AU2001267050A1 - Optical mirror system with multi-axis rotational control - Google Patents

Optical mirror system with multi-axis rotational control

Info

Publication number
AU2001267050A1
AU2001267050A1 AU2001267050A AU6705001A AU2001267050A1 AU 2001267050 A1 AU2001267050 A1 AU 2001267050A1 AU 2001267050 A AU2001267050 A AU 2001267050A AU 6705001 A AU6705001 A AU 6705001A AU 2001267050 A1 AU2001267050 A1 AU 2001267050A1
Authority
AU
Australia
Prior art keywords
mirror system
optical mirror
rotational control
axis rotational
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001267050A
Inventor
Paul Merritt Hagelin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSPEED Corp
Original Assignee
CSPEED CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSPEED CORP filed Critical CSPEED CORP
Publication of AU2001267050A1 publication Critical patent/AU2001267050A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001267050A 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control Abandoned AU2001267050A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US59088800A 2000-06-09 2000-06-09
US09590888 2000-06-09
PCT/US2001/040885 WO2001095014A1 (en) 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control

Publications (1)

Publication Number Publication Date
AU2001267050A1 true AU2001267050A1 (en) 2001-12-17

Family

ID=24364132

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001267050A Abandoned AU2001267050A1 (en) 2000-06-09 2001-06-07 Optical mirror system with multi-axis rotational control

Country Status (2)

Country Link
AU (1) AU2001267050A1 (en)
WO (1) WO2001095014A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985279B1 (en) * 2004-08-02 2006-01-10 Advanced Nano Systems, Inc. MEMS mirror with drive rotation amplification of mirror rotation angle
DE102008001248A1 (en) * 2008-04-18 2009-11-05 Robert Bosch Gmbh Manufacturing method for a micromechanical component and micromechanical component
DE102017215276B4 (en) * 2017-08-31 2023-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multi-directional translation and tilt platform using flexure actuators as the active entity

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3219123B2 (en) * 1993-11-29 2001-10-15 株式会社デンソー Two-dimensional optical scanning device and bar code reader using the same
WO1998044571A1 (en) * 1997-04-01 1998-10-08 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators

Also Published As

Publication number Publication date
WO2001095014A1 (en) 2001-12-13

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