ATE70662T1 - Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren. - Google Patents

Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren.

Info

Publication number
ATE70662T1
ATE70662T1 AT83903284T AT83903284T ATE70662T1 AT E70662 T1 ATE70662 T1 AT E70662T1 AT 83903284 T AT83903284 T AT 83903284T AT 83903284 T AT83903284 T AT 83903284T AT E70662 T1 ATE70662 T1 AT E70662T1
Authority
AT
Austria
Prior art keywords
integrated circuits
metal silicide
production processes
aluminum metal
compound structure
Prior art date
Application number
AT83903284T
Other languages
English (en)
Inventor
Donald L Wollesen
Craig S Sander
Jacob D Haskell
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Priority claimed from PCT/US1983/001505 external-priority patent/WO1984001471A1/en
Application granted granted Critical
Publication of ATE70662T1 publication Critical patent/ATE70662T1/de

Links

AT83903284T 1982-09-30 1983-09-26 Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren. ATE70662T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US43018882A 1982-09-30 1982-09-30
PCT/US1983/001505 WO1984001471A1 (en) 1982-09-30 1983-09-26 An aluminum-metal silicide interconnect structure for integrated circuits and method of manufacture thereof
EP83903284A EP0120918B1 (de) 1982-09-30 1983-09-26 Aluminium-metall-silicid-verbindungsstruktur für integrierte schaltungen und deren herstellungsverfahren

Publications (1)

Publication Number Publication Date
ATE70662T1 true ATE70662T1 (de) 1992-01-15

Family

ID=26091293

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83903284T ATE70662T1 (de) 1982-09-30 1983-09-26 Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren.

Country Status (1)

Country Link
AT (1) ATE70662T1 (de)

Similar Documents

Publication Publication Date Title
DE3583972D1 (de) Kanalunterbrecher aus metallsilizid fuer integrierte schaltungen und verfahren zu deren herstellung.
DE3582640D1 (de) Verzoegerungsschaltung fuer lsi-toranordnung.
DE3382592T2 (de) Zweifachbusstruktur fuer die rechnerverbindung.
EP0085988A3 (en) Semiconductor memory and method for fabricating the same
DE3270560D1 (en) Semiconductor intregrated circuits and manufacturing process thereof
DE69316038D1 (de) Kühlungsstruktur für integrierte Schaltungen
NL191424C (nl) Werkwijze voor het vervaardigen van een geintegreerde schakeling.
NO166878C (no) Fremgangsmaate til utvinning av metall.
ES517620A0 (es) Un procedimiento para la eliminacion quimica de soldantes de estano y de aleacion de estano-plomo de un substrato.
FI842301A0 (fi) Anordning foer rullning av en aendloes bana.
NL188587C (nl) Koper-nikkellegering en werkwijze voor het vervaardigen daarvan.
ES511413A0 (es) Procedimiento par la fabricacion de sustratos para intercorrector componentes eletronicos.
KR860700371A (ko) 금속 실리사이드를 사용하는 에틸렌 글리콜 부식 방법
GB2151847B (en) Semiconductor device with metal silicide layer and fabrication
IT1164638B (it) Procedimento di tempra di metalli
EP0058852A3 (en) Semiconductor device with connections formed from sheet metal
GB2168846B (en) Semiconductor device having multi-thickness metallization and process for the fabrication thereof
DE3382828T2 (de) Metalldraht für integrierte Schaltungen
DK60583D0 (da) Laseorgan til tagbagagebaereboejler og tagbagageholdere til automobiler
ATE70662T1 (de) Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren.
DE3382482D1 (de) Aluminium-metall-silicid-verbindungsstruktur fuer integrierte schaltungen und deren herstellungsverfahren.
NO833736L (no) Anordning for fremstilling av metallbaand.
IT8224142A0 (it) Complesso vite-dado migliorato e attrezzo per il suo montaggio.
NO833734L (no) Anordning for fremstilling av metallbaand.
DE3278003D1 (en) Masterslice integrated circuit device and method for manufacturing the same

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties