ATE53907T1 - Oberflaechenmessung. - Google Patents

Oberflaechenmessung.

Info

Publication number
ATE53907T1
ATE53907T1 AT87300848T AT87300848T ATE53907T1 AT E53907 T1 ATE53907 T1 AT E53907T1 AT 87300848 T AT87300848 T AT 87300848T AT 87300848 T AT87300848 T AT 87300848T AT E53907 T1 ATE53907 T1 AT E53907T1
Authority
AT
Austria
Prior art keywords
sample
signals
moiré
scanned
light source
Prior art date
Application number
AT87300848T
Other languages
English (en)
Inventor
Paul John Dr Chandley
Barry Raymond Hill
Original Assignee
Pilkington Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington Plc filed Critical Pilkington Plc
Application granted granted Critical
Publication of ATE53907T1 publication Critical patent/ATE53907T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Optical Measuring Cells (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AT87300848T 1986-02-13 1987-01-30 Oberflaechenmessung. ATE53907T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB868603563A GB8603563D0 (en) 1986-02-13 1986-02-13 Surface measurement
EP87300848A EP0235941B1 (de) 1986-02-13 1987-01-30 Oberflächenmessung

Publications (1)

Publication Number Publication Date
ATE53907T1 true ATE53907T1 (de) 1990-06-15

Family

ID=10593000

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87300848T ATE53907T1 (de) 1986-02-13 1987-01-30 Oberflaechenmessung.

Country Status (5)

Country Link
EP (1) EP0235941B1 (de)
JP (1) JPS62197707A (de)
AT (1) ATE53907T1 (de)
DE (1) DE3762552D1 (de)
GB (2) GB8603563D0 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206699A (en) * 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
GB8826224D0 (en) * 1988-11-09 1988-12-14 Gersan Anstalt Sensing shape of object
CH693968A5 (de) * 1993-04-21 2004-05-14 Fraunhofer Ges Forschung Verfahren und Vorrichtung fuer die Topographiepruefung von Oberflaechen.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2076193A5 (de) * 1970-01-06 1971-10-15 Commissariat Energie Atomique
GB1521351A (en) * 1976-01-19 1978-08-16 Nat Res Dev Methods and apparatus for measuring variations in distance to a surface
US4158507A (en) * 1977-07-27 1979-06-19 Recognition Equipment Incorporated Laser measuring system for inspection
DE3173451D1 (en) * 1981-09-17 1986-02-20 Ibm Deutschland Method for interferometric surface topography
GB2146116B (en) * 1983-05-13 1986-09-17 Citizen Watch Co Ltd Surface condition measurement apparatus
DE3318678A1 (de) * 1983-05-21 1984-11-22 Adolf Friedrich Prof. Dr.-Phys. Fercher Verfahren und vorrichtung zur interferometrie rauher oberflaechen
FR2562236A1 (fr) * 1984-03-27 1985-10-04 Duret Francois Procede de reconnaissance tridimensionnelle de formes d'objets, tels que d'organes en medecine ou en chirurgie dentaire

Also Published As

Publication number Publication date
DE3762552D1 (de) 1990-06-07
GB8603563D0 (en) 1986-03-19
GB2186685A (en) 1987-08-19
EP0235941A1 (de) 1987-09-09
EP0235941B1 (de) 1990-05-02
GB2186685B (en) 1989-11-01
GB8702065D0 (en) 1987-03-04
JPS62197707A (ja) 1987-09-01

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties