ATE510936T1 - Vorrichtung zum eintragen von vorläufern in eine kammer in gepulstem modus mit messung und regelung der strömungsrate - Google Patents
Vorrichtung zum eintragen von vorläufern in eine kammer in gepulstem modus mit messung und regelung der strömungsrateInfo
- Publication number
- ATE510936T1 ATE510936T1 AT05796061T AT05796061T ATE510936T1 AT E510936 T1 ATE510936 T1 AT E510936T1 AT 05796061 T AT05796061 T AT 05796061T AT 05796061 T AT05796061 T AT 05796061T AT E510936 T1 ATE510936 T1 AT E510936T1
- Authority
- AT
- Austria
- Prior art keywords
- chamber
- tank
- injector
- control
- measurement
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45557—Pulsed pressure or control pressure
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
- G05D16/2053—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures the plurality of throttling means comprising only a first throttling means acting on a higher pressure and a second throttling means acting on a lower pressure, e.g. the atmosphere
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0688—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by combined action on throttling means and flow sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Fluid Mechanics (AREA)
- Materials Engineering (AREA)
- Automation & Control Theory (AREA)
- Metallurgy (AREA)
- Dispersion Chemistry (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Flow Control (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0408704A FR2874028B1 (fr) | 2004-08-06 | 2004-08-06 | Dispositif d'introduction dans une enceinte de precurseurs liquides en mode pulse avec mesure et controle du debit |
PCT/FR2005/002049 WO2006021670A2 (fr) | 2004-08-06 | 2005-08-05 | Dispositif d'introduction dans une enceinte de precurseurs liquides en mode pulse avec mesure et controle du debit |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE510936T1 true ATE510936T1 (de) | 2011-06-15 |
Family
ID=34947520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05796061T ATE510936T1 (de) | 2004-08-06 | 2005-08-05 | Vorrichtung zum eintragen von vorläufern in eine kammer in gepulstem modus mit messung und regelung der strömungsrate |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100012027A1 (de) |
EP (1) | EP1786950B1 (de) |
AT (1) | ATE510936T1 (de) |
FR (1) | FR2874028B1 (de) |
WO (1) | WO2006021670A2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2900070B1 (fr) | 2006-04-19 | 2008-07-11 | Kemstream Soc Par Actions Simp | Dispositif d'introduction ou d'injection ou de pulverisation d'un melange de gaz vecteur et de composes liquides et procede de mise en oeuvre dudit dispositif. |
TWI506391B (zh) * | 2010-04-15 | 2015-11-01 | Novellus Systems Inc | 氣體及液體注射系統 |
JP6158111B2 (ja) * | 2014-02-12 | 2017-07-05 | 東京エレクトロン株式会社 | ガス供給方法及び半導体製造装置 |
CN106125775B (zh) * | 2016-07-05 | 2018-12-04 | 中国核动力研究设计院 | 基于对蒸汽流量进行蒸发、计量及控制的方法 |
CN106125776B (zh) * | 2016-07-05 | 2018-10-30 | 中国核动力研究设计院 | 对蒸汽流量进行蒸发、计量及自动控制的方法 |
DE102019106682B4 (de) * | 2019-03-15 | 2022-07-07 | Bürkert Werke GmbH & Co. KG | Druckregler |
US11459654B2 (en) * | 2020-11-19 | 2022-10-04 | Eugenus, Inc. | Liquid precursor injection for thin film deposition |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3347418A (en) * | 1965-10-23 | 1967-10-17 | Polaroid Corp | Liquid dispenser utilizing controlled gas pressure |
DE3222425A1 (de) * | 1982-06-15 | 1983-12-22 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Generator zum antrieb eines piezoresonators |
JPS61175565A (ja) * | 1985-01-30 | 1986-08-07 | Shimadzu Corp | 高速液体クロマトグラフ |
FR2586307B1 (fr) * | 1985-08-19 | 1988-09-16 | Sfr Sa Robinetterie | Ensemble de prelevement et de regulation du debit et de la pression d'un liquide |
JPH05215738A (ja) * | 1992-02-06 | 1993-08-24 | Shimadzu Corp | 高速液体クロマトグラフ装置 |
FR2707671B1 (fr) * | 1993-07-12 | 1995-09-15 | Centre Nat Rech Scient | Procédé et dispositif d'introduction de précurseurs dans une enceinte de dépôt chimique en phase vapeur. |
US5450743A (en) * | 1994-01-10 | 1995-09-19 | Zymark Corporation | Method for providing constant flow in liquid chromatography system |
US5620524A (en) * | 1995-02-27 | 1997-04-15 | Fan; Chiko | Apparatus for fluid delivery in chemical vapor deposition systems |
US5806716A (en) * | 1996-08-29 | 1998-09-15 | Optima Corporation | Mass flow, fluid measuring and dispensing system |
WO1998010116A1 (en) * | 1996-09-05 | 1998-03-12 | Talison Research | Ultrasonic nozzle feed for plasma deposited film networks |
US6176930B1 (en) * | 1999-03-04 | 2001-01-23 | Applied Materials, Inc. | Apparatus and method for controlling a flow of process material to a deposition chamber |
DE10061188A1 (de) * | 2000-12-08 | 2002-07-11 | Knf Flodos Ag Sursee | Pulsationsdämpfer |
US6630028B2 (en) * | 2000-12-08 | 2003-10-07 | Glass Equipment Development, Inc. | Controlled dispensing of material |
US20030098069A1 (en) * | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
-
2004
- 2004-08-06 FR FR0408704A patent/FR2874028B1/fr not_active Expired - Fee Related
-
2005
- 2005-08-05 WO PCT/FR2005/002049 patent/WO2006021670A2/fr active Application Filing
- 2005-08-05 US US11/659,337 patent/US20100012027A1/en not_active Abandoned
- 2005-08-05 EP EP05796061A patent/EP1786950B1/de not_active Not-in-force
- 2005-08-05 AT AT05796061T patent/ATE510936T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1786950A2 (de) | 2007-05-23 |
FR2874028B1 (fr) | 2006-10-27 |
WO2006021670A2 (fr) | 2006-03-02 |
EP1786950B1 (de) | 2011-05-25 |
FR2874028A1 (fr) | 2006-02-10 |
US20100012027A1 (en) | 2010-01-21 |
WO2006021670A3 (fr) | 2006-05-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |