ATE550669T1 - Verfahren zur herstellung eines sensitiven resonanzbalken-beschleunigungsmessers - Google Patents

Verfahren zur herstellung eines sensitiven resonanzbalken-beschleunigungsmessers

Info

Publication number
ATE550669T1
ATE550669T1 AT11151766T AT11151766T ATE550669T1 AT E550669 T1 ATE550669 T1 AT E550669T1 AT 11151766 T AT11151766 T AT 11151766T AT 11151766 T AT11151766 T AT 11151766T AT E550669 T1 ATE550669 T1 AT E550669T1
Authority
AT
Austria
Prior art keywords
proof mass
flexure
created
producing
bases
Prior art date
Application number
AT11151766T
Other languages
English (en)
Inventor
John S Starzynski
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE550669T1 publication Critical patent/ATE550669T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/4908—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
AT11151766T 2010-03-31 2011-01-21 Verfahren zur herstellung eines sensitiven resonanzbalken-beschleunigungsmessers ATE550669T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/751,157 US8176617B2 (en) 2010-03-31 2010-03-31 Methods for making a sensitive resonating beam accelerometer

Publications (1)

Publication Number Publication Date
ATE550669T1 true ATE550669T1 (de) 2012-04-15

Family

ID=43971430

Family Applications (1)

Application Number Title Priority Date Filing Date
AT11151766T ATE550669T1 (de) 2010-03-31 2011-01-21 Verfahren zur herstellung eines sensitiven resonanzbalken-beschleunigungsmessers

Country Status (3)

Country Link
US (3) US8176617B2 (de)
EP (1) EP2372375B1 (de)
AT (1) ATE550669T1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
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US8176617B2 (en) 2010-03-31 2012-05-15 Honeywell International Inc. Methods for making a sensitive resonating beam accelerometer
JP6070056B2 (ja) * 2012-10-24 2017-02-01 セイコーエプソン株式会社 物理量検出デバイス、物理量検出器、電子機器、及び移動体
US9712131B2 (en) * 2015-09-15 2017-07-18 Karl L. Thorup High isolation power combiner/splitter and coupler
CN105866470A (zh) * 2016-05-05 2016-08-17 中国工程物理研究院电子工程研究所 一种一体式石英双振梁加速度计
CN107478862B (zh) * 2017-07-12 2020-05-12 北京遥测技术研究所 一种基于金金键合的石英振梁加速度计敏感芯片
CN108152534B (zh) * 2017-12-26 2020-08-25 东南大学 具有自检功能的石英振梁加速度计及其制作与自检方法
US10732195B2 (en) 2018-01-26 2020-08-04 Honeywell International Inc. Vibrating beam accelerometer
US11634317B2 (en) * 2018-04-24 2023-04-25 Kionix, Inc. Composite spring for robust piezoelectric sensing
US10859596B2 (en) * 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer
CN111650400B (zh) * 2020-06-03 2021-05-14 西安交通大学 一种小型化侧面贴装差动型集成式谐振加速度计
CN113433345B (zh) * 2021-05-13 2022-12-20 西安航天精密机电研究所 一种集成摆式石英谐振加速度计结构及其装配方法
US20230364715A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Selective laser etching quartz resonators
US20230366909A1 (en) * 2022-05-13 2023-11-16 Honeywell International Inc. Vibrating beam accelerometer

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FR2627592B1 (fr) 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4901570A (en) * 1988-11-21 1990-02-20 General Motors Corporation Resonant-bridge two axis microaccelerometer
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
US5315874A (en) * 1989-02-28 1994-05-31 The Charles Stark Draper Laboratories Monolithic quartz resonator accelerometer
US5115291A (en) * 1989-07-27 1992-05-19 Honeywell Inc. Electrostatic silicon accelerometer
US5176031A (en) * 1990-11-05 1993-01-05 Sundstrand Corporation Viscously coupled dual beam accelerometer
US5668057A (en) 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
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US5596145A (en) * 1994-09-29 1997-01-21 Alliedsignal Inc. Monolithic resonator for vibrating beam force sensors
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US5894090A (en) * 1996-05-31 1999-04-13 California Institute Of Technology Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
US6032531A (en) * 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
US6232150B1 (en) * 1998-12-03 2001-05-15 The Regents Of The University Of Michigan Process for making microstructures and microstructures made thereby
US6367786B1 (en) * 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
US6553836B2 (en) * 2000-07-21 2003-04-29 John T. Williams Surface acoustic wave (SAW) accelerometer
US7381630B2 (en) 2001-01-02 2008-06-03 The Charles Stark Draper Laboratory, Inc. Method for integrating MEMS device and interposer
US6595054B2 (en) * 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
FR2834283B1 (fr) * 2001-12-28 2005-06-24 Commissariat Energie Atomique Procede et zone de scellement entre deux substrats d'une microstructure
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US8485032B2 (en) * 2011-03-14 2013-07-16 Honeywell International Inc. Methods and apparatus for improving performance of an accelerometer

Also Published As

Publication number Publication date
EP2372375A1 (de) 2011-10-05
US20120227495A1 (en) 2012-09-13
US9784758B2 (en) 2017-10-10
US9009947B2 (en) 2015-04-21
US8176617B2 (en) 2012-05-15
EP2372375B1 (de) 2012-03-21
US20110239440A1 (en) 2011-10-06
US20150268267A1 (en) 2015-09-24

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