable in ultra pure and highly corrosive environments

Country Status (9)

Country Link
US (1) US6612175B1 (enrdf_load_stackoverflow)
EP (1) EP1311818B1 (enrdf_load_stackoverflow)
JP (1) JP2004506180A (enrdf_load_stackoverflow)
KR (1) KR100523970B1 (enrdf_load_stackoverflow)
CN (1) CN1225643C (enrdf_load_stackoverflow)
AU (1) AU2001280659A1 (enrdf_load_stackoverflow)
DE (1) DE60130471T2 (enrdf_load_stackoverflow)
TW (1) TW593994B (enrdf_load_stackoverflow)
WO (1) WO2002008713A1 (enrdf_load_stackoverflow)

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US10175133B2 (en) 2013-06-07 2019-01-08 Entegris, Inc. Sensor with protective layer
JP6666477B2 (ja) 2016-06-01 2020-03-13 インテグリス・インコーポレーテッド 流体回路及び流体回路の動作構成要素
DE102016119430A1 (de) * 2016-10-12 2018-04-12 Epcos Ag Anlegetemperaturmessfühler
EP3367074A1 (en) * 2017-02-23 2018-08-29 Kamstrup A/S Electronic flow meter including a built-in pressure sensor
CN108151953A (zh) * 2017-12-21 2018-06-12 中国电子科技集团公司第四十八研究所 一种密封转接壳体、差压芯体及密封转接壳体制作方法
KR20250123244A (ko) 2018-05-07 2025-08-14 엔테그리스, 아이엔씨. 정전기 방전 완화 기능이 통합된 유체 회로
WO2020236454A1 (en) 2019-05-23 2020-11-26 Entegris, Inc. Electrostatic discharge mitigation tubing
JP7372062B2 (ja) 2019-07-02 2023-10-31 アズビル株式会社 圧力センサ
JP2021025957A (ja) * 2019-08-08 2021-02-22 アズビル株式会社 圧力センサ
CN117053959B (zh) * 2023-10-11 2024-01-30 广东润宇传感器股份有限公司 应变式压力传感器及其制备方法

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Also Published As

Publication number Publication date
EP1311818A4 (en) 2003-09-10
CN1225643C (zh) 2005-11-02
TW593994B (en) 2004-06-21
CN1461407A (zh) 2003-12-10
KR100523970B1 (ko) 2005-10-26
US6612175B1 (en) 2003-09-02
WO2002008713A1 (en) 2002-01-31
DE60130471D1 (de) 2007-10-25
JP2004506180A (ja) 2004-02-26
KR20030015892A (ko) 2003-02-25
EP1311818B1 (en) 2007-09-12
DE60130471T2 (de) 2008-06-12
EP1311818A1 (en) 2003-05-21

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