ATE479488T1 - Verfahren und vorrichtung zur behandlung eines gasstroms - Google Patents

Verfahren und vorrichtung zur behandlung eines gasstroms

Info

Publication number
ATE479488T1
ATE479488T1 AT07733698T AT07733698T ATE479488T1 AT E479488 T1 ATE479488 T1 AT E479488T1 AT 07733698 T AT07733698 T AT 07733698T AT 07733698 T AT07733698 T AT 07733698T AT E479488 T1 ATE479488 T1 AT E479488T1
Authority
AT
Austria
Prior art keywords
gas stream
treating
reactive species
hollow cathodes
receiving
Prior art date
Application number
AT07733698T
Other languages
English (en)
Inventor
Andrew James Seeley
Abreu Raul Antonio Abreu
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE479488T1 publication Critical patent/ATE479488T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/104—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/406—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Lasers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Gas Separation By Absorption (AREA)
AT07733698T 2006-06-28 2007-05-21 Verfahren und vorrichtung zur behandlung eines gasstroms ATE479488T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0612814.4A GB0612814D0 (en) 2006-06-28 2006-06-28 Method of treating a gas stream
PCT/GB2007/050277 WO2008001129A1 (en) 2006-06-28 2007-05-21 Method and apparatus for treating a gas stream

Publications (1)

Publication Number Publication Date
ATE479488T1 true ATE479488T1 (de) 2010-09-15

Family

ID=36888223

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07733698T ATE479488T1 (de) 2006-06-28 2007-05-21 Verfahren und vorrichtung zur behandlung eines gasstroms

Country Status (7)

Country Link
US (1) US20100269753A1 (de)
EP (1) EP2032235B1 (de)
AT (1) ATE479488T1 (de)
DE (1) DE602007008892D1 (de)
GB (1) GB0612814D0 (de)
TW (1) TWI456084B (de)
WO (1) WO2008001129A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110017140A1 (en) * 2006-07-21 2011-01-27 Christopher Mark Bailey Method of treating a gas stream
US20120009347A1 (en) * 2010-07-07 2012-01-12 Applied Materials, Inc. Precise temperature control for teos application by heat transfer fluid
US20120244685A1 (en) * 2011-03-24 2012-09-27 Nuflare Technology, Inc. Manufacturing Apparatus and Method for Semiconductor Device
US20140065307A1 (en) * 2012-09-06 2014-03-06 Synos Technology, Inc. Cooling substrate and atomic layer deposition apparatus using purge gas
KR102181122B1 (ko) * 2016-12-13 2020-11-20 주식회사 원익아이피에스 기판 처리 장치 및 이를 이용한 기판 처리 방법
US12180586B2 (en) * 2021-08-13 2024-12-31 NanoMaster, Inc. Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4210125C2 (de) * 1992-03-27 1996-02-01 Fraunhofer Ges Forschung Vorrichtung zum Gasflußsputtern
JP2872637B2 (ja) * 1995-07-10 1999-03-17 アプライド マテリアルズ インコーポレイテッド マイクロ波プラズマベースアプリケータ
US6045618A (en) * 1995-09-25 2000-04-04 Applied Materials, Inc. Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment
JP3154659B2 (ja) * 1996-04-12 2001-04-09 三菱重工業株式会社 プラズマピンチ法及びプラズマアーク炉
GB9615859D0 (en) 1996-07-29 1996-09-11 Boc Group Plc Processes and apparatus for the scrubbing of exhaust gas streams
DE19722624C2 (de) * 1997-05-30 2001-08-09 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung einer Vielzahl von Niedertemperatur-Plasmajets
SE516722C2 (sv) * 1999-04-28 2002-02-19 Hana Barankova Förfarande och apparat för plasmabehandling av gas
US6673323B1 (en) * 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
US6905577B1 (en) * 2000-07-24 2005-06-14 Ozomax Inc. Method for oxidation of volatile organic compounds contained in gaseous effluents and device thereof
US6576573B2 (en) * 2001-02-09 2003-06-10 Advanced Technology Materials, Inc. Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species
US6924401B2 (en) * 2001-04-10 2005-08-02 California Institute Of Technology Plasma microjet arrays for selective oxidation of methane to methanol
US7045406B2 (en) * 2002-12-03 2006-05-16 Asm International, N.V. Method of forming an electrode with adjusted work function
US7632379B2 (en) * 2003-05-30 2009-12-15 Toshio Goto Plasma source and plasma processing apparatus
US8236105B2 (en) * 2004-04-08 2012-08-07 Applied Materials, Inc. Apparatus for controlling gas flow in a semiconductor substrate processing chamber
KR20090019816A (ko) * 2006-05-05 2009-02-25 플라스코에너지 아이피 홀딩스, 에스.엘., 빌바오, 샤프하우젠 브랜치 가스 조절 시스템
US7798096B2 (en) * 2006-05-05 2010-09-21 Applied Materials, Inc. Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool

Also Published As

Publication number Publication date
US20100269753A1 (en) 2010-10-28
DE602007008892D1 (de) 2010-10-14
TW200815621A (en) 2008-04-01
TWI456084B (zh) 2014-10-11
GB0612814D0 (en) 2006-08-09
EP2032235B1 (de) 2010-09-01
WO2008001129A1 (en) 2008-01-03
EP2032235A1 (de) 2009-03-11

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Legal Events

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