AU2001269841A1 - Silane containing polishing composition for cmp - Google Patents

Silane containing polishing composition for cmp

Info

Publication number
AU2001269841A1
AU2001269841A1 AU2001269841A AU6984101A AU2001269841A1 AU 2001269841 A1 AU2001269841 A1 AU 2001269841A1 AU 2001269841 A AU2001269841 A AU 2001269841A AU 6984101 A AU6984101 A AU 6984101A AU 2001269841 A1 AU2001269841 A1 AU 2001269841A1
Authority
AU
Australia
Prior art keywords
cmp
polishing composition
silane containing
containing polishing
silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001269841A
Inventor
Steven K. Grumbine
Shumin Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CMC Materials Inc
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of AU2001269841A1 publication Critical patent/AU2001269841A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1472—Non-aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A polishing slurry comprising at least one silane in solution and at least one abrasive wherein the silane has the following formula: €ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ Y-Si-(X 1 X 2 R) dimers, trimers and oligomers thereof, wherein X 1 , X 2 and Y are each independently selected from hydroxy, a hydrolyzable substituent and a non-hydrolyzable substituent, and wherein R is a non-hydrolyzable substituent; wherein one substituent selected from X 1 and X 2 is a non-hydrolyzable substituent.
AU2001269841A 2000-07-05 2001-06-14 Silane containing polishing composition for cmp Abandoned AU2001269841A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/609,480 US6646348B1 (en) 2000-07-05 2000-07-05 Silane containing polishing composition for CMP
US09609480 2000-07-05
PCT/US2001/019191 WO2002002707A1 (en) 2000-07-05 2001-06-14 Silane containing polishing composition for cmp

Publications (1)

Publication Number Publication Date
AU2001269841A1 true AU2001269841A1 (en) 2002-01-14

Family

ID=24440985

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001269841A Abandoned AU2001269841A1 (en) 2000-07-05 2001-06-14 Silane containing polishing composition for cmp

Country Status (9)

Country Link
US (2) US6646348B1 (en)
EP (2) EP1852481B1 (en)
JP (1) JP2004502824A (en)
CN (1) CN1249185C (en)
AT (1) ATE371708T1 (en)
AU (1) AU2001269841A1 (en)
DE (1) DE60130213T2 (en)
TW (1) TWI279426B (en)
WO (1) WO2002002707A1 (en)

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CN103526207B (en) * 2013-09-23 2016-01-20 无锡阳工机械制造有限公司 A kind of rust cleaning slurry
CN104745087B (en) * 2013-12-25 2018-07-24 安集微电子（上海）有限公司 A kind of chemical mechanical polishing liquid and polishing method
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US9309442B2 (en) 2014-03-21 2016-04-12 Cabot Microelectronics Corporation Composition for tungsten buffing
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JP6170027B2 (en) * 2014-10-09 2017-07-26 信越化学工業株式会社 CMP abrasive, method for producing the same, and substrate polishing method
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US10167425B2 (en) * 2016-05-04 2019-01-01 Oci Company Ltd. Etching solution capable of suppressing particle appearance
CN106010297B (en) 2016-06-20 2018-07-31 上海新安纳电子科技有限公司 A kind of preparation method of alumina polishing solution
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Also Published As

Publication number Publication date
US6646348B1 (en) 2003-11-11
EP1299490A1 (en) 2003-04-09
EP1852481A1 (en) 2007-11-07
EP1852481B1 (en) 2012-09-05
DE60130213T2 (en) 2007-12-20
JP2004502824A (en) 2004-01-29
US20040214443A1 (en) 2004-10-28
DE60130213D1 (en) 2007-10-11
CN1440449A (en) 2003-09-03
EP1299490B1 (en) 2007-08-29
ATE371708T1 (en) 2007-09-15
CN1249185C (en) 2006-04-05
TWI279426B (en) 2007-04-21
WO2002002707A1 (en) 2002-01-10

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