AU2001234990A1 - Double pass double etalon spectrometer - Google Patents

Double pass double etalon spectrometer

Info

Publication number
AU2001234990A1
AU2001234990A1 AU2001234990A AU3499001A AU2001234990A1 AU 2001234990 A1 AU2001234990 A1 AU 2001234990A1 AU 2001234990 A AU2001234990 A AU 2001234990A AU 3499001 A AU3499001 A AU 3499001A AU 2001234990 A1 AU2001234990 A1 AU 2001234990A1
Authority
AU
Australia
Prior art keywords
double
etalon spectrometer
pass
spectrometer
etalon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001234990A
Inventor
Jesse D. Buck
Alexander I. Ershov
Scott T. Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/513,324 external-priority patent/US6320663B1/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of AU2001234990A1 publication Critical patent/AU2001234990A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
AU2001234990A 2000-02-25 2001-02-08 Double pass double etalon spectrometer Abandoned AU2001234990A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/513,324 US6320663B1 (en) 1999-01-22 2000-02-25 Method and device for spectral measurements of laser beam
US09513324 2000-02-25
US09737181 2000-12-14
US09/737,181 US6359693B2 (en) 1999-02-04 2000-12-14 Double pass double etalon spectrometer
PCT/US2001/004332 WO2001063230A1 (en) 2000-02-25 2001-02-08 Double pass double etalon spectrometer

Publications (1)

Publication Number Publication Date
AU2001234990A1 true AU2001234990A1 (en) 2001-09-03

Family

ID=27057823

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001234990A Abandoned AU2001234990A1 (en) 2000-02-25 2001-02-08 Double pass double etalon spectrometer

Country Status (4)

Country Link
US (1) US6359693B2 (en)
JP (2) JP3916876B2 (en)
AU (1) AU2001234990A1 (en)
WO (1) WO2001063230A1 (en)

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US6160832A (en) 1998-06-01 2000-12-12 Lambda Physik Gmbh Method and apparatus for wavelength calibration
US7006541B2 (en) * 1998-06-01 2006-02-28 Lambda Physik Ag Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
US6580517B2 (en) 2000-03-01 2003-06-17 Lambda Physik Ag Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
US6480275B2 (en) * 2001-01-29 2002-11-12 Cymer, Inc. High resolution etalon-grating monochromator
US6597462B2 (en) 2000-03-01 2003-07-22 Lambda Physik Ag Laser wavelength and bandwidth monitor
US6807205B1 (en) 2000-07-14 2004-10-19 Lambda Physik Ag Precise monitor etalon calibration technique
US6747741B1 (en) 2000-10-12 2004-06-08 Lambda Physik Ag Multiple-pass interferometric device
US6750972B2 (en) * 2000-11-17 2004-06-15 Cymer, Inc. Gas discharge ultraviolet wavemeter with enhanced illumination
US6713770B2 (en) * 2001-01-29 2004-03-30 Cymer, Inc. High resolution spectral measurement device
US6538737B2 (en) * 2001-01-29 2003-03-25 Cymer, Inc. High resolution etalon-grating spectrometer
US20030161374A1 (en) * 2001-11-21 2003-08-28 Lambda Physik Ag High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applications
US20030098982A1 (en) * 2001-11-28 2003-05-29 Jds Uniphase Corporation Truncated series-based resonant cavity interferometer
US6788726B2 (en) * 2002-02-26 2004-09-07 New Focus, Inc. External cavity laser with high spectral purity output
IL159249A0 (en) * 2002-04-23 2004-06-01 Small packaged spectroscopic sensor unit
EP1516284A2 (en) * 2002-06-21 2005-03-23 Pressco Technology, Inc. Patterned illumination method and apparatus for machine vision systems
US20040071181A1 (en) * 2002-10-15 2004-04-15 Rong Huang Retro-reflective etalon and the devices using the same
US20040141182A1 (en) * 2002-12-16 2004-07-22 Thomas Schroder Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laser
US20050286599A1 (en) * 2004-06-29 2005-12-29 Rafac Robert J Method and apparatus for gas discharge laser output light coherency reduction
US7202955B2 (en) 2004-06-30 2007-04-10 Digital Optics Corporation Spectrally diverse spectrometer and associated methods
US20090073451A1 (en) * 2004-06-30 2009-03-19 Tekolste Robert D Spectrally diverse, spatially sensitive apparatus and associated methods
WO2006037373A1 (en) 2004-10-01 2006-04-13 Agilent Technologies, Inc. Optical spectrum analysis
US7317536B2 (en) 2005-06-27 2008-01-08 Cymer, Inc. Spectral bandwidth metrology for high repetition rate gas discharge lasers
CN101300855B (en) * 2005-11-04 2010-06-09 皇家飞利浦电子股份有限公司 Rendering of image data for multi-view display
US7733494B2 (en) * 2006-03-31 2010-06-08 Cymer, Inc. Bandwidth measuring device for high pulse repetition rate pulsed laser
US20080049228A1 (en) * 2006-08-28 2008-02-28 Novaspectra, Inc. Fabry-perot interferometer array
US7817274B2 (en) * 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
WO2009070459A1 (en) 2007-11-30 2009-06-04 Jingyun Zhang Miniature spectrometers working with cellular phones and other portable electronic devices
DE102008050867B4 (en) 2008-09-30 2011-12-08 Carl Zeiss Laser Optics Gmbh Method for measuring a spectrum of a narrow-band light source and spectrometer arrangement
JP5810512B2 (en) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 Optical device
US8599381B2 (en) 2011-01-19 2013-12-03 Massachusetts Institute Of Technology Gas detector for atmospheric species detection
CN104332817B (en) * 2014-10-20 2017-05-17 山西大学 Single-frequency laser wavelength comparison device and method
WO2017139747A1 (en) * 2016-02-12 2017-08-17 The General Hospital Corporation A system for performing spectroscopy
US11239626B2 (en) 2018-02-22 2022-02-01 Lightmachinery Inc. Multi-pass etalon filter
US11860036B2 (en) 2020-06-24 2024-01-02 Cymer, Llc Determination of measurement error in an etalon
JP7128316B1 (en) * 2021-03-26 2022-08-30 アンリツ株式会社 OPTICAL SPECTRUM ANALYZER AND WAVELENGTH CALIBRATION CONTROL METHOD

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US3729261A (en) 1971-06-21 1973-04-24 Rca Corp Stabilized multipass interferometer
US4005937A (en) 1974-11-26 1977-02-01 Allied Chemical Corporation Simultaneous interferometric transmission of periodic spectral components
JPS5331027B2 (en) 1975-02-24 1978-08-30
JPS62203024A (en) 1986-03-04 1987-09-07 Canon Inc Fabry-perot spectroscope
US4850709A (en) 1986-03-04 1989-07-25 Canon Kabushiki Kaisha Fabri-perot spectroscopy method and apparatus utilizing the same
EP0403228B1 (en) 1989-06-16 1995-08-23 FISONS plc Optical system for spectral analysis
US5025445A (en) 1989-11-22 1991-06-18 Cymer Laser Technologies System for, and method of, regulating the wavelength of a light beam
JPH03173486A (en) 1989-12-01 1991-07-26 Toshiba Corp Narrow bandwidth laser
US5243614A (en) 1990-11-28 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Wavelength stabilizer for narrow bandwidth laser
JP2997956B2 (en) 1991-06-27 2000-01-11 株式会社小松製作所 Wavelength detector
US5589717A (en) 1993-01-11 1996-12-31 Instruments Sa, Inc. Compact spectrum analyzer module
US5450207A (en) 1993-07-16 1995-09-12 Cymer Laser Technologies Method and apparatus for calibrating a laser wavelength control mechanism
US5991324A (en) 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
JPH10300587A (en) 1997-04-30 1998-11-13 Nikon Corp Apparatus and method for measurement of wavelength
US5757483A (en) 1997-08-06 1998-05-26 Stellarnet, Inc. Dual beam optical spectrograph
US5835210A (en) 1997-09-10 1998-11-10 Cymber, Inc. Multi-pass spectrometer

Also Published As

Publication number Publication date
JP2001349781A (en) 2001-12-21
US6359693B2 (en) 2002-03-19
US20010013933A1 (en) 2001-08-16
JP2006138874A (en) 2006-06-01
JP3916876B2 (en) 2007-05-23
WO2001063230A1 (en) 2001-08-30

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