AU2001249087A1 - Integrated tunable fabry-perot filter and method of making same - Google Patents

Integrated tunable fabry-perot filter and method of making same

Info

Publication number
AU2001249087A1
AU2001249087A1 AU2001249087A AU4908701A AU2001249087A1 AU 2001249087 A1 AU2001249087 A1 AU 2001249087A1 AU 2001249087 A AU2001249087 A AU 2001249087A AU 4908701 A AU4908701 A AU 4908701A AU 2001249087 A1 AU2001249087 A1 AU 2001249087A1
Authority
AU
Australia
Prior art keywords
making same
perot filter
tunable fabry
integrated tunable
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001249087A
Inventor
Dale C. Flanders
Minh Van Le
Michael F. Miller
Stanley R. Shanfield
Peter S. Whitney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Axsun Technologies LLC
Original Assignee
Axsun Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axsun Technologies LLC filed Critical Axsun Technologies LLC
Publication of AU2001249087A1 publication Critical patent/AU2001249087A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00Optical: systems and elements
    • Y10S359/90Methods
AU2001249087A 2000-03-03 2001-03-02 Integrated tunable fabry-perot filter and method of making same Abandoned AU2001249087A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US18678000P 2000-03-03 2000-03-03
US60186780 2000-03-03
US09645200 2000-08-25
US09/645,200 US6836366B1 (en) 2000-03-03 2000-08-25 Integrated tunable fabry-perot filter and method of making same
PCT/US2001/006944 WO2001067158A2 (en) 2000-03-03 2001-03-02 Integrated tunable fabry-perot filter and method of making same

Publications (1)

Publication Number Publication Date
AU2001249087A1 true AU2001249087A1 (en) 2001-09-17

Family

ID=26882401

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001249087A Abandoned AU2001249087A1 (en) 2000-03-03 2001-03-02 Integrated tunable fabry-perot filter and method of making same

Country Status (3)

Country Link
US (2) US6836366B1 (en)
AU (1) AU2001249087A1 (en)
WO (1) WO2001067158A2 (en)

Families Citing this family (143)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6407851B1 (en) 2000-08-01 2002-06-18 Mohammed N. Islam Micromechanical optical switch
US6724785B1 (en) * 2000-04-14 2004-04-20 Agilent Technologies, Inc. Tunable fabry-perot filters and lasers with reduced frequency noise
US6795605B1 (en) 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
US6726338B2 (en) * 2000-11-16 2004-04-27 Olympus Optical Co., Ltd. Variable shape mirror and its manufacturing method
US6721098B2 (en) * 2000-12-22 2004-04-13 Axsun Technologies, Inc. Triple electrode MOEMS tunable filter and fabrication process therefor
US7145704B1 (en) 2003-11-25 2006-12-05 Cheetah Omni, Llc Optical logic gate based optical router
US6721473B1 (en) 2001-02-02 2004-04-13 Cheetah Omni, Llc Variable blazed grating based signal processing
US6594059B2 (en) * 2001-07-16 2003-07-15 Axsun Technologies, Inc. Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
US6818564B1 (en) 2001-12-20 2004-11-16 Analog Devices, Inc. Method for etching a tapered bore in a silicon substrate, and a semiconductor wafer comprising the substrate
US6828172B2 (en) * 2002-02-04 2004-12-07 Delphi Technologies, Inc. Process for a monolithically-integrated micromachined sensor and circuit
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6986587B2 (en) * 2002-10-16 2006-01-17 Olympus Corporation Variable-shape reflection mirror and method of manufacturing the same
KR100489801B1 (en) * 2002-12-10 2005-05-16 한국전자통신연구원 Tunable wavelength optical filter and method of manufacturing the same
US7531842B2 (en) * 2002-12-20 2009-05-12 Analog Devices, Inc. Method for etching a tapered bore in a silicon substrate, and a semiconductor wafer comprising the substrate
CA2517906A1 (en) * 2003-03-03 2004-12-29 Montana State University-Bozeman Miniature confocal optical device, system, and method
US7218438B2 (en) * 2003-04-30 2007-05-15 Hewlett-Packard Development Company, L.P. Optical electronic device with partial reflector layer
US8269174B2 (en) 2003-07-18 2012-09-18 Chemimage Corporation Method and apparatus for compact spectrometer for multipoint sampling of an object
US7542138B2 (en) * 2003-07-18 2009-06-02 Chemimage Corporation Sample container and system for a handheld spectrometer and method for using therefor
US7286222B2 (en) * 2003-07-18 2007-10-23 Chemimage Corporation Sample container and system for a handheld spectrometer and method for using therefor
JP2006528353A (en) * 2003-07-18 2006-12-14 ケミマジ コーポレーション Method and apparatus for a multiwavelength imaging spectrometer
US7440096B2 (en) * 2003-07-18 2008-10-21 Chemimage Corporation Method and apparatus for compact spectrometer for fiber array spectral translator
US7738095B2 (en) * 2003-07-18 2010-06-15 Chemimage Corporation Method and apparatus for compact spectrometer for detecting hazardous agents
US7548310B2 (en) * 2003-07-18 2009-06-16 Chemimage Corporation Method and apparatus for compact spectrometer for multipoint sampling of an object
JP3770326B2 (en) * 2003-10-01 2006-04-26 セイコーエプソン株式会社 Analysis equipment
US7269325B2 (en) * 2003-11-03 2007-09-11 Jidong Hou Tunable optical device
US7061681B2 (en) * 2004-03-02 2006-06-13 Hewlett-Packard Development Company, L.P. Fabry-Perot interferometer
DE102004019570B3 (en) * 2004-04-22 2005-10-13 International University Bremen Gmbh Fourier spectrometer and method for producing a Fourier spectrometer
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7110122B2 (en) * 2004-07-21 2006-09-19 Hewlett-Packard Development Company, L.P. Interferometer calibration methods and apparatus
EP1784678A2 (en) 2004-08-19 2007-05-16 University of Pittsburgh Chip-scale optical spectrum analyzers with enhanced resolution
US7177021B2 (en) * 2004-09-14 2007-02-13 Hewlett-Packard Development Company, L.P. Integrated radiation sources and amplifying structures, and methods of using the same
US7307719B2 (en) * 2004-09-14 2007-12-11 Hewlett-Packard Development Company, L.P. Wavelength-tunable excitation radiation amplifying structure and method
US7339666B2 (en) * 2004-09-14 2008-03-04 Hewlett-Packard Development Company, L.P. Light-amplifying structures and methods for surface-enhanced Raman spectroscopy
US7527995B2 (en) * 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7612932B2 (en) 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7385704B2 (en) * 2005-03-30 2008-06-10 Xerox Corporation Two-dimensional spectral cameras and methods for capturing spectral information using two-dimensional spectral cameras
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US20080239494A1 (en) * 2005-08-16 2008-10-02 Zander Dennis R Tunable Light Filter
US20070090732A1 (en) * 2005-10-25 2007-04-26 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7566582B2 (en) * 2005-10-25 2009-07-28 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7561133B2 (en) * 2005-12-29 2009-07-14 Xerox Corporation System and methods of device independent display using tunable individually-addressable fabry-perot membranes
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US20080158568A1 (en) * 2006-04-10 2008-07-03 General Electric Company Interferometer and method for fabricating same
US7711239B2 (en) * 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7511808B2 (en) * 2006-04-27 2009-03-31 Hewlett-Packard Development Company, L.P. Analyte stages including tunable resonant cavities and Raman signal-enhancing structures
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US20100220331A1 (en) * 2006-06-06 2010-09-02 Anis Zribi Micro-electromechanical system fabry-perot filter cavity
US7573578B2 (en) * 2006-06-06 2009-08-11 Ge Homeland Protection, Inc. Micro-electromechanical system Fabry-Perot filter mirrors
US7471441B1 (en) 2006-06-09 2008-12-30 Hewlett-Packard Development Company, L.P. Flexures
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7345804B1 (en) 2006-06-19 2008-03-18 Hrl Laboratories, Llc Dynamic optical tag communicator and system using corner cube modulating retroreflector
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US20080049228A1 (en) * 2006-08-28 2008-02-28 Novaspectra, Inc. Fabry-perot interferometer array
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US20080101748A1 (en) * 2006-10-26 2008-05-01 Hewlett-Packard Development Company Lp Mems device lever
US20080111834A1 (en) * 2006-11-09 2008-05-15 Mignard Marc M Two primary color display
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8111262B2 (en) * 2007-05-18 2012-02-07 Qualcomm Mems Technologies, Inc. Interferometric modulator displays with reduced color sensitivity
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7630121B2 (en) * 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7813029B2 (en) 2007-07-31 2010-10-12 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing color shift of interferometric modulators
US7626696B2 (en) * 2007-08-07 2009-12-01 Chemimage Corporation Method and apparatus for reconfigurable field of view in a FAST-based imaging system
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
WO2009052326A2 (en) 2007-10-19 2009-04-23 Qualcomm Mems Technologies, Inc. Display with integrated photovoltaics
CN101836137A (en) 2007-10-23 2010-09-15 高通Mems科技公司 Adjustably transmissive mems-based devices
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
KR20120090772A (en) 2009-05-29 2012-08-17 퀄컴 엠이엠에스 테크놀로지스, 인크. Illumination devices and methods of fabrication thereof
DE102009037706A1 (en) * 2009-08-17 2011-02-24 Opsolution Nanophotonics Gmbh Method and device for determining the concentration of NO 2 in gas mixtures
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
IL201742A0 (en) 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter
US20110169724A1 (en) * 2010-01-08 2011-07-14 Qualcomm Mems Technologies, Inc. Interferometric pixel with patterned mechanical layer
WO2011126953A1 (en) 2010-04-09 2011-10-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
US8624471B1 (en) * 2010-07-30 2014-01-07 Georgia Tech Research Corporation Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers
KR20130091763A (en) 2010-08-17 2013-08-19 퀄컴 엠이엠에스 테크놀로지스, 인크. Actuation and calibration of a charge neutral electrode in an interferometric display device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
JP5810512B2 (en) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 Optical device
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
JP5757835B2 (en) * 2011-10-04 2015-08-05 浜松ホトニクス株式会社 Spectral sensor manufacturing method
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
TWI471955B (en) * 2011-12-13 2015-02-01 Xintec Inc Semiconductor package and method of forming same
TWI488231B (en) * 2012-01-18 2015-06-11 Xintec Inc Semiconductor package and manufacturing method thereof and system for manufacturing the same
US9874740B2 (en) 2012-05-25 2018-01-23 Axsun Technologies, Inc. Tunable filter with levered membrane and longer scan length
JP5987573B2 (en) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 Optical module, electronic device, and driving method
US20140264655A1 (en) * 2013-03-13 2014-09-18 Invensense, Inc. Surface roughening to reduce adhesion in an integrated mems device
DE102013209234B4 (en) 2013-05-17 2018-04-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device with a vibratable suspended optical element
WO2016014078A1 (en) * 2014-07-25 2016-01-28 Hewlett-Packard Development Company, L.P. Tunable optical device
JP6844355B2 (en) * 2017-03-17 2021-03-17 セイコーエプソン株式会社 Optical module and driving method of optical module
JP2019109374A (en) * 2017-12-19 2019-07-04 セイコーエプソン株式会社 Optical module, spectrometry device, spectrometry method, and electronic apparatus
DE102018205778A1 (en) * 2018-04-17 2019-10-17 Robert Bosch Gmbh Interferometer and method of making an interferometer
DE102018211325A1 (en) * 2018-07-10 2020-01-16 Robert Bosch Gmbh Fabry-Perot interferometer unit and method for producing a Fabry-Perot interferometer unit
CN112551482B (en) * 2020-12-10 2023-04-18 电子科技大学 Fine control method for free spectrum width of micro rod cavity
US20220365339A1 (en) * 2021-05-11 2022-11-17 II-VI Delaware, Inc Optical Package Having Tunable Filter

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2336930A1 (en) * 1973-07-20 1975-02-06 Battelle Institut E V INFRARED MODULATOR (II.)
JPH077149B2 (en) * 1985-10-16 1995-01-30 ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ Radiator deflector assembly
US4859060A (en) 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US5291502A (en) 1992-09-04 1994-03-01 The Board Of Trustees Of The Leland Stanford, Jr. University Electrostatically tunable optical device and optical interconnect for processors
US5500761A (en) 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
FI94804C (en) 1994-02-17 1995-10-25 Vaisala Oy Electrically adjustable surface micromechanical Fabry-Perot interferometer for optical material analysis
FI98325C (en) * 1994-07-07 1997-05-26 Vaisala Oy Selective infrared detector
US5430574A (en) 1994-07-25 1995-07-04 Litton Systems, Inc. Rugged optical filter and switch for communication networks
FI103216B (en) 1995-07-07 1999-05-14 Vaisala Oyj Method for controlling a short Fabry-Perot interferometer in an ND IR measuring device
US5739945A (en) 1995-09-29 1998-04-14 Tayebati; Parviz Electrically tunable optical filter utilizing a deformable multi-layer mirror
FR2768812B1 (en) 1997-09-19 1999-10-22 Commissariat Energie Atomique FABRY-PEROT INTERFEROMETER TUNABLE INTEGRATED
WO1999034484A2 (en) 1997-12-29 1999-07-08 Coretek, Inc. Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter
US6438149B1 (en) * 1998-06-26 2002-08-20 Coretek, Inc. Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US5949571A (en) 1998-07-30 1999-09-07 Lucent Technologies Mars optical modulators

Also Published As

Publication number Publication date
WO2001067158A2 (en) 2001-09-13
WO2001067158A3 (en) 2002-02-28
US6525880B2 (en) 2003-02-25
US6836366B1 (en) 2004-12-28
US20010028503A1 (en) 2001-10-11

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