ATE416398T1 - Array von räumlichen lichtmodulatoren und verfahren zur herstellung einer räumlichen lichtmodulationsvorrichtung - Google Patents

Array von räumlichen lichtmodulatoren und verfahren zur herstellung einer räumlichen lichtmodulationsvorrichtung

Info

Publication number
ATE416398T1
ATE416398T1 AT05805199T AT05805199T ATE416398T1 AT E416398 T1 ATE416398 T1 AT E416398T1 AT 05805199 T AT05805199 T AT 05805199T AT 05805199 T AT05805199 T AT 05805199T AT E416398 T1 ATE416398 T1 AT E416398T1
Authority
AT
Austria
Prior art keywords
spatial light
slms
substrate
array
producing
Prior art date
Application number
AT05805199T
Other languages
English (en)
Inventor
Samber Marc De
Jong Michiel De
Antonius Nellissen
Veen Nicolaas Van
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE416398T1 publication Critical patent/ATE416398T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Wire Bonding (AREA)
AT05805199T 2004-11-09 2005-11-03 Array von räumlichen lichtmodulatoren und verfahren zur herstellung einer räumlichen lichtmodulationsvorrichtung ATE416398T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04105607 2004-11-09

Publications (1)

Publication Number Publication Date
ATE416398T1 true ATE416398T1 (de) 2008-12-15

Family

ID=35539572

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05805199T ATE416398T1 (de) 2004-11-09 2005-11-03 Array von räumlichen lichtmodulatoren und verfahren zur herstellung einer räumlichen lichtmodulationsvorrichtung

Country Status (9)

Country Link
US (1) US20090040595A1 (de)
EP (1) EP1815295B1 (de)
JP (1) JP2008521024A (de)
KR (1) KR20070083985A (de)
CN (1) CN100524037C (de)
AT (1) ATE416398T1 (de)
DE (1) DE602005011475D1 (de)
TW (1) TW200630758A (de)
WO (1) WO2006051448A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8064122B2 (en) 2007-03-15 2011-11-22 Asml Holding N.V. Apertured window for enabling flexible illumination overfill of patterning devices
RU2587051C2 (ru) * 2011-05-13 2016-06-10 Эро-Селтик С.А. Интраназальные фармацевтические дозированные формы, содержащие налоксон
KR102151254B1 (ko) 2013-08-19 2020-09-03 삼성디스플레이 주식회사 노광장치 및 그 방법
CN216873443U (zh) 2019-01-04 2022-07-01 恩格特公司 精确对准的组件
WO2022115197A2 (en) * 2020-10-29 2022-06-02 Seurat Technologies, Inc. Light valve cooling system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5406906A (en) * 1994-01-18 1995-04-18 Ford Motor Company Preparation of crystallographically aligned films of silicon carbide by laser deposition of carbon onto silicon
US6466349B1 (en) * 1998-05-14 2002-10-15 Hughes Electronics Corporation Integrated optical transmitter
FR2789801B1 (fr) * 1999-02-12 2001-04-27 Thomson Tubes Electroniques Cathode a effet de champ a performances accrues
US6396711B1 (en) * 2000-06-06 2002-05-28 Agere Systems Guardian Corp. Interconnecting micromechanical devices
US6602427B1 (en) * 2000-08-28 2003-08-05 Xiang Zheng Tu Micromachined optical mechanical modulator based transmitter/receiver module
EP1280007B1 (de) * 2001-07-24 2008-06-18 ASML Netherlands B.V. Bilderzeugungsapparat
US6522793B1 (en) * 2001-11-21 2003-02-18 Andrei Szilagyi Low voltage electro-optic modulator with integrated driver
JP4140816B2 (ja) * 2002-05-24 2008-08-27 富士通株式会社 マイクロミラー素子
US6870554B2 (en) * 2003-01-07 2005-03-22 Anvik Corporation Maskless lithography with multiplexed spatial light modulators

Also Published As

Publication number Publication date
CN101057184A (zh) 2007-10-17
EP1815295B1 (de) 2008-12-03
WO2006051448A3 (en) 2006-12-21
TW200630758A (en) 2006-09-01
WO2006051448A2 (en) 2006-05-18
DE602005011475D1 (de) 2009-01-15
KR20070083985A (ko) 2007-08-24
JP2008521024A (ja) 2008-06-19
EP1815295A2 (de) 2007-08-08
CN100524037C (zh) 2009-08-05
US20090040595A1 (en) 2009-02-12

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