ATE93978T1 - Membranabdeckung. - Google Patents

Membranabdeckung.

Info

Publication number
ATE93978T1
ATE93978T1 AT88310357T AT88310357T ATE93978T1 AT E93978 T1 ATE93978 T1 AT E93978T1 AT 88310357 T AT88310357 T AT 88310357T AT 88310357 T AT88310357 T AT 88310357T AT E93978 T1 ATE93978 T1 AT E93978T1
Authority
AT
Austria
Prior art keywords
pellicle
membrane cover
side face
film
frame
Prior art date
Application number
AT88310357T
Other languages
English (en)
Inventor
Hiroaki Nakagawa
Hitomi Matsuzaki
Original Assignee
Mitsui Petrochemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27962787A external-priority patent/JP2535971B2/ja
Application filed by Mitsui Petrochemical Ind filed Critical Mitsui Petrochemical Ind
Application granted granted Critical
Publication of ATE93978T1 publication Critical patent/ATE93978T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
AT88310357T 1987-11-05 1988-11-03 Membranabdeckung. ATE93978T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27962787A JP2535971B2 (ja) 1987-11-05 1987-11-05 ペリクル
EP88310357A EP0315450B1 (de) 1987-11-05 1988-11-03 Membranabdeckung

Publications (1)

Publication Number Publication Date
ATE93978T1 true ATE93978T1 (de) 1993-09-15

Family

ID=17613616

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88310357T ATE93978T1 (de) 1987-11-05 1988-11-03 Membranabdeckung.

Country Status (4)

Country Link
KR (1) KR910004848B1 (de)
AT (1) ATE93978T1 (de)
CA (1) CA1305627C (de)
MY (1) MY103634A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1237395C (zh) * 2000-12-27 2006-01-18 三井化学株式会社 薄膜和薄膜的制造方法以及薄膜用粘合剂

Also Published As

Publication number Publication date
CA1305627C (en) 1992-07-28
KR890008613A (ko) 1989-07-12
MY103634A (en) 1993-08-28
KR910004848B1 (ko) 1991-07-13

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