ATE89410T1 - Positionsmesseinrichtung. - Google Patents

Positionsmesseinrichtung.

Info

Publication number
ATE89410T1
ATE89410T1 AT90100262T AT90100262T ATE89410T1 AT E89410 T1 ATE89410 T1 AT E89410T1 AT 90100262 T AT90100262 T AT 90100262T AT 90100262 T AT90100262 T AT 90100262T AT E89410 T1 ATE89410 T1 AT E89410T1
Authority
AT
Austria
Prior art keywords
grating
phase
beams
another
measurement device
Prior art date
Application number
AT90100262T
Other languages
German (de)
English (en)
Inventor
Dieter Dipl-Ing Fh Michel
Original Assignee
Heidenhain Gmbh Dr Johannes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidenhain Gmbh Dr Johannes filed Critical Heidenhain Gmbh Dr Johannes
Application granted granted Critical
Publication of ATE89410T1 publication Critical patent/ATE89410T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Eye Examination Apparatus (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT90100262T 1989-03-14 1990-01-08 Positionsmesseinrichtung. ATE89410T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3908254A DE3908254A1 (de) 1989-03-14 1989-03-14 Positionsmesseinrichtung
EP90100262A EP0387481B1 (de) 1989-03-14 1990-01-08 Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
ATE89410T1 true ATE89410T1 (de) 1993-05-15

Family

ID=6376300

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90100262T ATE89410T1 (de) 1989-03-14 1990-01-08 Positionsmesseinrichtung.

Country Status (3)

Country Link
EP (1) EP0387481B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AT (1) ATE89410T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (3) DE3908254A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT395914B (de) * 1991-04-18 1993-04-26 Rsf Elektronik Gmbh Photoelektrische positionsmesseinrichtung
EP1003012B3 (de) 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE10025461A1 (de) * 2000-05-23 2001-12-06 Mahr Gmbh Messeinrichtung nach dem Interferenzprinzip

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法

Also Published As

Publication number Publication date
DE59001394D1 (de) 1993-06-17
EP0387481B1 (de) 1993-05-12
EP0387481A2 (de) 1990-09-19
DE8916050U1 (de) 1993-03-11
DE3908254A1 (de) 1990-09-20
EP0387481A3 (de) 1991-02-06
DE3908254C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-13

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee