ATE81476T1 - Behandlung einer photoresistmaterialien enthaltenden abfalloesung. - Google Patents

Behandlung einer photoresistmaterialien enthaltenden abfalloesung.

Info

Publication number
ATE81476T1
ATE81476T1 AT87306477T AT87306477T ATE81476T1 AT E81476 T1 ATE81476 T1 AT E81476T1 AT 87306477 T AT87306477 T AT 87306477T AT 87306477 T AT87306477 T AT 87306477T AT E81476 T1 ATE81476 T1 AT E81476T1
Authority
AT
Austria
Prior art keywords
treatment
solution containing
waste solution
photoresist materials
containing photoresist
Prior art date
Application number
AT87306477T
Other languages
English (en)
Inventor
Kohei Miki
Hiroshi Saito
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17189486A external-priority patent/JPH0615078B2/ja
Priority claimed from JP62007449A external-priority patent/JPS63178888A/ja
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Priority claimed from EP87306477A external-priority patent/EP0254550B1/de
Application granted granted Critical
Publication of ATE81476T1 publication Critical patent/ATE81476T1/de

Links

AT87306477T 1986-07-23 1987-07-22 Behandlung einer photoresistmaterialien enthaltenden abfalloesung. ATE81476T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP17189486A JPH0615078B2 (ja) 1986-07-23 1986-07-23 フオトレジスト廃液処理方法
JP62007449A JPS63178888A (ja) 1987-01-17 1987-01-17 フオトレジスト含有廃液の処理方法
EP87306477A EP0254550B1 (de) 1986-07-23 1987-07-22 Behandlung einer Photoresistmaterialien enthaltenden Abfallösung

Publications (1)

Publication Number Publication Date
ATE81476T1 true ATE81476T1 (de) 1992-10-15

Family

ID=27230476

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87306477T ATE81476T1 (de) 1986-07-23 1987-07-22 Behandlung einer photoresistmaterialien enthaltenden abfalloesung.

Country Status (1)

Country Link
AT (1) ATE81476T1 (de)

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Legal Events

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