ATE510220T1 - Chemisch geätzter mikrokontakt - Google Patents

Chemisch geätzter mikrokontakt

Info

Publication number
ATE510220T1
ATE510220T1 AT02020973T AT02020973T ATE510220T1 AT E510220 T1 ATE510220 T1 AT E510220T1 AT 02020973 T AT02020973 T AT 02020973T AT 02020973 T AT02020973 T AT 02020973T AT E510220 T1 ATE510220 T1 AT E510220T1
Authority
AT
Austria
Prior art keywords
photoresist
probes
metal foil
mask
chemical etched
Prior art date
Application number
AT02020973T
Other languages
English (en)
Inventor
Fran Mcquade
Charles Barto
Original Assignee
Wentworth Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wentworth Lab Inc filed Critical Wentworth Lab Inc
Application granted granted Critical
Publication of ATE510220T1 publication Critical patent/ATE510220T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06744—Microprobes, i.e. having dimensions as IC details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • ing And Chemical Polishing (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AT02020973T 2001-09-20 2002-09-19 Chemisch geätzter mikrokontakt ATE510220T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32365101P 2001-09-20 2001-09-20
US10/027,146 US6906540B2 (en) 2001-09-20 2001-12-20 Method for chemically etching photo-defined micro electrical contacts

Publications (1)

Publication Number Publication Date
ATE510220T1 true ATE510220T1 (de) 2011-06-15

Family

ID=26702127

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02020973T ATE510220T1 (de) 2001-09-20 2002-09-19 Chemisch geätzter mikrokontakt

Country Status (7)

Country Link
US (1) US6906540B2 (de)
EP (1) EP1300685B1 (de)
JP (1) JP3696849B2 (de)
KR (1) KR100690235B1 (de)
AT (1) ATE510220T1 (de)
HK (1) HK1054790A1 (de)
TW (1) TW567553B (de)

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US6977515B2 (en) * 2001-09-20 2005-12-20 Wentworth Laboratories, Inc. Method for forming photo-defined micro electrical contacts
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US8116860B2 (en) 2002-03-11 2012-02-14 Altea Therapeutics Corporation Transdermal porator and patch system and method for using same
US9918665B2 (en) 2002-03-11 2018-03-20 Nitto Denko Corporation Transdermal porator and patch system and method for using same
US8016811B2 (en) 2003-10-24 2011-09-13 Altea Therapeutics Corporation Method for transdermal delivery of permeant substances
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CA2570886A1 (en) * 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
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TWI284209B (en) * 2005-12-30 2007-07-21 Ind Tech Res Inst A method of fabricating vertical probe head
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TWI332086B (en) * 2006-10-24 2010-10-21 Ind Tech Res Inst Multi-layer electric probe and fabricating method
US7642793B2 (en) 2006-11-22 2010-01-05 Taiwan Semiconductor Manufacturing Company, Ltd. Ultra-fine pitch probe card structure
US7696766B2 (en) * 2007-01-31 2010-04-13 Taiwan Semiconductor Manufacturing Company, Ltd. Ultra-fine pitch probe card structure
US8264248B2 (en) * 2007-03-30 2012-09-11 Dsl Labs, Inc. Micro probe assembly
US20080238452A1 (en) * 2007-03-30 2008-10-02 Dsl Labs, Incorporated Vertical micro probes
US7554348B2 (en) * 2007-06-29 2009-06-30 Wentworth Laboratories, Inc. Multi-offset die head
US7733102B2 (en) 2007-07-10 2010-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Ultra-fine area array pitch probe card
KR100932104B1 (ko) 2008-06-09 2009-12-16 (주)에이원메카 사선형 탐침부재를 구비한 프로브 블록 및 상기탐침부재를 제조하는 방법
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
KR101073829B1 (ko) * 2009-05-14 2011-10-14 주식회사 프로이천 프로브핀 제조방법
EP2649463B1 (de) 2010-12-09 2019-05-08 Wentworth Laboratories, Inc. Sondenkartenbaugruppen und sondenspitzen mit kohlenstoffnanoröhren
TWI525326B (zh) * 2013-06-03 2016-03-11 Probe and probe module using the probe
CN103983933B (zh) * 2014-05-08 2017-09-19 工业和信息化部电子第五研究所 板级射频电流探头频率标定方法及系统和装置
JP7130247B2 (ja) * 2019-05-31 2022-09-05 共進電機株式会社 プローブ及び太陽電池セル用測定装置

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Also Published As

Publication number Publication date
US20030057957A1 (en) 2003-03-27
KR20030025827A (ko) 2003-03-29
JP2003185678A (ja) 2003-07-03
KR100690235B1 (ko) 2007-03-12
EP1300685A2 (de) 2003-04-09
EP1300685B1 (de) 2011-05-18
US6906540B2 (en) 2005-06-14
HK1054790A1 (en) 2003-12-12
EP1300685A3 (de) 2003-05-21
TW567553B (en) 2003-12-21
JP3696849B2 (ja) 2005-09-21

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties