ATE554376T1 - Drucksensor mit baulicher temperatur- und ausrichtungskompensation - Google Patents
Drucksensor mit baulicher temperatur- und ausrichtungskompensationInfo
- Publication number
- ATE554376T1 ATE554376T1 AT04753043T AT04753043T ATE554376T1 AT E554376 T1 ATE554376 T1 AT E554376T1 AT 04753043 T AT04753043 T AT 04753043T AT 04753043 T AT04753043 T AT 04753043T AT E554376 T1 ATE554376 T1 AT E554376T1
- Authority
- AT
- Austria
- Prior art keywords
- sensing element
- housing
- support
- diaphragm
- pressure sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/464,967 US6923068B2 (en) | 2003-06-19 | 2003-06-19 | Pressure transducer |
PCT/US2004/016145 WO2005001408A2 (en) | 2003-06-19 | 2004-05-24 | Pressure transducer with structural temperature and misalignment compensation |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE554376T1 true ATE554376T1 (de) | 2012-05-15 |
Family
ID=33517396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04753043T ATE554376T1 (de) | 2003-06-19 | 2004-05-24 | Drucksensor mit baulicher temperatur- und ausrichtungskompensation |
Country Status (5)
Country | Link |
---|---|
US (2) | US6923068B2 (de) |
EP (1) | EP1639335B1 (de) |
AT (1) | ATE554376T1 (de) |
CA (1) | CA2529471C (de) |
WO (1) | WO2005001408A2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE602004015478D1 (de) * | 2004-11-25 | 2008-09-11 | Gefran Spa | Drucksensor mit Kompensation der Gehäusewärmeausdehnung |
US7181972B2 (en) * | 2004-12-27 | 2007-02-27 | General Electric Company | Static and dynamic pressure sensor |
US7313965B2 (en) * | 2004-12-27 | 2008-01-01 | General Electric Company | High-temperature pressure sensor |
US7866964B2 (en) * | 2005-05-20 | 2011-01-11 | Emerson Climate Technologies, Inc. | Sensor for hermetic machine |
WO2007043068A1 (en) * | 2005-10-10 | 2007-04-19 | Gefran S.P.A. | Pressure sensor |
US7284444B2 (en) * | 2005-12-30 | 2007-10-23 | Kulite Semiconductor Products, Inc. | Hermetically sealed displacement sensor apparatus |
US8302496B2 (en) * | 2006-06-03 | 2012-11-06 | Eldon James Corporation | Universal sensor fitting for process applications |
JP2008064529A (ja) * | 2006-09-06 | 2008-03-21 | Denso Corp | 圧力センサ |
US8262372B2 (en) | 2007-05-10 | 2012-09-11 | Emerson Climate Technologies, Inc. | Compressor hermetic terminal |
US7516675B2 (en) * | 2007-07-03 | 2009-04-14 | Kulite Semiconductor Products, Inc. | Joystick sensor apparatus |
US8939734B2 (en) * | 2007-08-28 | 2015-01-27 | Emerson Climate Technologies, Inc. | Molded plug for a compressor |
US8020448B2 (en) * | 2008-10-21 | 2011-09-20 | GM Global Technology Operations LLC | Pressure sensor with nonlinear characteristic curve |
DE102008043517B4 (de) * | 2008-11-06 | 2022-03-03 | Robert Bosch Gmbh | Sensormodul und Verfahren zur Herstellung eines Sensormoduls |
US8939735B2 (en) * | 2009-03-27 | 2015-01-27 | Emerson Climate Technologies, Inc. | Compressor plug assembly |
DE102009022539A1 (de) * | 2009-05-25 | 2010-12-02 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Brennraumdrucks einer Brennkraftmaschine |
DE102009026436A1 (de) * | 2009-05-25 | 2010-12-09 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Brennraumdrucks einer Brennkraftmaschine |
US8276458B2 (en) * | 2010-07-12 | 2012-10-02 | Rosemount Inc. | Transmitter output with scalable rangeability |
DE102011017647A1 (de) * | 2011-04-28 | 2012-10-31 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Drucks, insbesondere eines Brennraumdrucks einer Brennkraftmaschine |
DE102011017667A1 (de) * | 2011-04-28 | 2012-10-31 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Drucks, insbesondere eines Brennraumdrucks einer Brennkraftmaschine |
US9480177B2 (en) | 2012-07-27 | 2016-10-25 | Emerson Climate Technologies, Inc. | Compressor protection module |
US20160153443A1 (en) * | 2013-10-30 | 2016-06-02 | Lime Instruments, Llc | Sensor assembly for measuring dynamic pressure in reciprocating pumps |
JP6318605B2 (ja) * | 2013-12-20 | 2018-05-09 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
DE102015117736A1 (de) * | 2015-10-19 | 2017-04-20 | Endress+Hauser Gmbh+Co. Kg | Druckmesseinrichtung |
JP6499601B2 (ja) * | 2016-02-25 | 2019-04-10 | シチズンファインデバイス株式会社 | 検出装置および検出システム |
CN108700483B (zh) * | 2016-02-25 | 2020-09-29 | 西铁城精密器件株式会社 | 压力检测装置以及压力检测系统 |
JP6602740B2 (ja) * | 2016-10-26 | 2019-11-06 | 日本特殊陶業株式会社 | 圧力センサ |
EP3470809B1 (de) * | 2017-10-16 | 2020-07-15 | Kistler Holding AG | Drucksensor für ein metall- oder kunststoffverarbeitungswerkzeug |
WO2021126261A1 (en) * | 2019-12-20 | 2021-06-24 | Vishay Measurements Group, Inc. | Strain gages and methods for manufacturing thereof |
Family Cites Families (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4016437A (en) * | 1971-03-15 | 1977-04-05 | Kistler Instrumente Ag | Piezoelectric pressure and force transducers or accelerometers |
CH536561A (de) * | 1971-03-15 | 1973-04-30 | Kistler Instrumente Ag | Piezoelektrisches Kristallelement |
CH573592A5 (de) * | 1974-05-03 | 1976-03-15 | Kistler Instrumente Ag | |
CH587478A5 (de) * | 1974-11-08 | 1977-04-29 | Kistler Instrumente Ag | |
CH582353A5 (de) * | 1974-11-08 | 1976-11-30 | Kistler Instrumente Ag | |
US4127840A (en) | 1977-02-22 | 1978-11-28 | Conrac Corporation | Solid state force transducer |
DE2855746C3 (de) * | 1978-12-22 | 1981-07-30 | Kistler Instrumente Ag, Winterthur | Piezoelektrischer Dehnungsaufnehmer |
DE2906407C2 (de) * | 1979-02-20 | 1981-02-26 | Kistler Instrumente Ag, Winterthur (Schweiz) | Piezoelektrisches Wandlerelement zum Einbau in Druck-, Kraft- oder Beschleunigungsaufnehmer |
CH644227A5 (de) * | 1979-09-14 | 1984-07-13 | Kistler Instrumente Ag | Piezoelektrisches kristallelement fuer messwandler. |
DE3021778C2 (de) * | 1980-06-10 | 1982-11-18 | Kistler Instrumente Ag, Winterthur | Kraftaufnehmer, insbesondere für ballistische Druckmessungen |
ATE17523T1 (de) * | 1982-04-06 | 1986-02-15 | Kistler Instrumente Ag | Hochdruckaufnehmer. |
ATE24764T1 (de) * | 1982-04-06 | 1987-01-15 | Kistler Instrumente Ag | Hochdruckaufnehmer. |
US4570097A (en) * | 1984-10-26 | 1986-02-11 | Texas Instruments Incorporated | Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine |
US4645965A (en) * | 1984-10-26 | 1987-02-24 | Texas Instruments Incorporated | Cylinder pressure transmitter for an internal combustion engine |
US4819487A (en) * | 1985-01-07 | 1989-04-11 | Dynisco, Inc. | High pressure transducer |
US4679438A (en) * | 1985-01-07 | 1987-07-14 | Dynisco, Inc. | High pressure transducer |
US4829827A (en) * | 1985-01-07 | 1989-05-16 | Dynisco, Inc. | Pressure transducer |
US4680972A (en) * | 1985-01-07 | 1987-07-21 | Dynisco, Inc. | Pressure transducer |
US4858471A (en) * | 1985-11-14 | 1989-08-22 | Dynisco, Inc. | Pressure transducer |
ATE42830T1 (de) * | 1986-01-22 | 1989-05-15 | Kristal Instr Ag | Aufnehmer, insbesondere fuer hochdruckmessungen. |
US4683757A (en) * | 1986-03-24 | 1987-08-04 | Motorola, Inc. | Axial pressure sensor |
US4702113A (en) * | 1986-04-04 | 1987-10-27 | Dynisco, Inc. | Pressure transducer |
US4712430A (en) * | 1986-04-04 | 1987-12-15 | Dynisco, Inc. | Pressure transducer |
ATE44318T1 (de) * | 1986-09-18 | 1989-07-15 | Kistler Instrumente Ag | Kraftmessvorrichtung mit einem elektromechanischen wandler. |
DE3769789D1 (de) * | 1987-02-11 | 1991-06-06 | Kistler Instrumente Ag | Verfahren und anordnung zum messen von druecken in rohrfoermigen koerpern. |
EP0325674A1 (de) * | 1988-01-29 | 1989-08-02 | Kistler Instrumente AG | Wandlerelement zur Messung einer Drehbeschleunigung |
DE3811311C1 (de) * | 1988-04-02 | 1989-03-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
US4994781A (en) | 1988-04-07 | 1991-02-19 | Sahagen Armen N | Pressure sensing transducer employing piezoresistive elements on sapphire |
DE3877563D1 (de) * | 1988-05-18 | 1993-02-25 | Kistler Instrumente Ag | Kraftaufnehmer zum einbau in messplattformen. |
DE3823673A1 (de) * | 1988-07-13 | 1990-01-18 | Philips Patentverwaltung | Druck- bzw. kraftaufnehmer mit einer axialsymmetrischen, druck- bzw. kraftaufnehmenden kreisplattenfeder |
US4993266A (en) | 1988-07-26 | 1991-02-19 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Semiconductor pressure transducer |
DE8903667U1 (de) * | 1989-03-23 | 1989-05-11 | Kistler Instrumente Ag, Winterthur | Hochdruckaufnehmer |
AT394112B (de) * | 1989-03-30 | 1992-02-10 | Avl Verbrennungskraft Messtech | Druckaufnehmer |
USRE34441E (en) * | 1989-03-30 | 1993-11-16 | AVL Gesellschaft fur Verbrennungskraftmaschinen und Messtechnik m.b.H. Prof.Dr.Dr.h.c. Hans List | Pressure sensor |
US5181417A (en) * | 1989-07-10 | 1993-01-26 | Nippon Soken, Inc. | Pressure detecting device |
JPH03148028A (ja) * | 1989-11-02 | 1991-06-24 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
TW221491B (de) * | 1990-03-16 | 1994-03-01 | Matsushita Electric Ind Co Ltd | |
US5088329A (en) | 1990-05-07 | 1992-02-18 | Sahagen Armen N | Piezoresistive pressure transducer |
DE4103706A1 (de) * | 1990-07-18 | 1992-01-30 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
DE4103704A1 (de) * | 1990-07-18 | 1992-01-23 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
DE4103705A1 (de) * | 1990-07-18 | 1992-01-23 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
JPH04131722A (ja) * | 1990-09-21 | 1992-05-06 | Toyota Motor Corp | 圧力センサ及び圧力センサの製造方法 |
US5209119A (en) * | 1990-12-12 | 1993-05-11 | Regents Of The University Of Minnesota | Microdevice for sensing a force |
US5186055A (en) * | 1991-06-03 | 1993-02-16 | Eaton Corporation | Hermetic mounting system for a pressure transducer |
IL106790A (en) * | 1992-09-01 | 1996-08-04 | Rosemount Inc | A capacitive pressure sensation consisting of the bracket and the process of creating it |
US5347841A (en) * | 1992-09-14 | 1994-09-20 | Kistler Instrument Corporation | Self-testing transducer curcuit |
US5360331A (en) * | 1993-01-05 | 1994-11-01 | Dynisco, Inc. | Injection molding machine pressure transducer |
US5461922A (en) * | 1993-07-27 | 1995-10-31 | Lucas-Novasensor | Pressure sensor isolated within housing having integral diaphragm and method of making same |
FR2717262B1 (fr) | 1994-03-14 | 1997-09-26 | Nippon Denso Co | Détecteur de pression. |
US5602339A (en) * | 1994-03-24 | 1997-02-11 | Dynisco, Inc. | Injection molding machine pressure transducer with trapezoidal cavity |
EP0823045A1 (de) * | 1995-04-28 | 1998-02-11 | Rosemount Inc. | Montagevorrichtung für druckübertrager |
US5703296A (en) * | 1995-06-27 | 1997-12-30 | Delco Electronics Corp. | Pressure sensor having reduced hysteresis and enhanced electrical performance at low pressures |
JPH09222372A (ja) * | 1996-02-19 | 1997-08-26 | Mitsubishi Electric Corp | 半導体式センサ |
US6487898B1 (en) | 1997-01-28 | 2002-12-03 | Eaton Corporation | Engine cylinder pressure sensor with thermal compensation element |
US5824910A (en) * | 1997-04-16 | 1998-10-20 | The United States Of America As Represented By The Secretary Of The Navy | Miniature hydrostat fabricated using multiple microelectromechanical processes |
JPH11201846A (ja) * | 1998-01-12 | 1999-07-30 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
CH693490A5 (de) * | 1998-07-14 | 2003-08-29 | Kk Holding Ag | Hochdruck-Sensor. |
US6229190B1 (en) * | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
US6508129B1 (en) * | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6550337B1 (en) * | 2000-01-19 | 2003-04-22 | Measurement Specialties, Inc. | Isolation technique for pressure sensing structure |
DE10238720A1 (de) * | 2002-08-23 | 2004-03-11 | Robert Bosch Gmbh | Vorrichtung zur Messung einer Kraft, Vorrichtung zur Messung eines Drucks und Drucksensor |
DE602004015478D1 (de) | 2004-11-25 | 2008-09-11 | Gefran Spa | Drucksensor mit Kompensation der Gehäusewärmeausdehnung |
-
2003
- 2003-06-19 US US10/464,967 patent/US6923068B2/en not_active Expired - Lifetime
-
2004
- 2004-05-24 EP EP04753043A patent/EP1639335B1/de not_active Expired - Lifetime
- 2004-05-24 CA CA2529471A patent/CA2529471C/en not_active Expired - Lifetime
- 2004-05-24 WO PCT/US2004/016145 patent/WO2005001408A2/en active Search and Examination
- 2004-05-24 AT AT04753043T patent/ATE554376T1/de active
- 2004-12-29 US US11/024,573 patent/US7171857B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1639335A2 (de) | 2006-03-29 |
US20040255683A1 (en) | 2004-12-23 |
CA2529471A1 (en) | 2005-01-06 |
WO2005001408A3 (en) | 2005-03-24 |
US6923068B2 (en) | 2005-08-02 |
CA2529471C (en) | 2016-05-10 |
EP1639335B1 (de) | 2012-04-18 |
US20050150302A1 (en) | 2005-07-14 |
WO2005001408A2 (en) | 2005-01-06 |
US7171857B2 (en) | 2007-02-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE554376T1 (de) | Drucksensor mit baulicher temperatur- und ausrichtungskompensation | |
AU2011211369B2 (en) | Pressure sensor | |
DE60204161D1 (de) | Temperaturstabiler saw sensor mit elastischen konstanten dritter ordnung | |
WO2002039101A3 (en) | Catalytic sensor | |
US20060289415A1 (en) | Micromechanical device having integrated heating | |
JPH07502122A (ja) | 圧電抵抗シリコン圧力センサ設計 | |
GB2369889B (en) | Strain sensing installation | |
CA2491546A1 (en) | Integrated acoustic transducer assembly | |
US7798010B2 (en) | Sensor geometry for improved package stress isolation | |
GB2042257A (en) | Pressure sensor | |
ATE333709T1 (de) | Piezokeramischer biegewandler sowie verwendung des piezokeramischen biegewandlers | |
EP1059517A4 (de) | Drucksensor | |
US8302483B2 (en) | Robust design of high pressure sensor device | |
US6487898B1 (en) | Engine cylinder pressure sensor with thermal compensation element | |
ATE347736T1 (de) | Mikroelektronische baugruppe | |
CA2431625A1 (en) | Semiconductor acceleration sensor using doped semiconductor layer as wiring | |
WO2009041463A1 (ja) | 半導体圧力センサ | |
JP6528602B2 (ja) | 圧脈波センサ及び生体情報測定装置 | |
JP4088002B2 (ja) | 石英系導波路型光モジュール | |
DE602004015478D1 (de) | Drucksensor mit Kompensation der Gehäusewärmeausdehnung | |
FR2859017B1 (fr) | Capteur de rotation inertiel a element sensible monte directement sur le corps | |
WO2002010703A1 (en) | Pressure sensor | |
JPH0365627A (ja) | 半導体圧力センサー | |
JP2004294295A (ja) | センサ装置 | |
CA2461424A1 (en) | Optical differential pressure transducer utilizing a bellows and flexure system |