ATE428690T1 - Salz, welches für einen sauergenerator geeignet ist, sowie chemisch verstärkte resistzusammensetzung, die dieses enthält - Google Patents
Salz, welches für einen sauergenerator geeignet ist, sowie chemisch verstärkte resistzusammensetzung, die dieses enthältInfo
- Publication number
- ATE428690T1 ATE428690T1 AT06013261T AT06013261T ATE428690T1 AT E428690 T1 ATE428690 T1 AT E428690T1 AT 06013261 T AT06013261 T AT 06013261T AT 06013261 T AT06013261 T AT 06013261T AT E428690 T1 ATE428690 T1 AT E428690T1
- Authority
- AT
- Austria
- Prior art keywords
- group
- carbon atoms
- resist composition
- same
- composition containing
- Prior art date
Links
- 150000003839 salts Chemical class 0.000 title abstract 3
- 239000002253 acid Substances 0.000 title 1
- 125000004432 carbon atom Chemical group C* 0.000 abstract 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 3
- 125000001183 hydrocarbyl group Chemical group 0.000 abstract 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 abstract 2
- 125000002950 monocyclic group Chemical group 0.000 abstract 2
- 125000005010 perfluoroalkyl group Chemical group 0.000 abstract 2
- 125000003367 polycyclic group Chemical group 0.000 abstract 2
- 125000003545 alkoxy group Chemical group 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 125000004093 cyano group Chemical group *C#N 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 125000001153 fluoro group Chemical group F* 0.000 abstract 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
- C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
- C07C309/17—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing carboxyl groups bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2601/00—Systems containing only non-condensed rings
- C07C2601/06—Systems containing only non-condensed rings with a five-membered ring
- C07C2601/08—Systems containing only non-condensed rings with a five-membered ring the ring being saturated
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2601/00—Systems containing only non-condensed rings
- C07C2601/12—Systems containing only non-condensed rings with a six-membered ring
- C07C2601/14—The ring being saturated
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2602/00—Systems containing two condensed rings
- C07C2602/02—Systems containing two condensed rings the rings having only two atoms in common
- C07C2602/14—All rings being cycloaliphatic
- C07C2602/22—All rings being cycloaliphatic the ring system containing eight carbon atoms, e.g. pentalene
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/56—Ring systems containing bridged rings
- C07C2603/58—Ring systems containing bridged rings containing three rings
- C07C2603/70—Ring systems containing bridged rings containing three rings containing only six-membered rings
- C07C2603/74—Adamantanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Steroid Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP06013261A EP1873143B8 (de) | 2006-06-27 | 2006-06-27 | Salz, welches für einen Säuregenerator geeignet ist, sowie chemisch verstärkte Resistzusammensetzung, die dieses enthält |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE428690T1 true ATE428690T1 (de) | 2009-05-15 |
Family
ID=37635746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06013261T ATE428690T1 (de) | 2006-06-27 | 2006-06-27 | Salz, welches für einen sauergenerator geeignet ist, sowie chemisch verstärkte resistzusammensetzung, die dieses enthält |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1873143B8 (de) |
| AT (1) | ATE428690T1 (de) |
| DE (1) | DE602006006302D1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9034556B2 (en) * | 2007-12-21 | 2015-05-19 | Tokyo Ohka Kogyo Co., Ltd. | Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100538501B1 (ko) * | 1999-08-16 | 2005-12-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 신규한 오늄염, 레지스트 재료용 광산발생제, 레지스트재료 및 패턴 형성 방법 |
| JP2004004561A (ja) * | 2002-02-19 | 2004-01-08 | Sumitomo Chem Co Ltd | ポジ型レジスト組成物 |
-
2006
- 2006-06-27 AT AT06013261T patent/ATE428690T1/de not_active IP Right Cessation
- 2006-06-27 DE DE602006006302T patent/DE602006006302D1/de active Active
- 2006-06-27 EP EP06013261A patent/EP1873143B8/de not_active Not-in-force
Also Published As
| Publication number | Publication date |
|---|---|
| DE602006006302D1 (de) | 2009-05-28 |
| EP1873143B8 (de) | 2009-08-19 |
| EP1873143B1 (de) | 2009-04-15 |
| EP1873143A1 (de) | 2008-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |