ATE548129T1 - Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf - Google Patents
Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislaufInfo
- Publication number
- ATE548129T1 ATE548129T1 AT07765981T AT07765981T ATE548129T1 AT E548129 T1 ATE548129 T1 AT E548129T1 AT 07765981 T AT07765981 T AT 07765981T AT 07765981 T AT07765981 T AT 07765981T AT E548129 T1 ATE548129 T1 AT E548129T1
- Authority
- AT
- Austria
- Prior art keywords
- vacuum circuit
- containers
- machine
- plasma treatment
- integrated vacuum
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
- B05D7/227—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Measuring Fluid Pressure (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Discharge Heating (AREA)
- Treatment Of Fiber Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0605089A FR2902027B1 (fr) | 2006-06-08 | 2006-06-08 | Machine de traitement de recipients par plasma, comprenant un circuit de vide embarque |
PCT/FR2007/000938 WO2007141426A2 (fr) | 2006-06-08 | 2007-06-07 | Machine de traitement de récipients par plasma, comprenant un circuit de vide embarqué |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE548129T1 true ATE548129T1 (de) | 2012-03-15 |
Family
ID=37835289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07765981T ATE548129T1 (de) | 2006-06-08 | 2007-06-07 | Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf |
Country Status (7)
Country | Link |
---|---|
US (1) | US9279180B2 (de) |
EP (1) | EP2024104B1 (de) |
JP (1) | JP5089686B2 (de) |
CN (1) | CN101460259A (de) |
AT (1) | ATE548129T1 (de) |
FR (1) | FR2902027B1 (de) |
WO (1) | WO2007141426A2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111370286A (zh) * | 2020-03-24 | 2020-07-03 | 中国科学院近代物理研究所 | 一种用于治疗装备的等离子体源及其使用方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3035881B1 (fr) * | 2015-05-04 | 2019-09-27 | Sidel Participations | Installation pour le traitement de recipients par plasma micro-ondes, comprenant un generateur a etat solide |
FR3093665A1 (fr) | 2019-03-15 | 2020-09-18 | Sidel Participations | Machine de traitement de récipients par plasma et procédé de contrôle de la machine de traitement |
US11244803B2 (en) * | 2020-01-23 | 2022-02-08 | Hitachi High-Tech Corporation | Plasma processing apparatus and operating method of plasma processing apparatus |
DE102021120056A1 (de) * | 2021-08-02 | 2023-02-02 | Khs Gmbh | Verfahren zum Beschichten von Behältern aus Kunststoff |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4866640A (en) * | 1987-08-20 | 1989-09-12 | Granville-Phillips Company | Temperature compensation for pressure gauge |
JP2826409B2 (ja) * | 1992-03-19 | 1998-11-18 | 山口日本電気株式会社 | ドライエッチング装置 |
US5308649A (en) * | 1992-06-26 | 1994-05-03 | Polar Materials, Inc. | Methods for externally treating a container with application of internal bias gas |
JPH10308383A (ja) * | 1997-05-06 | 1998-11-17 | Sony Corp | 真空処理装置及び真空処理装置の駆動方法 |
US5808204A (en) * | 1997-06-03 | 1998-09-15 | Vanguard International Semiconductor Corporation | Solving production downtime with parallel low pressure sensors |
SE9900077D0 (sv) * | 1999-01-14 | 1999-01-14 | Gambro Ab | Verfahren und Vorrichtung zum Uberprüfen von Sensoren |
WO2000042407A1 (en) * | 1999-01-11 | 2000-07-20 | Becton, Dickinson And Company | Isolated calibration adapter for sterile pressure transducer |
FR2847912B1 (fr) | 2002-11-28 | 2005-02-18 | Sidel Sa | Procede et dispositif pour deposer par plasma micro-ondes un revetement sur une face d'un recipient en materiau thermoplastique |
JP4437647B2 (ja) * | 2003-07-17 | 2010-03-24 | 三菱商事プラスチック株式会社 | ガスバリア膜コーティングプラスチック容器の製造方法 |
-
2006
- 2006-06-08 FR FR0605089A patent/FR2902027B1/fr not_active Expired - Fee Related
-
2007
- 2007-06-07 WO PCT/FR2007/000938 patent/WO2007141426A2/fr active Application Filing
- 2007-06-07 AT AT07765981T patent/ATE548129T1/de active
- 2007-06-07 CN CNA2007800208864A patent/CN101460259A/zh active Pending
- 2007-06-07 JP JP2009513728A patent/JP5089686B2/ja not_active Expired - Fee Related
- 2007-06-07 US US12/303,871 patent/US9279180B2/en not_active Expired - Fee Related
- 2007-06-07 EP EP07765981A patent/EP2024104B1/de not_active Not-in-force
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111370286A (zh) * | 2020-03-24 | 2020-07-03 | 中国科学院近代物理研究所 | 一种用于治疗装备的等离子体源及其使用方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2007141426A3 (fr) | 2008-03-20 |
WO2007141426A2 (fr) | 2007-12-13 |
EP2024104B1 (de) | 2012-03-07 |
JP5089686B2 (ja) | 2012-12-05 |
CN101460259A (zh) | 2009-06-17 |
FR2902027B1 (fr) | 2008-12-05 |
JP2009540117A (ja) | 2009-11-19 |
FR2902027A1 (fr) | 2007-12-14 |
EP2024104A2 (de) | 2009-02-18 |
US20110252861A1 (en) | 2011-10-20 |
US9279180B2 (en) | 2016-03-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG169982A1 (en) | Plasma processing reactor with multiple capacitive and inductive power sources | |
ATE548129T1 (de) | Maschine zur plasmabehandlung von behältern mit einem integrierten vakuumkreislauf | |
WO2012057967A3 (en) | Methods and apparatus for controlling photoresist line width roughness | |
MY162680A (en) | Laminating apparatus | |
CA119282S (en) | Vessel for liquids | |
TW200802591A (en) | Integrated capacitive and inductive power sources for a plasma etching chamber | |
WO2009006072A3 (en) | Methods and arrangements for plasma processing system with tunable capacitance | |
ATE301413T1 (de) | Kaffeemühle sowie kaffeeautomat mit einer kaffeemühle | |
MX337305B (es) | Dispositivo de administracion de medicamentos provisto de un sistema de circuitos electronicos. | |
CR20130341A (es) | Inhibidores de serina proteasa de hepatitis c a base de macrocíclicos de fenantridina | |
WO2007044248A3 (en) | Low-voltage inductively coupled source for plasma processing | |
WO2011062512A9 (en) | Pressure sealing method for headspace modification | |
WO2011062940A3 (en) | Large area plasma processing chamber with at-electrode rf matching | |
WO2011023631A3 (en) | Medicament container | |
GB2470856A (en) | Tampon package and method for making the same | |
MX2009008471A (es) | Proceso para tratar sustancias contaminadas con metales pesados. | |
GEP20104907B (en) | Process for production of silicon tetrafluoride, and apparatus for the process | |
MY185120A (en) | Peri-implantitis therapy device | |
TW200603596A (en) | User cognitive electronic device | |
WO2012087919A3 (en) | Methods and apparatus for gas delivery into plasma processing chambers | |
WO2011078628A3 (en) | Heat treatment container for vacuum heat treatment apparatus | |
WO2006127037A3 (en) | Atmospheric pressure processing using microwave-generated plasmas | |
MX2009004005A (es) | Dispositivo con doble sello para una maquina de tratamiento con plasma de recipientes. | |
WO2008090951A1 (ja) | 天板部材及びこれを用いたプラズマ処理装置 | |
ATE554682T1 (de) | Kessel zur wärmebehandlung |