AU2001238550A1 - Membrane probing system - Google Patents

Membrane probing system

Info

Publication number
AU2001238550A1
AU2001238550A1 AU2001238550A AU3855001A AU2001238550A1 AU 2001238550 A1 AU2001238550 A1 AU 2001238550A1 AU 2001238550 A AU2001238550 A AU 2001238550A AU 3855001 A AU3855001 A AU 3855001A AU 2001238550 A1 AU2001238550 A1 AU 2001238550A1
Authority
AU
Australia
Prior art keywords
probing system
membrane probing
membrane
probing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001238550A
Inventor
Clarence E. Cowan
Mike P. Dauphinais
Martin J. Koxxy
Kenneth R. Smith
Paul A. Tervo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Beaverton Inc
Original Assignee
Cascade Microtech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cascade Microtech Inc filed Critical Cascade Microtech Inc
Publication of AU2001238550A1 publication Critical patent/AU2001238550A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AU2001238550A 2000-02-25 2001-02-20 Membrane probing system Abandoned AU2001238550A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US18485100P 2000-02-25 2000-02-25
US60184851 2000-02-25
US09637527 2000-08-10
US09/637,527 US6838890B2 (en) 2000-02-25 2000-11-29 Membrane probing system
PCT/US2001/005430 WO2001063308A1 (en) 2000-02-25 2001-02-20 Membrane probing system

Publications (1)

Publication Number Publication Date
AU2001238550A1 true AU2001238550A1 (en) 2001-09-03

Family

ID=26880533

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001238550A Abandoned AU2001238550A1 (en) 2000-02-25 2001-02-20 Membrane probing system

Country Status (3)

Country Link
US (5) US6838890B2 (en)
AU (1) AU2001238550A1 (en)
WO (1) WO2001063308A1 (en)

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US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
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WO2013070201A1 (en) * 2011-11-09 2013-05-16 Advantest America, Inc. Fine pitch microelectronic contact array and method of making same
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US9594114B2 (en) 2014-06-26 2017-03-14 Teradyne, Inc. Structure for transmitting signals in an application space between a device under test and test electronics
US9977052B2 (en) 2016-10-04 2018-05-22 Teradyne, Inc. Test fixture
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US10677815B2 (en) 2018-06-08 2020-06-09 Teradyne, Inc. Test system having distributed resources
CN112444724A (en) * 2019-09-05 2021-03-05 英业达科技有限公司 Test equipment
US11363746B2 (en) 2019-09-06 2022-06-14 Teradyne, Inc. EMI shielding for a signal trace
TWI712809B (en) * 2019-09-10 2020-12-11 英業達股份有限公司 Testing apparatus
US11862901B2 (en) 2020-12-15 2024-01-02 Teradyne, Inc. Interposer

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US6930498B2 (en) 2005-08-16
US20030132767A1 (en) 2003-07-17
US6838890B2 (en) 2005-01-04
US20080252316A1 (en) 2008-10-16
US20050248359A1 (en) 2005-11-10
WO2001063308A1 (en) 2001-08-30
US7148711B2 (en) 2006-12-12
US7403025B2 (en) 2008-07-22
US20050007131A1 (en) 2005-01-13

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