ATE548129T1 - Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf - Google Patents

Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf

Info

Publication number
ATE548129T1
ATE548129T1 AT07765981T AT07765981T ATE548129T1 AT E548129 T1 ATE548129 T1 AT E548129T1 AT 07765981 T AT07765981 T AT 07765981T AT 07765981 T AT07765981 T AT 07765981T AT E548129 T1 ATE548129 T1 AT E548129T1
Authority
AT
Austria
Prior art keywords
vacuum circuit
containers
machine
plasma treatment
integrated vacuum
Prior art date
Application number
AT07765981T
Other languages
English (en)
Inventor
Jean-Michel Rius
Original Assignee
Sidel Participations
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidel Participations filed Critical Sidel Participations
Application granted granted Critical
Publication of ATE548129T1 publication Critical patent/ATE548129T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/227—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Drying Of Semiconductors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Discharge Heating (AREA)
  • Treatment Of Fiber Materials (AREA)
AT07765981T 2006-06-08 2007-06-07 Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf ATE548129T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0605089A FR2902027B1 (fr) 2006-06-08 2006-06-08 Machine de traitement de recipients par plasma, comprenant un circuit de vide embarque
PCT/FR2007/000938 WO2007141426A2 (fr) 2006-06-08 2007-06-07 Machine de traitement de récipients par plasma, comprenant un circuit de vide embarqué

Publications (1)

Publication Number Publication Date
ATE548129T1 true ATE548129T1 (de) 2012-03-15

Family

ID=37835289

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07765981T ATE548129T1 (de) 2006-06-08 2007-06-07 Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf

Country Status (7)

Country Link
US (1) US9279180B2 (de)
EP (1) EP2024104B1 (de)
JP (1) JP5089686B2 (de)
CN (1) CN101460259A (de)
AT (1) ATE548129T1 (de)
FR (1) FR2902027B1 (de)
WO (1) WO2007141426A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111370286A (zh) * 2020-03-24 2020-07-03 中国科学院近代物理研究所 一种用于治疗装备的等离子体源及其使用方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3035881B1 (fr) * 2015-05-04 2019-09-27 Sidel Participations Installation pour le traitement de recipients par plasma micro-ondes, comprenant un generateur a etat solide
FR3093665A1 (fr) 2019-03-15 2020-09-18 Sidel Participations Machine de traitement de récipients par plasma et procédé de contrôle de la machine de traitement
KR102421985B1 (ko) * 2020-01-23 2022-07-18 주식회사 히타치하이테크 플라스마 처리 장치 및 플라스마 처리 장치의 운전 방법
CA3176927A1 (en) * 2020-03-25 2021-09-30 Suntory Holdings Limited Atmospheric pressure remote plasma cvd device, film formation method, and plastic bottle manufacturing method
DE102021120056A1 (de) * 2021-08-02 2023-02-02 Khs Gmbh Verfahren zum Beschichten von Behältern aus Kunststoff
CN115855361A (zh) * 2022-12-06 2023-03-28 中国原子能科学研究院 压力测量装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4866640A (en) * 1987-08-20 1989-09-12 Granville-Phillips Company Temperature compensation for pressure gauge
JP2826409B2 (ja) * 1992-03-19 1998-11-18 山口日本電気株式会社 ドライエッチング装置
US5308649A (en) * 1992-06-26 1994-05-03 Polar Materials, Inc. Methods for externally treating a container with application of internal bias gas
JPH10308383A (ja) * 1997-05-06 1998-11-17 Sony Corp 真空処理装置及び真空処理装置の駆動方法
US5808176A (en) * 1997-06-03 1998-09-15 Vanguard International Semiconductor Corporation Solving production downtime with parallel low pressure sensors
SE9900077D0 (sv) * 1999-01-14 1999-01-14 Gambro Ab Verfahren und Vorrichtung zum Uberprüfen von Sensoren
JP3490397B2 (ja) * 1999-01-11 2004-01-26 ベクトン・ディキンソン・アンド・カンパニー 殺菌圧力変換器のための隔離された校正アダプタ
FR2847912B1 (fr) * 2002-11-28 2005-02-18 Sidel Sa Procede et dispositif pour deposer par plasma micro-ondes un revetement sur une face d'un recipient en materiau thermoplastique
JP4437647B2 (ja) * 2003-07-17 2010-03-24 三菱商事プラスチック株式会社 ガスバリア膜コーティングプラスチック容器の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111370286A (zh) * 2020-03-24 2020-07-03 中国科学院近代物理研究所 一种用于治疗装备的等离子体源及其使用方法

Also Published As

Publication number Publication date
JP5089686B2 (ja) 2012-12-05
CN101460259A (zh) 2009-06-17
WO2007141426A3 (fr) 2008-03-20
US20110252861A1 (en) 2011-10-20
US9279180B2 (en) 2016-03-08
FR2902027A1 (fr) 2007-12-14
JP2009540117A (ja) 2009-11-19
EP2024104A2 (de) 2009-02-18
WO2007141426A2 (fr) 2007-12-13
EP2024104B1 (de) 2012-03-07
FR2902027B1 (fr) 2008-12-05

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