ATE544160T1 - Partikelstrahltransportgerät und verfahren für den transport eines partikelstrahls mit kleiner strahlfleckgrösse - Google Patents
Partikelstrahltransportgerät und verfahren für den transport eines partikelstrahls mit kleiner strahlfleckgrösseInfo
- Publication number
- ATE544160T1 ATE544160T1 AT08804827T AT08804827T ATE544160T1 AT E544160 T1 ATE544160 T1 AT E544160T1 AT 08804827 T AT08804827 T AT 08804827T AT 08804827 T AT08804827 T AT 08804827T AT E544160 T1 ATE544160 T1 AT E544160T1
- Authority
- AT
- Austria
- Prior art keywords
- particle beam
- transporting
- transport device
- spot size
- small
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/087—Particle radiation, e.g. electron-beam, alpha or beta radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1042—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy with spatial modulation of the radiation beam within the treatment head
- A61N5/1043—Scanning the radiation beam, e.g. spot scanning or raster scanning
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
- A61L2202/10—Apparatus features
- A61L2202/12—Apparatus for isolating biocidal substances from the environment
- A61L2202/122—Chambers for sterilisation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N2005/1085—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy characterised by the type of particles applied to the patient
- A61N2005/1087—Ions; Protons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/103—Lenses characterised by lens type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/12—Lenses electrostatic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3005—Observing the objects or the point of impact on the object
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Epidemiology (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Particle Accelerators (AREA)
- Radiation-Therapy Devices (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2007/060235 WO2009039884A1 (en) | 2007-09-26 | 2007-09-26 | Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
PCT/EP2008/062955 WO2009040424A1 (en) | 2007-09-26 | 2008-09-26 | Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE544160T1 true ATE544160T1 (de) | 2012-02-15 |
Family
ID=39627380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08804827T ATE544160T1 (de) | 2007-09-26 | 2008-09-26 | Partikelstrahltransportgerät und verfahren für den transport eines partikelstrahls mit kleiner strahlfleckgrösse |
Country Status (5)
Country | Link |
---|---|
US (2) | US8946659B2 (de) |
JP (1) | JP5336496B2 (de) |
CN (1) | CN101896980B (de) |
AT (1) | ATE544160T1 (de) |
WO (2) | WO2009039884A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102695544B (zh) | 2009-10-23 | 2016-05-11 | 离子束应用公司 | 用于粒子治疗的包括束分析仪的机架 |
WO2011056370A1 (en) * | 2009-10-28 | 2011-05-12 | Iwatt Inc. | Low power consumption start-up circuit with dynamic switching |
US20200227227A1 (en) * | 2010-04-16 | 2020-07-16 | Vladimir Balakin | Charged particle cancer therapy and patient positioning method and apparatus |
CN102456423B (zh) * | 2010-10-18 | 2016-08-03 | 中国科学院高能物理研究所 | 车载式移动辐照设备 |
CN102647849A (zh) * | 2012-05-04 | 2012-08-22 | 哈尔滨工程大学 | 一机两用电子直线加速器及电子直线加速器的一机两用方法 |
WO2015066246A1 (en) | 2013-10-29 | 2015-05-07 | Varian Medical Systems, Inc. | X-ray tube having planar emitter with tunable emission characteristics and magnetic steering and focusing |
US10008359B2 (en) * | 2015-03-09 | 2018-06-26 | Varex Imaging Corporation | X-ray tube having magnetic quadrupoles for focusing and magnetic dipoles for steering |
JP6324223B2 (ja) | 2014-06-09 | 2018-05-16 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置及びイオン注入方法 |
EP3024306B1 (de) * | 2014-11-19 | 2019-08-07 | Ion Beam Applications S.A. | Hochstromzyklotron |
US9812282B2 (en) * | 2015-11-26 | 2017-11-07 | Mevex Corporation | System and method for irradiating a product |
WO2017156419A1 (en) * | 2016-03-10 | 2017-09-14 | William Beaumont Hospital | Particle arc therapy |
JP7271425B2 (ja) | 2016-09-09 | 2023-05-11 | ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | 照射電子ビームの磁気制御用の装置および方法 |
CN107018619B (zh) * | 2017-05-12 | 2018-05-11 | 合肥中科离子医学技术装备有限公司 | 一种紧凑型质子束流能量和能散度控制结构 |
EP3421088A1 (de) * | 2017-06-30 | 2019-01-02 | RaySearch Laboratories AB | Bestimmung einer verteilung von spots von varying grössen für ion beam therapie basiert auf benutzerkonfiguration |
RU2676757C1 (ru) * | 2018-03-12 | 2019-01-11 | Объединенный Институт Ядерных Исследований (Оияи) | Устройство для вывода заряженных частиц из циклического ускорителя |
US10864384B2 (en) * | 2019-03-29 | 2020-12-15 | Varian Medical Systems Particle Therapy Gmbh | Non-achromatic compact gantry |
US11524179B2 (en) * | 2019-08-30 | 2022-12-13 | Tae Technologies, Inc. | Systems, devices, and methods for high quality ion beam formation |
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US5672879A (en) * | 1995-06-12 | 1997-09-30 | Glavish; Hilton F. | System and method for producing superimposed static and time-varying magnetic fields |
JP3567749B2 (ja) * | 1998-07-22 | 2004-09-22 | 日新電機株式会社 | 荷電粒子ビームの分布測定方法およびそれに関連する方法 |
US6465965B2 (en) * | 1998-07-23 | 2002-10-15 | Lawrence Nelson | Method and system for energy conversion using a screened-free-electron source |
US6353511B1 (en) * | 1999-06-15 | 2002-03-05 | Read-Rite Corporation | Thin film write head for improved high speed and high density recording |
DE60134922D1 (de) * | 2000-08-14 | 2008-09-04 | Elith Llc | Lithographischer Apparat |
JP2004524527A (ja) * | 2001-02-06 | 2004-08-12 | ジー エス アイ ゲゼルシャフト フュア シュベールイオーネンフォルシュンク エム ベー ハー | 重イオン癌治療施設における高エネルギーイオンビームの輸送および送出のためガントリシステム |
JP2004518978A (ja) * | 2001-02-06 | 2004-06-24 | ジー エス アイ ゲゼルシャフト フュア シュベールイオーネンフォルシュンク エム ベー ハー | 重イオンガントリー用ビーム走査システム |
CA2473176A1 (en) * | 2002-01-09 | 2003-07-24 | Trustees Of Boston University | Apparatus and method for ion cyclotron resonance mass spectrometry |
JP4749713B2 (ja) * | 2002-06-26 | 2011-08-17 | セムエキップ インコーポレイテッド | 水素化ホウ素クラスターイオンの注入によるイオン注入方法及び半導体製造方法 |
DE10232689A1 (de) | 2002-07-18 | 2004-02-05 | Leo Elektronenmikroskopie Gmbh | Mit Strahlen geladener Teilchen arbeitende Anwendungen |
EP1389797B1 (de) * | 2002-08-13 | 2008-10-08 | Carl Zeiss NTS GmbH | Teilchenoptischer Apparat und seine Verwendung als elektronenmikroskopisches System |
US7138629B2 (en) * | 2003-04-22 | 2006-11-21 | Ebara Corporation | Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
US6949895B2 (en) * | 2003-09-03 | 2005-09-27 | Axcelis Technologies, Inc. | Unipolar electrostatic quadrupole lens and switching methods for charged beam transport |
US6933511B2 (en) * | 2003-11-18 | 2005-08-23 | Atomic Energy Council Institute Of Nuclear Energy Research | Ion implanting apparatus |
JP4133883B2 (ja) * | 2003-12-04 | 2008-08-13 | 日新イオン機器株式会社 | イオンビーム装置 |
EP1584353A1 (de) * | 2004-04-05 | 2005-10-12 | Paul Scherrer Institut | System zur Protonentherapie |
US7462843B2 (en) * | 2004-05-18 | 2008-12-09 | Advanced Ion Bean Technology Inc. | Apparatus and methods for ion beam implantation |
US6903350B1 (en) * | 2004-06-10 | 2005-06-07 | Axcelis Technologies, Inc. | Ion beam scanning systems and methods for improved ion implantation uniformity |
DE202004009421U1 (de) * | 2004-06-16 | 2005-11-03 | Gesellschaft für Schwerionenforschung mbH | Teilchenbeschleuniger für die Strahlentherapie mit Ionenstrahlen |
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JP5373251B2 (ja) * | 2005-04-05 | 2013-12-18 | エフ イー アイ カンパニ | 収差補正手段を備える粒子光学装置 |
US7355188B2 (en) * | 2005-05-24 | 2008-04-08 | Varian Semiconductor Equipment Associates, Inc. | Technique for uniformity tuning in an ion implanter system |
CN101017864A (zh) * | 2006-02-08 | 2007-08-15 | 中国科学院半导体研究所 | 具有超薄碳化硅中间层的硅基可协变衬底及制备方法 |
CN101467217A (zh) * | 2006-06-13 | 2009-06-24 | 山米奎普公司 | 离子束设备和离子植入的方法 |
US7615763B2 (en) * | 2006-09-19 | 2009-11-10 | Axcelis Technologies, Inc. | System for magnetic scanning and correction of an ion beam |
-
2007
- 2007-09-26 WO PCT/EP2007/060235 patent/WO2009039884A1/en active Application Filing
-
2008
- 2008-09-26 US US12/680,158 patent/US8946659B2/en active Active
- 2008-09-26 WO PCT/EP2008/062955 patent/WO2009040424A1/en active Application Filing
- 2008-09-26 JP JP2010526310A patent/JP5336496B2/ja active Active
- 2008-09-26 AT AT08804827T patent/ATE544160T1/de active
- 2008-09-26 CN CN200880116751.2A patent/CN101896980B/zh active Active
-
2015
- 2015-01-12 US US14/594,852 patent/US9818573B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2009039884A1 (en) | 2009-04-02 |
JP2011501858A (ja) | 2011-01-13 |
WO2009040424A1 (en) | 2009-04-02 |
CN101896980A (zh) | 2010-11-24 |
JP5336496B2 (ja) | 2013-11-06 |
US8946659B2 (en) | 2015-02-03 |
US20110210263A1 (en) | 2011-09-01 |
CN101896980B (zh) | 2014-08-06 |
US20150123005A1 (en) | 2015-05-07 |
US9818573B2 (en) | 2017-11-14 |
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