ATE93978T1 - Membranabdeckung. - Google Patents
Membranabdeckung.Info
- Publication number
- ATE93978T1 ATE93978T1 AT88310357T AT88310357T ATE93978T1 AT E93978 T1 ATE93978 T1 AT E93978T1 AT 88310357 T AT88310357 T AT 88310357T AT 88310357 T AT88310357 T AT 88310357T AT E93978 T1 ATE93978 T1 AT E93978T1
- Authority
- AT
- Austria
- Prior art keywords
- pellicle
- membrane cover
- side face
- film
- frame
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27962787A JP2535971B2 (ja) | 1987-11-05 | 1987-11-05 | ペリクル |
EP88310357A EP0315450B1 (de) | 1987-11-05 | 1988-11-03 | Membranabdeckung |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE93978T1 true ATE93978T1 (de) | 1993-09-15 |
Family
ID=17613616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88310357T ATE93978T1 (de) | 1987-11-05 | 1988-11-03 | Membranabdeckung. |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR910004848B1 (de) |
AT (1) | ATE93978T1 (de) |
CA (1) | CA1305627C (de) |
MY (1) | MY103634A (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1237395C (zh) * | 2000-12-27 | 2006-01-18 | 三井化学株式会社 | 薄膜和薄膜的制造方法以及薄膜用粘合剂 |
-
1988
- 1988-11-03 AT AT88310357T patent/ATE93978T1/de active
- 1988-11-03 KR KR1019880014436A patent/KR910004848B1/ko not_active IP Right Cessation
- 1988-11-04 CA CA000582249A patent/CA1305627C/en not_active Expired - Fee Related
- 1988-11-04 MY MYPI88001262A patent/MY103634A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CA1305627C (en) | 1992-07-28 |
KR890008613A (ko) | 1989-07-12 |
MY103634A (en) | 1993-08-28 |
KR910004848B1 (ko) | 1991-07-13 |
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