ATE555373T1 - Verfahren zum betrieb eines widerstands- wärmeverlust-drucksensors - Google Patents

Verfahren zum betrieb eines widerstands- wärmeverlust-drucksensors

Info

Publication number
ATE555373T1
ATE555373T1 AT05772352T AT05772352T ATE555373T1 AT E555373 T1 ATE555373 T1 AT E555373T1 AT 05772352 T AT05772352 T AT 05772352T AT 05772352 T AT05772352 T AT 05772352T AT E555373 T1 ATE555373 T1 AT E555373T1
Authority
AT
Austria
Prior art keywords
operating
pressure sensor
heat loss
loss pressure
resistance
Prior art date
Application number
AT05772352T
Other languages
English (en)
Inventor
Michael Borenstein
Paul C Arnold
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/900,504 external-priority patent/US20060021444A1/en
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Priority claimed from PCT/US2005/025394 external-priority patent/WO2006020196A1/en
Application granted granted Critical
Publication of ATE555373T1 publication Critical patent/ATE555373T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Force In General (AREA)
AT05772352T 2004-07-28 2005-07-19 Verfahren zum betrieb eines widerstands- wärmeverlust-drucksensors ATE555373T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/900,504 US20060021444A1 (en) 2004-07-28 2004-07-28 Method of operating a resistive heat-loss pressure sensor
US7081905A 2005-03-01 2005-03-01
US11/146,721 US7249516B2 (en) 2004-07-28 2005-06-07 Method of operating a resistive heat-loss pressure sensor
PCT/US2005/025394 WO2006020196A1 (en) 2004-07-28 2005-07-19 Method of operating a resistive heat-loss pressure sensor

Publications (1)

Publication Number Publication Date
ATE555373T1 true ATE555373T1 (de) 2012-05-15

Family

ID=35730656

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05772352T ATE555373T1 (de) 2004-07-28 2005-07-19 Verfahren zum betrieb eines widerstands- wärmeverlust-drucksensors

Country Status (3)

Country Link
US (1) US7249516B2 (de)
JP (1) JP4809837B2 (de)
AT (1) ATE555373T1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4831670B2 (ja) * 2006-02-24 2011-12-07 富士通株式会社 試料抵抗測定装置
US10914717B2 (en) 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
US7249516B2 (en) 2007-07-31
JP4809837B2 (ja) 2011-11-09
JP2008508517A (ja) 2008-03-21
US20060021442A1 (en) 2006-02-02

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