AU2001277529A1 - Pressure monitoring with two vibrating plates - Google Patents
Pressure monitoring with two vibrating platesInfo
- Publication number
- AU2001277529A1 AU2001277529A1 AU2001277529A AU7752901A AU2001277529A1 AU 2001277529 A1 AU2001277529 A1 AU 2001277529A1 AU 2001277529 A AU2001277529 A AU 2001277529A AU 7752901 A AU7752901 A AU 7752901A AU 2001277529 A1 AU2001277529 A1 AU 2001277529A1
- Authority
- AU
- Australia
- Prior art keywords
- pressure monitoring
- vibrating plates
- vibrating
- plates
- monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
- G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10033182 | 2000-07-07 | ||
DE2000133182 DE10033182A1 (en) | 2000-07-07 | 2000-07-07 | Device and method for pressure measurement |
PCT/EP2001/007787 WO2002004911A1 (en) | 2000-07-07 | 2001-07-06 | Pressure monitoring with two vibrating plates |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001277529A1 true AU2001277529A1 (en) | 2002-01-21 |
Family
ID=7648209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001277529A Abandoned AU2001277529A1 (en) | 2000-07-07 | 2001-07-06 | Pressure monitoring with two vibrating plates |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2001277529A1 (en) |
DE (1) | DE10033182A1 (en) |
WO (1) | WO2002004911A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006024381B3 (en) * | 2006-05-24 | 2007-12-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS vacuum sensor based on the friction principle |
DE102012212064A1 (en) | 2012-07-11 | 2014-01-16 | Carl Zeiss Smt Gmbh | Lithographic plant with segmented mirror |
CN106610324B (en) * | 2015-11-27 | 2019-02-05 | 北京纳米能源与系统研究所 | Pressure sensor based on friction electricity |
CN110260671A (en) * | 2019-07-02 | 2019-09-20 | 成都易飞得材料科技有限公司 | A kind of oscillation pressure material handling system based on linear motion |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2251817A1 (en) * | 1973-11-16 | 1975-06-13 | Weisser W | Atmospheric pressure measuring assembly - has tuning fork whose oscillation frequency is measured |
JPS61215931A (en) * | 1985-03-22 | 1986-09-25 | Seiko Electronic Components Ltd | Tuning fork type piezoelectric vibrator |
JPS61215933A (en) * | 1985-03-22 | 1986-09-25 | Seiko Electronic Components Ltd | Piezoelectric vibrator |
JPS62137533A (en) * | 1985-12-11 | 1987-06-20 | Hitachi Ltd | Vacuum sensor |
US5528939A (en) * | 1995-03-21 | 1996-06-25 | Martin; Jacob H. | Micromechanical pressure gauge having extended sensor range |
-
2000
- 2000-07-07 DE DE2000133182 patent/DE10033182A1/en active Granted
-
2001
- 2001-07-06 AU AU2001277529A patent/AU2001277529A1/en not_active Abandoned
- 2001-07-06 WO PCT/EP2001/007787 patent/WO2002004911A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE10033182A1 (en) | 2002-01-17 |
WO2002004911A1 (en) | 2002-01-17 |
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