ATE418720T1 - Mikroelektronischer strömungssensor - Google Patents

Mikroelektronischer strömungssensor

Info

Publication number
ATE418720T1
ATE418720T1 AT01989337T AT01989337T ATE418720T1 AT E418720 T1 ATE418720 T1 AT E418720T1 AT 01989337 T AT01989337 T AT 01989337T AT 01989337 T AT01989337 T AT 01989337T AT E418720 T1 ATE418720 T1 AT E418720T1
Authority
AT
Austria
Prior art keywords
sensor
flow passage
attach
lead frame
fluid
Prior art date
Application number
AT01989337T
Other languages
English (en)
Inventor
Richard Gehman
Jamie Speldrich
Christopher Blumhoff
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE418720T1 publication Critical patent/ATE418720T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
AT01989337T 2000-12-21 2001-12-20 Mikroelektronischer strömungssensor ATE418720T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/746,282 US6591674B2 (en) 2000-12-21 2000-12-21 System for sensing the motion or pressure of a fluid, the system having dimensions less than 1.5 inches, a metal lead frame with a coefficient of thermal expansion that is less than that of the body, or two rtds and a heat source

Publications (1)

Publication Number Publication Date
ATE418720T1 true ATE418720T1 (de) 2009-01-15

Family

ID=25000184

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01989337T ATE418720T1 (de) 2000-12-21 2001-12-20 Mikroelektronischer strömungssensor

Country Status (7)

Country Link
US (1) US6591674B2 (de)
EP (1) EP1344027B1 (de)
JP (1) JP2004521330A (de)
AT (1) ATE418720T1 (de)
AU (1) AU2002243440A1 (de)
DE (1) DE60137142D1 (de)
WO (1) WO2002057719A2 (de)

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Also Published As

Publication number Publication date
US6591674B2 (en) 2003-07-15
AU2002243440A1 (en) 2002-07-30
JP2004521330A (ja) 2004-07-15
US20020078744A1 (en) 2002-06-27
EP1344027B1 (de) 2008-12-24
DE60137142D1 (de) 2009-02-05
WO2002057719A3 (en) 2003-03-27
WO2002057719A2 (en) 2002-07-25
EP1344027A2 (de) 2003-09-17

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