MY103634A - Pellicle - Google Patents

Pellicle

Info

Publication number
MY103634A
MY103634A MYPI88001262A MYPI19881262A MY103634A MY 103634 A MY103634 A MY 103634A MY PI88001262 A MYPI88001262 A MY PI88001262A MY PI19881262 A MYPI19881262 A MY PI19881262A MY 103634 A MY103634 A MY 103634A
Authority
MY
Malaysia
Prior art keywords
pellicle
side face
film
frame
spread
Prior art date
Application number
MYPI88001262A
Inventor
Nakagawa Hiroaki
Matsuzaki Hitomi
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27962787A external-priority patent/JP2535971B2/en
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Publication of MY103634A publication Critical patent/MY103634A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

A PELLICLE (1) IS COMPOSED OF A PELLICLE FRAME (2), A PELLICLE FILM (3) SPREAD ON ONE SIDE FACE OF THE PELLICLE FRAME (2), AND A TACKY SUBSTANCE LAYER (4) HAVING A HIGH TRANSMITTANCE FORMED ON THE INNER SIDE FACE OF THE PELLICLE FILM (3). (FIG. 1)
MYPI88001262A 1987-11-05 1988-11-04 Pellicle MY103634A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27962787A JP2535971B2 (en) 1987-11-05 1987-11-05 Pellicle

Publications (1)

Publication Number Publication Date
MY103634A true MY103634A (en) 1993-08-28

Family

ID=17613616

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI88001262A MY103634A (en) 1987-11-05 1988-11-04 Pellicle

Country Status (4)

Country Link
KR (1) KR910004848B1 (en)
AT (1) ATE93978T1 (en)
CA (1) CA1305627C (en)
MY (1) MY103634A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1237395C (en) * 2000-12-27 2006-01-18 三井化学株式会社 Thin film and producing method of thin film, and adhesive for thin film

Also Published As

Publication number Publication date
KR910004848B1 (en) 1991-07-13
KR890008613A (en) 1989-07-12
ATE93978T1 (en) 1993-09-15
CA1305627C (en) 1992-07-28

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