ATE554376T1 - Drucksensor mit baulicher temperatur- und ausrichtungskompensation - Google Patents
Drucksensor mit baulicher temperatur- und ausrichtungskompensationInfo
- Publication number
- ATE554376T1 ATE554376T1 AT04753043T AT04753043T ATE554376T1 AT E554376 T1 ATE554376 T1 AT E554376T1 AT 04753043 T AT04753043 T AT 04753043T AT 04753043 T AT04753043 T AT 04753043T AT E554376 T1 ATE554376 T1 AT E554376T1
- Authority
- AT
- Austria
- Prior art keywords
- sensing element
- housing
- support
- diaphragm
- pressure sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/464,967 US6923068B2 (en) | 2003-06-19 | 2003-06-19 | Pressure transducer |
| PCT/US2004/016145 WO2005001408A2 (en) | 2003-06-19 | 2004-05-24 | Pressure transducer with structural temperature and misalignment compensation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE554376T1 true ATE554376T1 (de) | 2012-05-15 |
Family
ID=33517396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04753043T ATE554376T1 (de) | 2003-06-19 | 2004-05-24 | Drucksensor mit baulicher temperatur- und ausrichtungskompensation |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6923068B2 (de) |
| EP (1) | EP1639335B1 (de) |
| AT (1) | ATE554376T1 (de) |
| CA (1) | CA2529471C (de) |
| WO (1) | WO2005001408A2 (de) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1662242B1 (de) * | 2004-11-25 | 2008-07-30 | Gefran S.p.A. | Drucksensor mit Kompensation der Gehäusewärmeausdehnung |
| US7313965B2 (en) * | 2004-12-27 | 2008-01-01 | General Electric Company | High-temperature pressure sensor |
| US7181972B2 (en) * | 2004-12-27 | 2007-02-27 | General Electric Company | Static and dynamic pressure sensor |
| US7866964B2 (en) * | 2005-05-20 | 2011-01-11 | Emerson Climate Technologies, Inc. | Sensor for hermetic machine |
| DE602005021557D1 (de) * | 2005-10-10 | 2010-07-08 | Gefran Spa | Drucksensor |
| US7284444B2 (en) * | 2005-12-30 | 2007-10-23 | Kulite Semiconductor Products, Inc. | Hermetically sealed displacement sensor apparatus |
| US8302496B2 (en) * | 2006-06-03 | 2012-11-06 | Eldon James Corporation | Universal sensor fitting for process applications |
| JP2008064529A (ja) * | 2006-09-06 | 2008-03-21 | Denso Corp | 圧力センサ |
| US8262372B2 (en) | 2007-05-10 | 2012-09-11 | Emerson Climate Technologies, Inc. | Compressor hermetic terminal |
| US7516675B2 (en) * | 2007-07-03 | 2009-04-14 | Kulite Semiconductor Products, Inc. | Joystick sensor apparatus |
| US8939734B2 (en) * | 2007-08-28 | 2015-01-27 | Emerson Climate Technologies, Inc. | Molded plug for a compressor |
| US8020448B2 (en) * | 2008-10-21 | 2011-09-20 | GM Global Technology Operations LLC | Pressure sensor with nonlinear characteristic curve |
| DE102008043517B4 (de) * | 2008-11-06 | 2022-03-03 | Robert Bosch Gmbh | Sensormodul und Verfahren zur Herstellung eines Sensormoduls |
| US8939735B2 (en) * | 2009-03-27 | 2015-01-27 | Emerson Climate Technologies, Inc. | Compressor plug assembly |
| DE102009026436A1 (de) * | 2009-05-25 | 2010-12-09 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Brennraumdrucks einer Brennkraftmaschine |
| DE102009022539A1 (de) * | 2009-05-25 | 2010-12-02 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Brennraumdrucks einer Brennkraftmaschine |
| US8276458B2 (en) * | 2010-07-12 | 2012-10-02 | Rosemount Inc. | Transmitter output with scalable rangeability |
| DE102011017667A1 (de) * | 2011-04-28 | 2012-10-31 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Drucks, insbesondere eines Brennraumdrucks einer Brennkraftmaschine |
| DE102011017647A1 (de) * | 2011-04-28 | 2012-10-31 | Robert Bosch Gmbh | Vorrichtung zur Erfassung eines Drucks, insbesondere eines Brennraumdrucks einer Brennkraftmaschine |
| US9480177B2 (en) | 2012-07-27 | 2016-10-25 | Emerson Climate Technologies, Inc. | Compressor protection module |
| WO2015066310A1 (en) * | 2013-10-30 | 2015-05-07 | Lime Instruments Llc | Sensor assembly for measuring dynamic pressure in reciprocating pumps |
| JP6318605B2 (ja) * | 2013-12-20 | 2018-05-09 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
| DE102015117736A1 (de) * | 2015-10-19 | 2017-04-20 | Endress+Hauser Gmbh+Co. Kg | Druckmesseinrichtung |
| EP3421961B1 (de) | 2016-02-25 | 2022-07-27 | Citizen Finedevice Co., Ltd. | Druckerfassungsvorrichtung und druckerfassungssystem |
| JP6499601B2 (ja) * | 2016-02-25 | 2019-04-10 | シチズンファインデバイス株式会社 | 検出装置および検出システム |
| JP6602740B2 (ja) * | 2016-10-26 | 2019-11-06 | 日本特殊陶業株式会社 | 圧力センサ |
| JP6845756B2 (ja) * | 2017-06-29 | 2021-03-24 | シチズンファインデバイス株式会社 | 圧力検出装置 |
| EP3470809B1 (de) * | 2017-10-16 | 2020-07-15 | Kistler Holding AG | Drucksensor für ein metall- oder kunststoffverarbeitungswerkzeug |
| WO2021126261A1 (en) * | 2019-12-20 | 2021-06-24 | Vishay Measurements Group, Inc. | Strain gages and methods for manufacturing thereof |
| JP6948491B1 (ja) * | 2020-03-09 | 2021-10-13 | シチズンファインデバイス株式会社 | 圧力検出装置、回路内蔵部材 |
Family Cites Families (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4016437A (en) | 1971-03-15 | 1977-04-05 | Kistler Instrumente Ag | Piezoelectric pressure and force transducers or accelerometers |
| CH536561A (de) | 1971-03-15 | 1973-04-30 | Kistler Instrumente Ag | Piezoelektrisches Kristallelement |
| CH573592A5 (de) | 1974-05-03 | 1976-03-15 | Kistler Instrumente Ag | |
| CH587478A5 (de) | 1974-11-08 | 1977-04-29 | Kistler Instrumente Ag | |
| CH582353A5 (de) | 1974-11-08 | 1976-11-30 | Kistler Instrumente Ag | |
| US4127840A (en) | 1977-02-22 | 1978-11-28 | Conrac Corporation | Solid state force transducer |
| DE2855746C3 (de) | 1978-12-22 | 1981-07-30 | Kistler Instrumente Ag, Winterthur | Piezoelektrischer Dehnungsaufnehmer |
| DE2906407C2 (de) | 1979-02-20 | 1981-02-26 | Kistler Instrumente Ag, Winterthur (Schweiz) | Piezoelektrisches Wandlerelement zum Einbau in Druck-, Kraft- oder Beschleunigungsaufnehmer |
| CH644227A5 (de) | 1979-09-14 | 1984-07-13 | Kistler Instrumente Ag | Piezoelektrisches kristallelement fuer messwandler. |
| DE3021778C2 (de) | 1980-06-10 | 1982-11-18 | Kistler Instrumente Ag, Winterthur | Kraftaufnehmer, insbesondere für ballistische Druckmessungen |
| DE3275009D1 (en) * | 1982-04-06 | 1987-02-12 | Kistler Instrumente Ag | High-pressure detector |
| EP0090872B1 (de) | 1982-04-06 | 1986-01-15 | Kistler Instrumente AG | Hochdruckaufnehmer |
| US4570097A (en) | 1984-10-26 | 1986-02-11 | Texas Instruments Incorporated | Electrical connections for a piezoelectric pressure transmitter for an internal combustion engine |
| US4645965A (en) | 1984-10-26 | 1987-02-24 | Texas Instruments Incorporated | Cylinder pressure transmitter for an internal combustion engine |
| US4680972A (en) | 1985-01-07 | 1987-07-21 | Dynisco, Inc. | Pressure transducer |
| US4829827A (en) | 1985-01-07 | 1989-05-16 | Dynisco, Inc. | Pressure transducer |
| US4819487A (en) | 1985-01-07 | 1989-04-11 | Dynisco, Inc. | High pressure transducer |
| US4679438A (en) | 1985-01-07 | 1987-07-14 | Dynisco, Inc. | High pressure transducer |
| US4858471A (en) | 1985-11-14 | 1989-08-22 | Dynisco, Inc. | Pressure transducer |
| EP0230491B1 (de) | 1986-01-22 | 1989-05-03 | Kristal Instrumente AG | Aufnehmer, insbesondere für Hochdruckmessungen |
| US4683757A (en) | 1986-03-24 | 1987-08-04 | Motorola, Inc. | Axial pressure sensor |
| US4702113A (en) | 1986-04-04 | 1987-10-27 | Dynisco, Inc. | Pressure transducer |
| US4712430A (en) | 1986-04-04 | 1987-12-15 | Dynisco, Inc. | Pressure transducer |
| EP0260337B1 (de) | 1986-09-18 | 1989-06-28 | Kistler Instrumente AG | Kraftmessvorrichtung mit einem elektromechanischen Wandler |
| EP0283524B1 (de) | 1987-02-11 | 1991-05-02 | Kistler Instrumente AG | Verfahren und Anordnung zum Messen von Drücken in rohrförmigen Körpern |
| EP0325674A1 (de) | 1988-01-29 | 1989-08-02 | Kistler Instrumente AG | Wandlerelement zur Messung einer Drehbeschleunigung |
| DE3811311C1 (de) | 1988-04-02 | 1989-03-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
| US4994781A (en) | 1988-04-07 | 1991-02-19 | Sahagen Armen N | Pressure sensing transducer employing piezoresistive elements on sapphire |
| EP0342253B1 (de) | 1988-05-18 | 1993-01-13 | Kistler Instrumente AG | Kraftaufnehmer zum Einbau in Messplattformen |
| DE3823673A1 (de) | 1988-07-13 | 1990-01-18 | Philips Patentverwaltung | Druck- bzw. kraftaufnehmer mit einer axialsymmetrischen, druck- bzw. kraftaufnehmenden kreisplattenfeder |
| US4993266A (en) | 1988-07-26 | 1991-02-19 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Semiconductor pressure transducer |
| DE8903667U1 (de) | 1989-03-23 | 1989-05-11 | Kistler Instrumente Ag, Winterthur | Hochdruckaufnehmer |
| USRE34441E (en) | 1989-03-30 | 1993-11-16 | AVL Gesellschaft fur Verbrennungskraftmaschinen und Messtechnik m.b.H. Prof.Dr.Dr.h.c. Hans List | Pressure sensor |
| AT394112B (de) * | 1989-03-30 | 1992-02-10 | Avl Verbrennungskraft Messtech | Druckaufnehmer |
| US5181417A (en) * | 1989-07-10 | 1993-01-26 | Nippon Soken, Inc. | Pressure detecting device |
| JPH03148028A (ja) | 1989-11-02 | 1991-06-24 | Matsushita Electric Ind Co Ltd | 圧電型圧力センサ |
| TW221491B (de) | 1990-03-16 | 1994-03-01 | Matsushita Electric Industrial Co Ltd | |
| US5088329A (en) | 1990-05-07 | 1992-02-18 | Sahagen Armen N | Piezoresistive pressure transducer |
| DE4103706A1 (de) | 1990-07-18 | 1992-01-30 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
| DE4103705A1 (de) | 1990-07-18 | 1992-01-23 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
| DE4103704A1 (de) | 1990-07-18 | 1992-01-23 | Bosch Gmbh Robert | Druckgeber zur druckerfassung im brennraum von brennkraftmaschinen |
| JPH04131722A (ja) | 1990-09-21 | 1992-05-06 | Toyota Motor Corp | 圧力センサ及び圧力センサの製造方法 |
| US5209119A (en) | 1990-12-12 | 1993-05-11 | Regents Of The University Of Minnesota | Microdevice for sensing a force |
| US5186055A (en) | 1991-06-03 | 1993-02-16 | Eaton Corporation | Hermetic mounting system for a pressure transducer |
| IL106790A (en) | 1992-09-01 | 1996-08-04 | Rosemount Inc | A capacitive pressure sensation consisting of the bracket and the process of creating it |
| US5347841A (en) | 1992-09-14 | 1994-09-20 | Kistler Instrument Corporation | Self-testing transducer curcuit |
| US5360331A (en) | 1993-01-05 | 1994-11-01 | Dynisco, Inc. | Injection molding machine pressure transducer |
| US5461922A (en) | 1993-07-27 | 1995-10-31 | Lucas-Novasensor | Pressure sensor isolated within housing having integral diaphragm and method of making same |
| US5583295A (en) | 1994-03-14 | 1996-12-10 | Nippondenso Co., Ltd. | Pressure sensor having gauge resistors and temperature compensating resistors on the same surface |
| US5602339A (en) | 1994-03-24 | 1997-02-11 | Dynisco, Inc. | Injection molding machine pressure transducer with trapezoidal cavity |
| CA2217754A1 (en) | 1995-04-28 | 1996-10-31 | Rosemount Inc. | Mounting assembly for a pressure transmitter |
| US5703296A (en) | 1995-06-27 | 1997-12-30 | Delco Electronics Corp. | Pressure sensor having reduced hysteresis and enhanced electrical performance at low pressures |
| JPH09222372A (ja) * | 1996-02-19 | 1997-08-26 | Mitsubishi Electric Corp | 半導体式センサ |
| US6487898B1 (en) | 1997-01-28 | 2002-12-03 | Eaton Corporation | Engine cylinder pressure sensor with thermal compensation element |
| US5824910A (en) * | 1997-04-16 | 1998-10-20 | The United States Of America As Represented By The Secretary Of The Navy | Miniature hydrostat fabricated using multiple microelectromechanical processes |
| JPH11201846A (ja) * | 1998-01-12 | 1999-07-30 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
| CH693490A5 (de) | 1998-07-14 | 2003-08-29 | Kk Holding Ag | Hochdruck-Sensor. |
| US6229190B1 (en) * | 1998-12-18 | 2001-05-08 | Maxim Integrated Products, Inc. | Compensated semiconductor pressure sensor |
| US6508129B1 (en) * | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
| US6550337B1 (en) * | 2000-01-19 | 2003-04-22 | Measurement Specialties, Inc. | Isolation technique for pressure sensing structure |
| DE10238720A1 (de) | 2002-08-23 | 2004-03-11 | Robert Bosch Gmbh | Vorrichtung zur Messung einer Kraft, Vorrichtung zur Messung eines Drucks und Drucksensor |
| EP1662242B1 (de) | 2004-11-25 | 2008-07-30 | Gefran S.p.A. | Drucksensor mit Kompensation der Gehäusewärmeausdehnung |
-
2003
- 2003-06-19 US US10/464,967 patent/US6923068B2/en not_active Expired - Lifetime
-
2004
- 2004-05-24 AT AT04753043T patent/ATE554376T1/de active
- 2004-05-24 CA CA2529471A patent/CA2529471C/en not_active Expired - Lifetime
- 2004-05-24 WO PCT/US2004/016145 patent/WO2005001408A2/en not_active Ceased
- 2004-05-24 EP EP04753043A patent/EP1639335B1/de not_active Expired - Lifetime
- 2004-12-29 US US11/024,573 patent/US7171857B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1639335B1 (de) | 2012-04-18 |
| CA2529471C (en) | 2016-05-10 |
| EP1639335A2 (de) | 2006-03-29 |
| WO2005001408A2 (en) | 2005-01-06 |
| US6923068B2 (en) | 2005-08-02 |
| CA2529471A1 (en) | 2005-01-06 |
| WO2005001408A3 (en) | 2005-03-24 |
| US7171857B2 (en) | 2007-02-06 |
| US20050150302A1 (en) | 2005-07-14 |
| US20040255683A1 (en) | 2004-12-23 |
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