ATE511700T1 - EXCIMER LAMPS - Google Patents
EXCIMER LAMPSInfo
- Publication number
- ATE511700T1 ATE511700T1 AT08017647T AT08017647T ATE511700T1 AT E511700 T1 ATE511700 T1 AT E511700T1 AT 08017647 T AT08017647 T AT 08017647T AT 08017647 T AT08017647 T AT 08017647T AT E511700 T1 ATE511700 T1 AT E511700T1
- Authority
- AT
- Austria
- Prior art keywords
- alumina particles
- discharge
- particles
- discharge vessel
- silica
- Prior art date
Links
Landscapes
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The present invention avoids a decline in the reflectivity of an ultraviolet reflection film caused by lighting for an extended period of time and providing a uniform illuminance an excimer lamp has a silica glass discharge vessel with electrodes on opposite sides of the discharge vessel, wherein excimer discharge is generated in the discharge space of the discharge vessel, wherein an ultravioletreflection film made of silica particles and alumina particles is formed on a surface exposed to the discharge space and wherein the mean particle diameter of silica particles is at least 0.67 times as large as the mean particle diameter of the alumina particles. The alumina particles in the ultraviolet reflection film preferably constitute at least 5 wt % and more preferably at least 10 wt % of the sum of silica particles and alumina particles.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007264275 | 2007-10-10 | ||
JP2008177792A JP5092950B2 (en) | 2007-10-10 | 2008-07-08 | Excimer lamp |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE511700T1 true ATE511700T1 (en) | 2011-06-15 |
Family
ID=40572149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08017647T ATE511700T1 (en) | 2007-10-10 | 2008-10-08 | EXCIMER LAMPS |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5092950B2 (en) |
CN (1) | CN101409206B (en) |
AT (1) | ATE511700T1 (en) |
TW (1) | TWI399786B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5278648B2 (en) * | 2007-12-11 | 2013-09-04 | ウシオ電機株式会社 | Excimer lamp |
JP5293430B2 (en) * | 2009-06-11 | 2013-09-18 | ウシオ電機株式会社 | Excimer lamp |
CN106098531A (en) * | 2016-06-23 | 2016-11-09 | 卜弘昊 | A kind of narrow ripple ultraviolet source discharge lamp |
CN105957799A (en) * | 2016-06-23 | 2016-09-21 | 卜弘昊 | High-power vacuum ultraviolet discharge lamp |
CN105977131A (en) * | 2016-06-23 | 2016-09-28 | 卜弘昊 | High-frequency excitation medium electric-discharge lamp |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5263244A (en) * | 1975-11-20 | 1977-05-25 | Matsushita Electronics Corp | Method of coating lighttscattering film onto inner surface of tube valve |
JPS57172653A (en) * | 1981-04-16 | 1982-10-23 | Tokyo Shibaura Electric Co | Method of forming scattering film of bulb |
JPH09153344A (en) * | 1995-11-30 | 1997-06-10 | Toshiba Lighting & Technol Corp | Fluorescent lamp and lighting system |
JP3580233B2 (en) * | 2000-09-19 | 2004-10-20 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
US7563512B2 (en) * | 2004-08-23 | 2009-07-21 | Heraeus Quarzglas Gmbh & Co. Kg | Component with a reflector layer and method for producing the same |
TWM269431U (en) * | 2004-11-11 | 2005-07-01 | C Sun Mfg Ltd | Structure of ultraviolet lamp tube with low infrared illumination |
KR20080002851A (en) * | 2005-04-22 | 2008-01-04 | 호야 칸데오 옵트로닉스 가부시키가이샤 | Excimer lamp |
KR100850299B1 (en) * | 2005-07-29 | 2008-08-04 | 가부시키가이샤 지에스 유아사 코포레이션 | Uv lamp and uv irradiation unit |
JP4857939B2 (en) * | 2006-06-19 | 2012-01-18 | ウシオ電機株式会社 | Discharge lamp |
JP4788534B2 (en) * | 2006-09-07 | 2011-10-05 | ウシオ電機株式会社 | Excimer lamp |
-
2008
- 2008-07-08 JP JP2008177792A patent/JP5092950B2/en active Active
- 2008-08-20 TW TW97131729A patent/TWI399786B/en active
- 2008-10-08 AT AT08017647T patent/ATE511700T1/en active
- 2008-10-10 CN CN2008101692682A patent/CN101409206B/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW200917325A (en) | 2009-04-16 |
JP5092950B2 (en) | 2012-12-05 |
TWI399786B (en) | 2013-06-21 |
CN101409206B (en) | 2012-09-05 |
JP2009110927A (en) | 2009-05-21 |
CN101409206A (en) | 2009-04-15 |
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Legal Events
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