ATE487579T1 - METHOD, SYSTEM, HOLDER AND ARRANGEMENT FOR TRANSFERRING TEMPLATES IN IMPRINT LITHOGRAPHY PROCESSES - Google Patents

METHOD, SYSTEM, HOLDER AND ARRANGEMENT FOR TRANSFERRING TEMPLATES IN IMPRINT LITHOGRAPHY PROCESSES

Info

Publication number
ATE487579T1
ATE487579T1 AT04751888T AT04751888T ATE487579T1 AT E487579 T1 ATE487579 T1 AT E487579T1 AT 04751888 T AT04751888 T AT 04751888T AT 04751888 T AT04751888 T AT 04751888T AT E487579 T1 ATE487579 T1 AT E487579T1
Authority
AT
Austria
Prior art keywords
holder
arrangement
imprint lithography
lithography processes
transferring templates
Prior art date
Application number
AT04751888T
Other languages
German (de)
Inventor
Mario Meissl
Byung-Jin Choi
Daniel Babbs
Hillman Bailey
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/438,224 external-priority patent/US6805054B1/en
Priority claimed from US10/437,476 external-priority patent/US6951173B1/en
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Application granted granted Critical
Publication of ATE487579T1 publication Critical patent/ATE487579T1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F11/00—Rotary presses or machines having forme cylinders carrying a plurality of printing surfaces, or for performing letterpress, lithographic, or intaglio processes selectively or in combination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/34—Feeding the material to the mould or the compression means
    • B29C2043/3488—Feeding the material to the mould or the compression means uniformly distributed into the mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Disclosed are a method system holder (40a) and template for transferring template (26). A motion stage having a template transfer holder is provided. The transfer holder is adapted to have a patterned mold facing the motion stage.
AT04751888T 2003-05-14 2004-05-11 METHOD, SYSTEM, HOLDER AND ARRANGEMENT FOR TRANSFERRING TEMPLATES IN IMPRINT LITHOGRAPHY PROCESSES ATE487579T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/438,224 US6805054B1 (en) 2003-05-14 2003-05-14 Method, system and holder for transferring templates during imprint lithography processes
US10/437,476 US6951173B1 (en) 2003-05-14 2003-05-14 Assembly and method for transferring imprint lithography templates
PCT/US2004/014720 WO2004103666A2 (en) 2003-05-14 2004-05-11 Method, system, holder and assembly for transferring templates during imprint lithography processes

Publications (1)

Publication Number Publication Date
ATE487579T1 true ATE487579T1 (en) 2010-11-15

Family

ID=33479226

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04751888T ATE487579T1 (en) 2003-05-14 2004-05-11 METHOD, SYSTEM, HOLDER AND ARRANGEMENT FOR TRANSFERRING TEMPLATES IN IMPRINT LITHOGRAPHY PROCESSES

Country Status (6)

Country Link
EP (2) EP2177951A1 (en)
JP (1) JP4937750B2 (en)
KR (1) KR101055640B1 (en)
AT (1) ATE487579T1 (en)
DE (1) DE602004030001D1 (en)
WO (1) WO2004103666A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7523701B2 (en) 2005-03-07 2009-04-28 Asml Netherlands B.V. Imprint lithography method and apparatus
JP2007019485A (en) * 2005-06-07 2007-01-25 Obducat Ab Separation apparatus and separation method
EP1934669A4 (en) * 2005-08-25 2009-12-16 Molecular Imprints Inc System to transfer a template transfer body between a motion stage and a docking plate
US7665981B2 (en) 2005-08-25 2010-02-23 Molecular Imprints, Inc. System to transfer a template transfer body between a motion stage and a docking plate
JP2013022807A (en) * 2011-07-20 2013-02-04 Hitachi High-Technologies Corp Microstructure transfer device and stamper transport method
JP6593504B2 (en) * 2018-09-05 2019-10-23 大日本印刷株式会社 Imprint mold, blank for imprint mold, method for producing imprint mold substrate, and method for producing imprint mold
JP7732073B2 (en) * 2021-07-21 2025-09-01 コーニンクレッカ フィリップス エヌ ヴェ Imprinting device
EP4123377A1 (en) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Imprinting apparatus
US12228854B2 (en) * 2021-11-12 2025-02-18 Canon Kabushiki Kaisha Layer forming system including cover with support pads, a positioning system with the cover and support pads, and a method of loading a plate

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123467A (en) * 1977-04-04 1978-10-27 Inshiya Yuugen Molding method of light sensitive liquid resin and article
NL8300220A (en) * 1983-01-21 1984-08-16 Philips Nv DEVICE FOR THE RADIATION LITHOGRAPHIC TREATMENT OF A THIN SUBSTRATE.
JPS6012550A (en) * 1983-07-04 1985-01-22 Nippon Kogaku Kk <Nikon> Mask supply device for exposure transfer device
US4724222A (en) * 1986-04-28 1988-02-09 American Telephone And Telegraph Company, At&T Bell Laboratories Wafer chuck comprising a curved reference surface
JPH07104596B2 (en) * 1986-11-21 1995-11-13 キヤノン株式会社 Original storage cassette
JPS63162132A (en) * 1986-12-26 1988-07-05 Nippon Thompson Co Ltd Xy table
JPS63269519A (en) * 1987-04-27 1988-11-07 Nikon Corp Mask storage case
JPH05138683A (en) * 1991-11-18 1993-06-08 Niigata Eng Co Ltd Rotary injection molding machine
JP2577290B2 (en) * 1992-03-18 1997-01-29 日精樹脂工業株式会社 Stamper unit replacement method and automatic replacement device
JPH06166060A (en) * 1992-11-27 1994-06-14 Canon Inc Mold for optical disk substrate molding
US6482742B1 (en) * 2000-07-18 2002-11-19 Stephen Y. Chou Fluid pressure imprint lithography
JP3832891B2 (en) * 1996-03-28 2006-10-11 日本トムソン株式会社 XY table using linear electromagnetic actuator
JPH09328188A (en) * 1996-06-12 1997-12-22 Hitachi Ltd Board storage case
US6334960B1 (en) * 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
US6921615B2 (en) * 2000-07-16 2005-07-26 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods for imprint lithography
US6954275B2 (en) * 2000-08-01 2005-10-11 Boards Of Regents, The University Of Texas System Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
JP2002093748A (en) * 2000-09-19 2002-03-29 Nippon Telegr & Teleph Corp <Ntt> Imprint apparatus and imprint method
JP2004523906A (en) * 2000-10-12 2004-08-05 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム Templates for room-temperature and low-pressure micro and nano-transfer lithography
US6517977B2 (en) * 2001-03-28 2003-02-11 Motorola, Inc. Lithographic template and method of formation and use
TWI302228B (en) * 2002-11-13 2008-10-21 Molecular Imprints Inc A chucking system and method for modulating shapes of substrates
US6808646B1 (en) * 2003-04-29 2004-10-26 Hewlett-Packard Development Company, L.P. Method of replicating a high resolution three-dimensional imprint pattern on a compliant media of arbitrary size

Also Published As

Publication number Publication date
DE602004030001D1 (en) 2010-12-23
EP2177951A1 (en) 2010-04-21
JP4937750B2 (en) 2012-05-23
WO2004103666A3 (en) 2005-03-24
KR101055640B1 (en) 2011-08-09
EP1622750A2 (en) 2006-02-08
EP1622750A4 (en) 2009-04-29
WO2004103666A2 (en) 2004-12-02
EP1622750B1 (en) 2010-11-10
JP2007504683A (en) 2007-03-01
KR20060017514A (en) 2006-02-23

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