ATE509258T1 - Bolometrischer detektor für elektromagnetische strahlung im spektralbereich von infrarot bis terahertz und detektoranordnung mit solchen detektoren. - Google Patents
Bolometrischer detektor für elektromagnetische strahlung im spektralbereich von infrarot bis terahertz und detektoranordnung mit solchen detektoren.Info
- Publication number
- ATE509258T1 ATE509258T1 AT10305323T AT10305323T ATE509258T1 AT E509258 T1 ATE509258 T1 AT E509258T1 AT 10305323 T AT10305323 T AT 10305323T AT 10305323 T AT10305323 T AT 10305323T AT E509258 T1 ATE509258 T1 AT E509258T1
- Authority
- AT
- Austria
- Prior art keywords
- detector
- load
- terahertz
- detectors
- infrared
- Prior art date
Links
- 230000005670 electromagnetic radiation Effects 0.000 title 1
- 230000003595 spectral effect Effects 0.000 title 1
- 238000002955 isolation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0837—Microantennas, e.g. bow-tie
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0952862A FR2945119B1 (fr) | 2009-04-30 | 2009-04-30 | Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE509258T1 true ATE509258T1 (de) | 2011-05-15 |
Family
ID=41279802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT10305323T ATE509258T1 (de) | 2009-04-30 | 2010-03-30 | Bolometrischer detektor für elektromagnetische strahlung im spektralbereich von infrarot bis terahertz und detektoranordnung mit solchen detektoren. |
Country Status (5)
Country | Link |
---|---|
US (1) | US8373123B2 (de) |
EP (1) | EP2246677B1 (de) |
JP (2) | JP5684487B2 (de) |
AT (1) | ATE509258T1 (de) |
FR (1) | FR2945119B1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2941297B1 (fr) * | 2009-01-19 | 2011-02-11 | Commissariat Energie Atomique | Procede de fabrication d'un detecteur bolometrique |
JP5644121B2 (ja) * | 2010-01-26 | 2014-12-24 | セイコーエプソン株式会社 | 熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法 |
JP2012194080A (ja) * | 2011-03-17 | 2012-10-11 | Nec Corp | ボロメータ型THz波検出器 |
JP6140918B2 (ja) * | 2011-06-16 | 2017-06-07 | 日本信号株式会社 | テラヘルツ検出器 |
FR2983953B1 (fr) * | 2011-12-09 | 2014-01-03 | Commissariat Energie Atomique | Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs |
FR2983952B1 (fr) * | 2011-12-09 | 2013-11-15 | Commissariat Energie Atomique | Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz |
WO2014062254A2 (en) | 2012-07-03 | 2014-04-24 | Massachusetts Institute Of Technology | Detection of electromagnetic radiation using nonlinear materials |
CN103575407A (zh) * | 2012-07-18 | 2014-02-12 | 北京大学 | 一种太赫兹辐射探测器 |
FR2994596B1 (fr) * | 2012-08-20 | 2015-01-02 | Commissariat Energie Atomique | Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs |
US9261411B2 (en) | 2012-12-19 | 2016-02-16 | Institut National D'optique | Uncooled microbolometer detector and array for terahertz detection |
JP2014235146A (ja) * | 2013-06-05 | 2014-12-15 | セイコーエプソン株式会社 | テラヘルツ波検出装置、カメラ、イメージング装置および計測装置 |
US9766127B2 (en) | 2013-07-15 | 2017-09-19 | The Aerospace Corporation | Terahertz detection assembly and methods for use in detecting terahertz radiation |
FR3009865B1 (fr) * | 2013-08-22 | 2015-07-31 | Commissariat Energie Atomique | Detecteur bolometrique a bolometre de compensation a thermalisation renforcee |
CN105527026B (zh) * | 2014-09-29 | 2019-04-12 | 华中科技大学 | 一种像素单元及其构成的红外成像探测器 |
KR102177261B1 (ko) * | 2014-12-28 | 2020-11-11 | 한국전자기술연구원 | 테라헤르츠파 감지소자 |
JP6486695B2 (ja) | 2015-01-14 | 2019-03-20 | 浜松ホトニクス株式会社 | ボロメータ型THz検出器 |
CN105371966B (zh) * | 2015-11-13 | 2019-01-11 | 南方科技大学 | 一种新型辐射热测量计及制造方法 |
CN105486412A (zh) * | 2015-12-31 | 2016-04-13 | 武汉高芯科技有限公司 | 一种具有重叠垂直桥腿的非制冷红外焦平面阵列探测器 |
WO2019114239A1 (zh) * | 2017-12-13 | 2019-06-20 | 清华大学 | 基于太赫兹的探测大气高危化学品的方法和系统 |
TWI724708B (zh) | 2019-12-24 | 2021-04-11 | 財團法人工業技術研究院 | 具有阻擋元件的微機電紅外光感測裝置 |
FR3120261A1 (fr) | 2021-03-12 | 2022-09-02 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Détecteur thermique d’un rayonnement électromagnétique comportant une antenne et une charge résistive couplées de manière inductive |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06275926A (ja) * | 1993-03-18 | 1994-09-30 | Mitsubishi Electric Corp | 高周波混成集積回路装置 |
US6329655B1 (en) * | 1998-10-07 | 2001-12-11 | Raytheon Company | Architecture and method of coupling electromagnetic energy to thermal detectors |
US6329649B1 (en) * | 1998-10-07 | 2001-12-11 | Raytheon Company | Mm-wave/IR monolithically integrated focal plane array |
GB0110468D0 (en) * | 2001-04-28 | 2001-06-20 | Secr Defence | MM-Wave Terrestrial Imager |
CA2472968A1 (en) * | 2002-01-09 | 2003-07-17 | Geir Monsen Vavik | Analogue regenerative transponders, including regenerative transponder systems |
FR2845157B1 (fr) * | 2002-10-01 | 2004-11-05 | Commissariat Energie Atomique | Detecteur bolometrique a antenne comportant un interrupteur et dispositif d'imagerie le comportant. |
FR2855609B1 (fr) * | 2003-05-26 | 2005-07-01 | Commissariat Energie Atomique | Dispositif de detection bolometrique a antenne, a cavite optimisee, pour ondes electromagnetiques millimetriques ou submillimetriques, et procede de fabrication de ce dispositif |
US7038623B2 (en) * | 2003-12-04 | 2006-05-02 | Raytheon Company | Method and apparatus for detecting radiation at one wavelength using a detector for a different wavelength |
JP4221424B2 (ja) * | 2006-08-09 | 2009-02-12 | 株式会社東芝 | 固体撮像素子及びその製造方法並びに撮像装置 |
JP5109169B2 (ja) * | 2007-03-27 | 2012-12-26 | 日本電気株式会社 | ボロメータ型THz波検出器 |
-
2009
- 2009-04-30 FR FR0952862A patent/FR2945119B1/fr not_active Expired - Fee Related
-
2010
- 2010-03-23 US US12/729,651 patent/US8373123B2/en active Active
- 2010-03-30 AT AT10305323T patent/ATE509258T1/de not_active IP Right Cessation
- 2010-03-30 JP JP2010076806A patent/JP5684487B2/ja not_active Expired - Fee Related
- 2010-03-30 EP EP10305323A patent/EP2246677B1/de active Active
-
2014
- 2014-09-05 JP JP2014181496A patent/JP2015042981A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2945119B1 (fr) | 2011-04-08 |
JP5684487B2 (ja) | 2015-03-11 |
EP2246677B1 (de) | 2011-05-11 |
EP2246677A1 (de) | 2010-11-03 |
US20100276597A1 (en) | 2010-11-04 |
JP2015042981A (ja) | 2015-03-05 |
FR2945119A1 (fr) | 2010-11-05 |
US8373123B2 (en) | 2013-02-12 |
JP2010261935A (ja) | 2010-11-18 |
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