ATE472796T1 - Mutterplatte zur herstellung einer matrize, matrize, speichermedium, und verfahren zur herstellung der mutterplatte, der matrize und des speichermediums - Google Patents

Mutterplatte zur herstellung einer matrize, matrize, speichermedium, und verfahren zur herstellung der mutterplatte, der matrize und des speichermediums

Info

Publication number
ATE472796T1
ATE472796T1 AT03759087T AT03759087T ATE472796T1 AT E472796 T1 ATE472796 T1 AT E472796T1 AT 03759087 T AT03759087 T AT 03759087T AT 03759087 T AT03759087 T AT 03759087T AT E472796 T1 ATE472796 T1 AT E472796T1
Authority
AT
Austria
Prior art keywords
die
storage medium
producing
mother plate
plate
Prior art date
Application number
AT03759087T
Other languages
English (en)
Inventor
Roland Tacken
Der Veer Mark Van
Rolf Custers
Original Assignee
Singulus Mastering B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Singulus Mastering B V filed Critical Singulus Mastering B V
Application granted granted Critical
Publication of ATE472796T1 publication Critical patent/ATE472796T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
AT03759087T 2002-10-28 2003-10-28 Mutterplatte zur herstellung einer matrize, matrize, speichermedium, und verfahren zur herstellung der mutterplatte, der matrize und des speichermediums ATE472796T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1021760A NL1021760C2 (nl) 2002-10-28 2002-10-28 Moederplaat voor het fabriceren van een stempelplaat alsmede een stempelplaat en opslagmedium en een werkwijze voor het fabriceren van de moederplaat, stempelplaat en opslagmedium.
PCT/NL2003/000732 WO2004038714A1 (en) 2002-10-28 2003-10-28 Master plate for fabricating a stamper plate, stamper plate, storage medium, and method for fabricating the master plate, stamper plate and storage medium

Publications (1)

Publication Number Publication Date
ATE472796T1 true ATE472796T1 (de) 2010-07-15

Family

ID=32171731

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03759087T ATE472796T1 (de) 2002-10-28 2003-10-28 Mutterplatte zur herstellung einer matrize, matrize, speichermedium, und verfahren zur herstellung der mutterplatte, der matrize und des speichermediums

Country Status (8)

Country Link
US (1) US20060024619A1 (de)
EP (1) EP1559099B1 (de)
AT (1) ATE472796T1 (de)
AU (1) AU2003275737A1 (de)
DE (1) DE60333212D1 (de)
NL (1) NL1021760C2 (de)
TW (1) TW200415637A (de)
WO (1) WO2004038714A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7354845B2 (en) 2004-08-24 2008-04-08 Otb Group B.V. In-line process for making thin film electronic devices
JP5638463B2 (ja) * 2011-05-16 2014-12-10 株式会社東芝 パターン転写方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153850A (ja) * 1984-12-26 1986-07-12 Matsushita Electric Ind Co Ltd 光デイスク用原盤およびその製造方法
FR2591587A1 (fr) * 1985-12-17 1987-06-19 Saint Gobain Vitrage Film organo-mineral depose sur un substrat en verre eventuellement revetu d'une ou plusieurs couches metalliques minces.
US4904564A (en) * 1988-06-16 1990-02-27 International Business Machines Corporation Process for imaging multi-layer resist structure
JP2689672B2 (ja) * 1990-02-26 1997-12-10 日本電気株式会社 光ディスク基板の製造方法
CA2205549A1 (en) * 1994-11-22 1996-05-30 Craig M. Stauffer Non-aminic photoresist adhesion promoters for microelectronic applications
US6361921B1 (en) * 1998-11-12 2002-03-26 Andrew Michael Thompson Priming composition for bonding photoresists on substrates
NL1015524C2 (nl) * 2000-06-26 2001-12-28 Otb Group Bv Werkwijze ter vervaardiging van een substraat om te worden toegepast in een stampervervaardigingsproces, alsmede substraat verkregen volgens een dergelijke werkwijze.

Also Published As

Publication number Publication date
US20060024619A1 (en) 2006-02-02
EP1559099B1 (de) 2010-06-30
TW200415637A (en) 2004-08-16
EP1559099A1 (de) 2005-08-03
WO2004038714A1 (en) 2004-05-06
AU2003275737A1 (en) 2004-05-13
DE60333212D1 (de) 2010-08-12
NL1021760C2 (nl) 2004-05-03

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Legal Events

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