ATE511700T1 - EXCIMER LAMPS - Google Patents

EXCIMER LAMPS

Info

Publication number
ATE511700T1
ATE511700T1 AT08017647T AT08017647T ATE511700T1 AT E511700 T1 ATE511700 T1 AT E511700T1 AT 08017647 T AT08017647 T AT 08017647T AT 08017647 T AT08017647 T AT 08017647T AT E511700 T1 ATE511700 T1 AT E511700T1
Authority
AT
Austria
Prior art keywords
alumina particles
discharge
particles
discharge vessel
silica
Prior art date
Application number
AT08017647T
Other languages
German (de)
Inventor
Shigeki Fujisawa
Yukihiro Morimoto
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Application granted granted Critical
Publication of ATE511700T1 publication Critical patent/ATE511700T1/en

Links

Landscapes

  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

The present invention avoids a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultravioletreflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.
AT08017647T 2007-10-10 2008-10-08 EXCIMER LAMPS ATE511700T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007264275 2007-10-10
JP2008177792A JP5092950B2 (en) 2007-10-10 2008-07-08 Excimer lamp

Publications (1)

Publication Number Publication Date
ATE511700T1 true ATE511700T1 (en) 2011-06-15

Family

ID=40572149

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08017647T ATE511700T1 (en) 2007-10-10 2008-10-08 EXCIMER LAMPS

Country Status (4)

Country Link
JP (1) JP5092950B2 (en)
CN (1) CN101409206B (en)
AT (1) ATE511700T1 (en)
TW (1) TWI399786B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5278648B2 (en) * 2007-12-11 2013-09-04 ウシオ電機株式会社 Excimer lamp
JP5293430B2 (en) * 2009-06-11 2013-09-18 ウシオ電機株式会社 Excimer lamp
CN105957799A (en) * 2016-06-23 2016-09-21 卜弘昊 High-power vacuum ultraviolet discharge lamp
CN105977131A (en) * 2016-06-23 2016-09-28 卜弘昊 High-frequency excitation medium electric-discharge lamp
CN106098531A (en) * 2016-06-23 2016-11-09 卜弘昊 A kind of narrow ripple ultraviolet source discharge lamp

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5263244A (en) * 1975-11-20 1977-05-25 Matsushita Electronics Corp Method of coating lighttscattering film onto inner surface of tube valve
JPS57172653A (en) * 1981-04-16 1982-10-23 Tokyo Shibaura Electric Co Method of forming scattering film of bulb
JPH09153344A (en) * 1995-11-30 1997-06-10 Toshiba Lighting & Technol Corp Fluorescent lamps and lighting devices
JP3580233B2 (en) * 2000-09-19 2004-10-20 ウシオ電機株式会社 Dielectric barrier discharge lamp device
US7563512B2 (en) * 2004-08-23 2009-07-21 Heraeus Quarzglas Gmbh & Co. Kg Component with a reflector layer and method for producing the same
TWM269431U (en) * 2004-11-11 2005-07-01 C Sun Mfg Ltd Structure of ultraviolet lamp tube with low infrared illumination
WO2006114988A1 (en) * 2005-04-22 2006-11-02 Hoya Candeo Optronics Corporation Excimer lamp
WO2007013602A1 (en) * 2005-07-29 2007-02-01 Gs Yuasa Corporation Ultraviolet lamp and ultraviolet irradiation device
JP4857939B2 (en) * 2006-06-19 2012-01-18 ウシオ電機株式会社 Discharge lamp
JP4788534B2 (en) * 2006-09-07 2011-10-05 ウシオ電機株式会社 Excimer lamp

Also Published As

Publication number Publication date
TWI399786B (en) 2013-06-21
CN101409206A (en) 2009-04-15
TW200917325A (en) 2009-04-16
CN101409206B (en) 2012-09-05
JP5092950B2 (en) 2012-12-05
JP2009110927A (en) 2009-05-21

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