AU2001269608A1 - A method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method - Google Patents

A method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method

Info

Publication number
AU2001269608A1
AU2001269608A1 AU2001269608A AU6960801A AU2001269608A1 AU 2001269608 A1 AU2001269608 A1 AU 2001269608A1 AU 2001269608 A AU2001269608 A AU 2001269608A AU 6960801 A AU6960801 A AU 6960801A AU 2001269608 A1 AU2001269608 A1 AU 2001269608A1
Authority
AU
Australia
Prior art keywords
substrate
manufacturing process
manufacturing
well
stamper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001269608A
Inventor
Christian Etienne Hendriks
Roland Anthony Tacken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
O T B Group BV
Original Assignee
O T B Group BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by O T B Group BV filed Critical O T B Group BV
Publication of AU2001269608A1 publication Critical patent/AU2001269608A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261Preparing a master, e.g. exposing photoresist, electroforming
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146Laser beam
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Abstract

A method for manufacturing a substrate for use in a stamper manufacturing process and a substrate which is used in stamper manufacturing process to be used in producing optical discs, includes exposing, developing and heating of a photosensitive film that has been coated onto a substrate.
AU2001269608A 2000-06-26 2001-06-25 A method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method Abandoned AU2001269608A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1015524 2000-06-26
NL1015524A NL1015524C2 (en) 2000-06-26 2000-06-26 A method of manufacturing a substrate for use in a pestle manufacturing process, as well as a substrate obtained by such a method.
PCT/NL2001/000472 WO2002009103A1 (en) 2000-06-26 2001-06-25 A method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method

Publications (1)

Publication Number Publication Date
AU2001269608A1 true AU2001269608A1 (en) 2002-02-05

Family

ID=19771594

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001269608A Abandoned AU2001269608A1 (en) 2000-06-26 2001-06-25 A method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method

Country Status (10)

Country Link
US (2) US7067238B2 (en)
EP (1) EP1295287B1 (en)
JP (1) JP2004505398A (en)
CN (1) CN1199169C (en)
AT (1) ATE257618T1 (en)
AU (1) AU2001269608A1 (en)
DE (1) DE60101744T2 (en)
HK (1) HK1057124A1 (en)
NL (1) NL1015524C2 (en)
WO (1) WO2002009103A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3592678B2 (en) * 2002-02-27 2004-11-24 松下電器産業株式会社 Manufacturing method of blank board and manufacturing method of direct stamper
NL1021760C2 (en) * 2002-10-28 2004-05-03 Otb Groep B V Main plate for manufacturing a stamp plate as well as a stamp plate and storage medium and a method for manufacturing the master plate, stamp plate and storage medium.
GB2406543B (en) * 2003-10-04 2006-06-07 Agilent Technologies Inc A method for fabricating masters for imprint lithography and related imprint process

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4316279A (en) * 1978-09-04 1982-02-16 Rca Corporation Optical recording in thin photoresist
JPS5877044A (en) * 1981-10-29 1983-05-10 Sanyo Electric Co Ltd Production of disk original board
US4790134A (en) * 1987-06-11 1988-12-13 Brunswick Corporation Outboard motor exhaust tube divider
DE3719844A1 (en) * 1987-06-13 1988-12-29 Basf Ag CROSSLINKABLE MIXTURE BY PHOTOPOLYMERSISATION
US4964958A (en) * 1988-10-14 1990-10-23 Philips & Du Pont Optical Company Method of producing a metal matrix
JPH02162716A (en) * 1988-12-15 1990-06-22 Nec Corp Formation of microscopic pattern
US5455145A (en) * 1988-12-24 1995-10-03 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing double layer resist pattern and double layer resist structure
JP2708847B2 (en) * 1989-02-02 1998-02-04 三洋電機株式会社 Optical disk stamper and method of manufacturing the same
US6165697A (en) * 1991-11-15 2000-12-26 Shipley Company, L.L.C. Antihalation compositions
US5635267A (en) * 1992-09-17 1997-06-03 Matsushita Electric Industrial Co., Ltd. Optical information recording medium of phase change type having variably grooved tracks depending on their radial locations
EP0596439A3 (en) * 1992-11-05 1995-02-08 Matsushita Electric Ind Co Ltd Method of making a master disc usable for the production of optical discs.
EP0660314B1 (en) 1993-12-24 2000-12-27 Koninklijke Philips Electronics N.V. Method of manufacturing an optical information carrier, arrangement for carrying out the method, and optical information carrier obtained by means of the method
NL9400225A (en) * 1994-02-14 1995-09-01 Od & Me Bv Method for manufacturing a stamper for producing optical disks without the intervention of a master.
US5783371A (en) 1994-07-29 1998-07-21 Trustees Of Boston University Process for manufacturing optical data storage disk stamper
JP3436843B2 (en) * 1996-04-25 2003-08-18 東京応化工業株式会社 Base material for lithography and resist material for lithography using the same
NL1007216C2 (en) * 1997-10-07 1999-04-08 Od & Me Bv Method of manufacturing a stamper for producing optical disks, stamper thus obtained and optical disk obtained using such a stamper.
CN1161769C (en) 1998-04-06 2004-08-11 伊美申公司 Reverse optical mastering for data storage disks
JP2000021033A (en) * 1998-06-30 2000-01-21 Toshiba Corp Optical disk master disk
US6303416B1 (en) * 1999-10-07 2001-10-16 International Business Machines Corporation Method to reduce plasma etch fluting

Also Published As

Publication number Publication date
US20060099532A1 (en) 2006-05-11
DE60101744T2 (en) 2004-10-14
JP2004505398A (en) 2004-02-19
HK1057124A1 (en) 2004-03-12
US20040091721A1 (en) 2004-05-13
EP1295287A1 (en) 2003-03-26
US7067238B2 (en) 2006-06-27
ATE257618T1 (en) 2004-01-15
CN1449563A (en) 2003-10-15
DE60101744D1 (en) 2004-02-12
WO2002009103A1 (en) 2002-01-31
CN1199169C (en) 2005-04-27
NL1015524C2 (en) 2001-12-28
EP1295287B1 (en) 2004-01-07

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